Laser crystallization apparatus and method of driving the same

    公开(公告)号:US10050067B2

    公开(公告)日:2018-08-14

    申请号:US15442407

    申请日:2017-02-24

    Abstract: A laser crystallization apparatus includes a laser generating module configured to generate a laser beam, an optical module configured to guide the laser beam, an annealing chamber comprising a stage on which a target substrate comprising an amorphous thin film formed therein is disposed, the stage being movable along an X-axis direction and a Y-axis direction, and a tilt refractive lens configured to transform the laser beam having a cross-sectional area of a rectangle shape into a tilted laser beam having a cross-sectional area of a non-rectangular parallelogram shape and to irradiate the tilted laser beam perpendicular to the stage.

    Method for manufacturing display device
    2.
    发明授权
    Method for manufacturing display device 有权
    显示装置制造方法

    公开(公告)号:US09224988B2

    公开(公告)日:2015-12-29

    申请号:US14085021

    申请日:2013-11-20

    CPC classification number: H01L51/56 H01L27/1266 H01L51/003 H01L2227/326

    Abstract: A method for manufacturing a display device includes: forming a deformed layer on a support substrate by a silane coupling agent; performing UV treatment on the deformed layer; forming a thin film substrate on the deformed layer; forming a pixel and an encapsulation member on the thin film substrate; and separating the support substrate from the thin film substrate.

    Abstract translation: 一种显示装置的制造方法包括:通过硅烷偶联剂在支撑基板上形成变形层; 对变形层进行紫外线处理; 在变形层上形成薄膜基板; 在所述薄膜基板上形成像素和封装构件; 以及将所述支撑基板与所述薄膜基板分离。

    Flexible organic light-emitting display device and method of manufacturing the same
    4.
    发明授权
    Flexible organic light-emitting display device and method of manufacturing the same 有权
    柔性有机发光显示装置及其制造方法

    公开(公告)号:US08815620B2

    公开(公告)日:2014-08-26

    申请号:US13779450

    申请日:2013-02-27

    Abstract: In a flexible organic light-emitting display device and a method of manufacturing the same, a photolysis layer and an electrostaticity prevention layer are sequentially formed on a carrier substrate, a first flexible substrate is formed on the electrostaticity prevention layer, a display unit is formed on the first flexible substrate, the display unit is covered with the second flexible substrate, and light is irradiated so as to decompose the photolysis layer and to remove the carrier substrate. The formed flexible organic light-emitting display device may have improved flexibility because a flexible substrate is used instead of a typical strong and thick glass substrate. In addition, occurrence of electrostaticity during the separation of the carrier substrate is suppressed by the electrostaticity prevention layer, and thus, damage of the display unit due to electrical impacts is also reduced.

    Abstract translation: 在柔性有机发光显示装置及其制造方法中,在载体基板上依次形成光解层和防静电层,在防静电层上形成第一柔性基板,形成显示单元 在第一柔性基板上,用第二柔性基板覆盖显示单元,照射光以分解光解层并除去载体基板。 形成的柔性有机发光显示装置可以具有改进的柔性,因为使用柔性基板代替典型的强而厚的玻璃基板。 此外,通过防静电层抑制载体基板分离期间的静电的发生,因此也会降低由于电击而引起的显示单元的损坏。

    Laser crystallization system and laser crystallization method

    公开(公告)号:US11171000B2

    公开(公告)日:2021-11-09

    申请号:US16864812

    申请日:2020-05-01

    Abstract: A laser crystallization system includes a transfer part that transfers a substrate on which an amorphous silicon thin film is deposited into a chamber, a laser irradiation part that irradiates an excimer laser to the substrate for crystallization of the amorphous silicon thin film in the chamber, a stage that supports the substrate in the chamber, a measuring part that measures a light transmittance value of the substrate, and a controller that controls the laser irradiation part to irradiate the excimer laser to the substrate when the light transmittance value is equal to or lower than a reference transmittance value and controls the laser irradiation part not to irradiate the excimer laser to the substrate when the light transmittance value is higher than the reference transmittance value.

    Flexible display device manufacturing method and carrier substrate for the method
    8.
    发明授权
    Flexible display device manufacturing method and carrier substrate for the method 有权
    灵活的显示装置制造方法和载体基板的方法

    公开(公告)号:US09293291B2

    公开(公告)日:2016-03-22

    申请号:US13773277

    申请日:2013-02-21

    Abstract: A method of manufacturing a flexible display device and a carrier substrate for manufacturing the same are disclosed. In one aspect, the method includes preparing a first release area and a first attachment area around the first surface area on a first surface, attaching a base substrate to the first surface, and forming a display unit on the base substrate corresponding to the first release area of the carrier substrate. The method also includes cutting the area of the base substrate corresponding to the first release area of the carrier substrate so as to include the display unit, and separating the cut base substrate from the carrier substrate. Thus, the carrier substrate and the base substrate may be smoothly combined with each other and separated from each other without an additional mask deposition process. Also, damage to a product that may occur during combination and separation of the substrates may be much reduced.

    Abstract translation: 公开了制造柔性显示装置的方法和用于制造其的载体基板。 一方面,该方法包括在第一表面上制备围绕第一表面区域的第一释放区域和第一附着区域,将基底基板附接到第一表面,以及在对应于第一释放件的基底基板上形成显示单元 载体基板的面积。 该方法还包括切割对应于载体衬底的第一释放区域的基底衬底的面积,以便包括显示单元,以及将切割的基底衬底与载体衬底分离。 因此,载体基板和基板可以彼此平滑地组合并且彼此分离,而不需要额外的掩模沉积工艺。 此外,可能会大大减少在组合和分离衬底期间可能发生的产品的损坏。

    FLEXIBLE ORGANIC LIGHT-EMITTING DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    FLEXIBLE ORGANIC LIGHT-EMITTING DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME 有权
    柔性有机发光显示装置及其制造方法

    公开(公告)号:US20140042399A1

    公开(公告)日:2014-02-13

    申请号:US13779450

    申请日:2013-02-27

    Abstract: In a flexible organic light-emitting display device and a method of manufacturing the same, a photolysis layer and an electrostaticity prevention layer are sequentially formed on a carrier substrate, a first flexible substrate is formed on the electrostaticity prevention layer, a display unit is formed on the first flexible substrate, the display unit is covered with the second flexible substrate, and light is irradiated so as to decompose the photolysis layer and to remove the carrier substrate. The formed flexible organic light-emitting display device may have improved flexibility because a flexible substrate is used instead of a typical strong and thick glass substrate. In addition, occurrence of electrostaticity during the separation of the carrier substrate is suppressed by the electrostaticity prevention layer, and thus, damage of the display unit due to electrical impacts is also reduced.

    Abstract translation: 在柔性有机发光显示装置及其制造方法中,在载体基板上依次形成光解层和防静电层,在防静电层上形成第一柔性基板,形成显示单元 在第一柔性基板上,用第二柔性基板覆盖显示单元,照射光以分解光解层并除去载体基板。 形成的柔性有机发光显示装置可以具有改进的柔性,因为使用柔性基板代替典型的强而厚的玻璃基板。 此外,通过防静电层抑制载体基板分离期间的静电的发生,因此也会降低由于电击而引起的显示单元的损坏。

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