Invention Grant
US09176014B2 Pressure sensor, audio microphone, blood pressure sensor, and touch panel 有权
压力传感器,音频麦克风,血压传感器和触摸屏

Pressure sensor, audio microphone, blood pressure sensor, and touch panel
Abstract:
According to one embodiment, a pressure sensor includes a substrate, a first electrode, a second electrode, a first magnetic layer, a second magnetic, a spacer layer, a third magnetic layer. The substrate includes a first region and a second region. The first electrode is provided on the first region. The second electrode is provided on the first electrode. The first magnetic layer is provided between the first electrode and the second electrode. The second magnetic layer is provided between the first electrode and the first magnetic layer or between the first magnetic layer and the second electrode. The spacer layer is provided between the first magnetic layer and the second magnetic layer in a stacking direction of layers from the first electrode to the second electrode. The third magnetic layer is provided continuously with the second magnetic layer on the second region.
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