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公开(公告)号：US10832901B2
公开(公告)日：2020-11-10
申请号：US16424206
申请日：2019-05-28
Applicant: FEI Company
Inventor： Bert Henning Freitag , Sorin Lazar , Stephan Kujawa , Maarten Kuijper , Gerard Nicolaas Anne van Veen , Peter Christiaan Tiemeijer , Jamie McCormack
Abstract: A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: Producing a beam of electrons from a source; Using an illuminator to direct said beam so as to irradiate the specimen; Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; and A detector, comprising a detection surface that is sub-divided into a plurality of detection zones, specifically comprising: Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; and Reading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.
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公开(公告)号：US09978561B2
公开(公告)日：2018-05-22
申请号：US15230667
申请日：2016-08-08
Applicant: FEI Company
Inventor： Alexander Henstra , Peter Christiaan Tiemeijer
CPC classification number: H01J37/28 , H01J37/05 , H01J37/14 , H01J37/22 , H01J37/263 , H01J2237/057 , H01J2237/1534 , H01J2237/2802
Abstract: The invention relates to a post-column filter (a PCF) for a (Scanning) Transmission Electron Microscope (a (S)TEM). Traditionally these filters use excitations of the optical elements before the slit plane that are identical in both the EFTEM and the EELS mode. Although this eases the task for the person skilled in the art of developing and tuning a PCF, as it reduces the number of degrees of freedom to a manageable amount. Inventors found ways to determine settings of the optical elements before the slit plane for EELS mode that are different from the EFTEM mode and where the performance of the PCF in EELS mode is improved (especially the relative energy range that can be imaged) without degrading the performance of the PCF in EFTEM mode.
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公开(公告)号：US20150041647A1
公开(公告)日：2015-02-12
申请号：US14455802
申请日：2014-08-08
Applicant: FEI Company
IPC: H01J37/26 , H01J37/22 , H01J37/147
CPC classification number: H01J37/261 , H01J37/147 , H01J37/22 , H01J37/26 , H01J37/263 , H01J2237/006 , H01J2237/2605 , H01J2237/262
Abstract: An environmental transmission electron microscope (ETEM) suffers from gas-induced resolution deterioration. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample with respect to the sample chamber. A bias voltage of 100 V applied via voltage source is sufficient for a marked improvement the gas-induced resolution deterioration. Alternatively an electric field perpendicular to the optical axis can be used, for example by placing an electrically biased wire or gauze off-axis in the sample chamber.
Abstract translation: 环境透射电子显微镜（ETEM）遭受气体分解劣化。 发明人得出结论，劣化是由于ETEM的样品室中的气体的离子化，并且提出使用样品室中的电场来除去电离气体，从而减少气体诱导的分辨率劣化。 电场不需要是强场，并且可以由例如相对于样品室偏置样品而引起。 通过电压源施加的100V的偏置电压足以显着改善气体诱导的分辨率劣化。 或者，可以使用垂直于光轴的电场，例如通过将电偏置的线或纱布离轴放置在样品室中。
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公开(公告)号：US11804357B2
公开(公告)日：2023-10-31
申请号：US17490522
申请日：2021-09-30
Applicant: FEI Company
IPC: H01J37/153 , H01J37/145 , H01J37/147 , H01J37/28
CPC classification number: H01J37/153 , H01J37/145 , H01J37/1471 , H01J37/28 , H01J2237/0453 , H01J2237/1532 , H01J2237/1534
Abstract: An electron optical module for providing an off-axial electron beam with a tunable coma, according to the present disclosure includes a structure positioned downstream of an electron source and an electron lens assembly positioned between the structure and the electron source. The structure generates a decelerating electric field, and is positioned to prevent the passage of electrons along the optical axis of the electron lens assembly. The electron optical module further includes a micro-lens that is not positioned on the optical axis of the electron lens assembly and is configured to apply a lensing effect to an off-axial election beam. Aberrations applied to the off-axial electron beam by the micro-lens and the electron lens assembly combine so that a coma of the off-axial beam has a desired value in a downstream plane.
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公开(公告)号：US11450505B2
公开(公告)日：2022-09-20
申请号：US17130987
申请日：2020-12-22
Applicant: FEI Company
Abstract: An adjustable magnetic field free objective lens for a charged particle microscope is disclosed herein. An example charged particle microscope at least includes first and second optical elements arranged on opposing sides of a sample plane, a third optical element arranged around the sample plane, and a controller coupled to control the first, second and third optical elements. The controller coupled to excite the first and second optical elements to generate first and second magnetic lenses, the first and second magnetic lenses formed on opposing sides of the sample plane and oriented in the same direction, and excite the third optical element to generate a third magnetic lens at the sample plane that is oriented in an opposite direction, where a ratio of the excitation of the third optical element to the excitation of the first and second optical elements adjusts a magnetic field at the sample plane.
