Method and system for diamond-based oxygen sensor
    12.
    发明授权
    Method and system for diamond-based oxygen sensor 有权
    基于金刚石氧传感器的方法和系统

    公开(公告)号:US09349801B2

    公开(公告)日:2016-05-24

    申请号:US14828718

    申请日:2015-08-18

    CPC classification number: G01N27/4141 C30B29/04 H01L29/1602 H01L29/45

    Abstract: A diamond based oxygen sensor is able to function in harsh environment conditions. The oxygen sensor includes a gateless field effect transistor including a synthetic, quasi-intrinsic, hydrogen-passivated, monocrystalline diamond layer exhibiting a 2-dimension hole gas effect. The oxygen sensor also includes a sensing layer comprising yttrium-stabilized zirconia deposited onto a surface of the gateless field effect transistor.

    Abstract translation: 基于钻石的氧传感器能够在恶劣的环境条件下起作用。 氧传感器包括一个无盖场效应晶体管,其包括显示出二维空穴效应的合成的,本征的,氢钝化的单晶金刚石层。 氧传感器还包括感测层,其包含沉积在无平台场效应晶体管的表面上的钇稳定的氧化锆。

    METHOD AND SYSTEM FOR DIAMOND-BASED OXYGEN SENSOR
    13.
    发明申请
    METHOD AND SYSTEM FOR DIAMOND-BASED OXYGEN SENSOR 有权
    基于金刚石氧化物传感器的方法和系统

    公开(公告)号:US20160056239A1

    公开(公告)日:2016-02-25

    申请号:US14828718

    申请日:2015-08-18

    CPC classification number: G01N27/4141 C30B29/04 H01L29/1602 H01L29/45

    Abstract: A diamond based oxygen sensor is able to function in harsh environment conditions. The oxygen sensor includes a gateless field effect transistor including a synthetic, quasi-intrinsic, hydrogen-passivated, monocrystalline diamond layer exhibiting a 2-dimension hole gas effect. The oxygen sensor also includes a sensing layer comprising yttrium-stabilized zirconia deposited onto a surface of the gateless field effect transistor.

    Abstract translation: 基于钻石的氧传感器能够在恶劣的环境条件下起作用。 氧传感器包括一个无盖场效应晶体管,其包括显示出二维空穴效应的合成的,本征的,氢钝化的单晶金刚石层。 氧传感器还包括感测层,其包含沉积在无平台场效应晶体管的表面上的钇稳定的氧化锆。

Patent Agency Ranking