RESISTIVE RANDOM ACCESS MEMORY (RRAM) DEVICES EMPLOYING BOUNDED FILAMENT FORMATION REGIONS, AND RELATED METHODS OF FABRICATING

    公开(公告)号:US20200328350A1

    公开(公告)日:2020-10-15

    申请号:US16382880

    申请日:2019-04-12

    Abstract: An RRAM device is disclosed, having reduced area without increased performance variation, formed by employing a bounded filament formation region in which an oxide layer is thinner and an implanted ion concentration is higher than in a peripheral region of the oxide layer surrounding the bounded filament formation region. Filament formation is controlled to occur in a bounded region having a reduced area by thinning the oxide layer in the bounded region to increase an electric field strength in the bounded region. Defects in the bounded region are subject to greater force from the electric field than defects in the peripheral region. By implanting additional mobile ions or other ion species in the bounded region by an accurately controlled process, a higher concentration of defects is introduced into the bounded region to promote filament formation. Memory elements based on the RRAM device are formed at higher density and lower cost.

    Integrated circuit with metal gate having dielectric portion over isolation area

    公开(公告)号:US10756085B2

    公开(公告)日:2020-08-25

    申请号:US15835810

    申请日:2017-12-08

    Inventor: Ye Lu Bin Yang Lixin Ge

    Abstract: An integrated circuit may include a substrate, a first three-dimensional (3D) transistor formed on a first diffusion region of the substrate, and a second 3D transistor formed on a second diffusion region of the substrate. The first 3D transistor may include a gate that extends from between a source and a drain of the first 3D transistor, across an isolation region of the substrate, to and between a source and a drain of the second 3D transistor. The gate may include a gate metal that has an isolation portion extending over the isolation region of the substrate and a diffusion portion extending over the first and second diffusion regions of the substrate. The isolation portion of the gate metal has a thickness less than a maximum thickness of the diffusion portion of the gate metal.

    Planar double gate semiconductor device

    公开(公告)号:US10205018B1

    公开(公告)日:2019-02-12

    申请号:US15676494

    申请日:2017-08-14

    Abstract: Certain aspects of the present disclosure generally relate to a semiconductor device. The semiconductor device generally includes a substrate, a channel disposed above the substrate, and a first dielectric layer disposed adjacent to a first side of the channel. The semiconductor device may also include a first non-insulative region disposed between the first dielectric layer and the substrate, and a second dielectric layer disposed adjacent to a second side of the channel, wherein the first dielectric layer and the second dielectric layer comprise high-k layers. In certain aspects, a second non-insulative region may be disposed above the second dielectric layer, and a third non-insulative region may be disposed adjacent to a third side of the channel.

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