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Patent Agency Ranking
公开(公告)号：US11024483B2
公开(公告)日：2021-06-01
申请号：US16197448
申请日：2018-11-21
Applicant: FEI Company
Inventor： Peter Christiaan Tiemeijer
IPC: H01J37/26 , H01J37/244 , H01J37/10 , H01J37/20 , H01J37/22
Abstract: A transmission charged particle microscope includes a specimen holder for holding a specimen; a source for producing a charged particle beam; an illuminator for directing said beam to irradiate the specimen, wherein the illuminator comprising a monochromator and a condenser lens assembly; and an imaging system for receiving a flux of charged particles transmitted through the specimen. The microscope is controlled to produce a first energy spread of an emerging beam exiting said aperture by selecting at least one of parameters (a) an excitation of a first lens of said condenser lens assembly and (b) a width of a condenser aperture downstream of said first lens.
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公开(公告)号：US20210159044A1
公开(公告)日：2021-05-27
申请号：US16692851
申请日：2019-11-22
Applicant: FEI Company
Inventor： Alexander Henstra , Peter Christiaan Tiemeijer , Marcel Niestadt
IPC: H01J37/153 , H01J37/26
Abstract: Correctors for correcting axial aberrations of a particle-optical lens in a charged particle microscope system, according to the present disclosure include a first primary multipole that generates a first primary multipole field when a first excitation is applied to the first primary multipole, and a second primary multipole that generates a second primary multipole field when a second excitation is applied to the second primary multipole. The first primary multipole is not imaged onto the second primary multipole such that a combination fourth-order aberration is created. The correctors further include a secondary multipole for correcting the fourth-order aberration and the sixth-order aberration. Such correctors may further include a tertiary multipole for correcting an eighth-order aberration.
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公开(公告)号：US20200090899A1
公开(公告)日：2020-03-19
申请号：US16572114
申请日：2019-09-16
Applicant: FEI Company
Inventor： Ali Mohammadi-Gheidari , Peter Christiaan Tiemeijer , Erik Rene Kieft , Gerard Nicolaas Anne van Veen
IPC: H01J37/153 , H01J37/09 , H01J37/10 , H01J37/28 , H01J37/20 , H01J37/147
Abstract: A multi-electron beam imaging apparatus is disclosed herein. An example apparatus at least includes an electron source for producing a precursor electron beam, an aperture plate comprising an array of apertures for producing an array of electron beams from said precursor electron beam, an electron beam column for directing said array of electron beams onto a specimen, where the electron beam column is configured to have a length less than 300 mm, and where the electron beam column comprises a single individual beam crossover plane in which each of said electron beams forms an intermediate image of said electron source, and a single common beam crossover plane in which the electron beams in the array cross each other.
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公开(公告)号：US10522323B2
公开(公告)日：2019-12-31
申请号：US15946177
申请日：2018-04-05
Applicant: FEI Company
Inventor： Peter Christiaan Tiemeijer
IPC: H01J37/26 , G01N23/04 , H01J37/24 , H01J37/285
Abstract: Adjustable resolution electron energy loss spectroscopy methods and apparatus are disclosed herein. An example method includes operating an electron microscope in a first state, the first state including operating a source of the electron microscope at a first temperature, obtaining, by the electron microscope, a first EELS spectrum of a sample at a first resolution, the first resolution based on the first temperature, operating the electron microscope in a second state, the second state including operating the source of the electron microscope at a second temperature, the second temperature different than the first temperature, and obtaining, by the electron microscope, a second EELS spectrum of the sample at a second resolution, the second resolution based on the second temperature, wherein the second resolution is different than the first resolution.
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公开(公告)号：US20190341243A1
公开(公告)日：2019-11-07
申请号：US16424206
申请日：2019-05-28
Applicant: FEI Company
Inventor： Bert Henning Freitag , Sorin Lazar , Stephan Kujawa , Maarten Kuijper , Gerard Nicolaas Anne van Veen , Peter Christiaan Tiemeijer , Jamie McCormack
Abstract: A method of performing Electron Energy-Loss Spectroscopy (EELS) in an electron microscope, comprising: Producing a beam of electrons from a source; Using an illuminator to direct said beam so as to irradiate the specimen; Using an imaging system to receive a flux of electrons transmitted through the specimen and direct it onto a spectroscopic apparatus comprising: A dispersion device, for dispersing said flux in a dispersion direction so as to form an EELS spectrum; and A detector, comprising a detection surface that is sub-divided into a plurality of detection zones, specifically comprising: Using at least a first detection zone, a second detection zone and a third detection zone to register a plurality of EELS spectral entities; and Reading out said first and said second detection zones whilst said third detection zone is registering one of said plurality of EELS spectral entities.
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