Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor
    92.
    发明授权
    Pressure sensor, acceleration sensor, and method for manufacturing pressure sensor 有权
    压力传感器,加速度传感器和制造压力传感器的方法

    公开(公告)号:US09322726B2

    公开(公告)日:2016-04-26

    申请号:US14565755

    申请日:2014-12-10

    Abstract: According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.

    Abstract translation: 根据一个实施例,压力传感器包括设置在基座上的底座和传感器单元。 传感器单元包括具有第一表面的转换薄膜,设置在第一表面上的第一应变感测元件和设置在第一表面上的第二应变感测元件。 第一应变传感元件包括第一磁性层,具有第一氧浓度的第一膜,设置在第一磁性层和第一膜之间的第二磁性层以及设置在第一和第二磁性层之间的第一中间层。 第二应变传感元件包括第三磁性层,具有不同于第一浓度的第二氧浓度的第二膜,设置在第三磁性层和第二膜之间的第四磁性层,以及设置在第三和第二膜之间的第二中间层 第四磁性层。

    Pressure sensor, audio microphone, blood pressure sensor, and touch panel
    93.
    发明授权
    Pressure sensor, audio microphone, blood pressure sensor, and touch panel 有权
    压力传感器,音频麦克风,血压传感器和触摸屏

    公开(公告)号:US09176014B2

    公开(公告)日:2015-11-03

    申请号:US13927886

    申请日:2013-06-26

    Abstract: According to one embodiment, a pressure sensor includes a substrate, a first electrode, a second electrode, a first magnetic layer, a second magnetic, a spacer layer, a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided on the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided between the first electrode and the first magnetic layer or between the first magnetic layer and the second electrode. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a stacking direction of layers from the first electrode to the second electrode. The third magnetic layer is provided continuously with the second magnetic layer on the second region.

    Abstract translation: 根据一个实施例,压力传感器包括基板,第一电极,第二电极,第一磁性层,第二磁性体,间隔层,第三磁性层。 衬底包括第一区域和第二区域。 第一电极设置在第一区域上。 第二电极设置在第一电极上。 第一磁性层设置在第一电极和第二电极之间。 第二磁性层设置在第一电极和第一磁性层之间或第一磁性层和第二电极之间。 间隔层在从第一电极到第二电极的层的堆叠方向上设置在第一磁性层和第二磁性层之间。 第三磁性层与第二区域上的第二磁性层连续地提供。

    PRESSURE SENSOR
    94.
    发明申请
    PRESSURE SENSOR 有权
    压力传感器

    公开(公告)号:US20150266717A1

    公开(公告)日:2015-09-24

    申请号:US14584625

    申请日:2014-12-29

    Abstract: According to one embodiment, a pressure sensor includes: a support section; a film section; and a strain sensing element. The film section is supported by the support section and deformable. The film section includes a first film and a second film. The first film includes a first region located in a central part and a second region located in a peripheral part around the first region. The second film is provided on the first region. The strain sensing element is provided on part of the second region. The strain sensing element includes a first magnetic layer; a second magnetic layer; and an intermediate layer. Magnetization of the first magnetic layer changes in response to deformation of the second region. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

    Abstract translation: 根据一个实施例,压力传感器包括:支撑部分; 电影部分 和应变传感元件。 薄膜部分由支撑部分支撑并且可变形。 薄膜部分包括第一薄膜和第二薄膜。 第一膜包括位于中心部分的第一区域和位于围绕第一区域的周边部分中的第二区域。 在第一区域设置第二胶片。 应变传感元件设置在第二区域的一部分上。 应变传感元件包括第一磁性层; 第二磁性层; 和中间层。 响应于第二区域的变形,第一磁性层的磁化改变。 中间层设置在第一磁性层和第二磁性层之间。

    STRAIN SENSOR ELEMENT AND BLOOD PRESSURE SENSOR
    96.
    发明申请
    STRAIN SENSOR ELEMENT AND BLOOD PRESSURE SENSOR 审中-公开
    应变传感器元件和血压传感器

    公开(公告)号:US20140207006A1

    公开(公告)日:2014-07-24

    申请号:US14219860

    申请日:2014-03-19

    CPC classification number: A61B5/021 A61B5/02108 G01B7/24 G01L1/125

    Abstract: A strain sensor element comprises a laminated film which has a magnetic free layer, a spacer layer, and a magnetic reference layer. The free layer has a variable magnetization direction and a out-of-plane magnetization direction. The reference layer has a variable magnetization direction which is pinned more strongly than the magnetization of the free layer. The spacer layer provided between the free layer and the reference layer. A pair of electrodes is provided with a plane of the laminated film. A substrate is provided with either of the pair electrodes and can be strained. The rotation angle of the magnetization of the free layer is different from the rotation angle of the magnetization of the reference layer when the substrate is distorted. Electrical resistance is changed depending on the magnetization angle between the free layer and the reference layer, which allows the element to operate as a strain sensor.

    Abstract translation: 应变传感器元件包括具有无磁性层,间隔层和磁性参考层的层压膜。 自由层具有可变的磁化方向和面外磁化方向。 参考层具有可变的磁化方向,该自由层的磁化强度比自由层的磁化强。 间隔层设置在自由层和参考层之间。 一对电极设置有层叠膜的平面。 基板设置有对电极中的任一个并且可以变形。 当衬底失真时,自由层的磁化的旋转角度与参考层的磁化的旋转角度不同。 电阻根据自由层和参考层之间的磁化角度而改变,这允许元件作为应变传感器工作。

    MICROPHONE PACKAGE
    97.
    发明申请
    MICROPHONE PACKAGE 有权
    麦克风包装

    公开(公告)号:US20140137658A1

    公开(公告)日:2014-05-22

    申请号:US14045153

    申请日:2013-10-03

    CPC classification number: H04R19/04 H04R1/04 H04R7/10

    Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

    Abstract translation: 根据一个实施例,麦克风封装包括:压力感测元件,包括薄膜和装置; 和封面。 该膜响应于压力而产生应变。 该装置包括:第一电极; 第二电极; 和第一磁性层。 第一磁性层设置在第一电极和第二电极之间并且具有第一磁化。 盖子包括:上部; 和侧部。 侧部是磁性的并根据第一磁化和第二磁化而提供。

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