公开(公告)号：US11137281B2

公开(公告)日：2021-10-05

申请号：US16281157

申请日：2019-02-21

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshihiro Higashi ,  Yoshihiko Fuji ,  Kazuaki Okamoto ,  Shotaro Baba ,  Michiko Hara

IPC: G01H11/02 ,  H04R1/04

Abstract: According to one embodiment, a sensor includes a structure body, an element portion, and a power line. The structure body includes a supporter and a film portion. The film portion is supported by the supporter and includes an end portion. The end portion is aligned with a first direction and supported by the supporter. The element portion includes a first element provided at the film portion. The first element includes a first magnetic layer, a first opposing magnetic layer provided between the first magnetic layer and the film portion, and a first nonmagnetic layer provided between the first magnetic layer and the first opposing magnetic layer. A second direction from the first opposing magnetic layer toward the first magnetic layer crosses the first direction. The power line is electrically insulated from the element portion. The power line includes a portion aligned with the first direction.

公开(公告)号：US10746526B2

公开(公告)日：2020-08-18

申请号：US15920492

申请日：2018-03-14

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Shiori Kaji ,  Hideaki Fukuzawa ,  Tomohiko Nagata ,  Akio Hori ,  Yoshihiko Fuji

IPC: G01B7/24 ,  G01B7/16 ,  G01L9/00 ,  G01L9/16

Abstract: According to one embodiment, a strain sensing element includes a film unit being deformable, a first and a second magnetic unit, and a strain sensor. The first magnetic unit is provided on the film unit and is arranged with the film unit in a first direction. The first magnetic unit includes a first magnetic body layer and a first intermediate magnetic layer. The second magnetic unit is provided on the film unit and is arranged with the first magnetic unit in a second direction crossing the first direction. The second magnetic unit includes a second magnetic body layer and a second intermediate magnetic layer. The strain sensor is provided on the film unit between the first magnetic unit and the second magnetic unit. An electrical characteristic of the strain sensor changes according to a deformation of the film unit.

公开(公告)号：US10481027B2

公开(公告)日：2019-11-19

申请号：US16145763

申请日：2018-09-28

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Michiko Hara ,  Kei Masunishi ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akiko Yuzawa ,  Akio Hori ,  Tomohiko Nagata ,  Kazuaki Okamoto ,  Kenji Otsu ,  Shotaro Baba

IPC: A61B5/021 ,  G01L9/00 ,  G01L9/16 ,  H04R21/02 ,  H04R1/46 ,  A61B5/00

Abstract: According to one embodiment, a sensor includes a deformable film portion, a first sensing element and a second sensing element. The first sensing element is fixed to the film portion, and includes a first magnetic layer of a first material, a first opposing magnetic layer, and a first intermediate layer. The first intermediate layer is provided between the first magnetic layer and the first opposing magnetic layer. The second sensing element is fixed to the film portion, and includes a second magnetic layer of a second material, a second opposing magnetic layer, and a second intermediate layer. The second material is different from the first material. The second intermediate layer is provided between the second magnetic layer and the second opposing magnetic layer.

公开(公告)号：US20190239760A9

公开(公告)日：2019-08-08

申请号：US15421283

申请日：2017-01-31

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Hideaki Fukuzawa ,  Shiori Kaji

IPC: A61B5/021 ,  H04R19/04 ,  G01L1/12 ,  G01L9/16 ,  G01L9/00

CPC classification number: A61B5/02141 ,  B81B3/0078 ,  B81B2201/0257 ,  B81B2201/06 ,  G01L1/125 ,  G01L9/0041 ,  G01L9/16 ,  G06F3/0414 ,  H04R3/00 ,  H04R19/04 ,  H04R23/00 ,  H04R23/006 ,  H04R31/006 ,  H04R2201/003 ,  H04R2410/03 ,  H04R2420/07 ,  H04R2499/11

Abstract: According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.

公开(公告)号：US10345162B2

公开(公告)日：2019-07-09

申请号：US15246964

申请日：2016-08-25

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Akiko Yuzawa ,  Hideaki Fukuzawa ,  Kei Masunishi ,  Yoshihiro Higashi ,  Michiko Hara ,  Yoshihiko Fuji

IPC: G01L1/22

Abstract: According to one embodiment, a sensor includes a first sensor unit, a first stacked body, and a film unit. The first sensor unit includes a first magnetic layer, a second magnetic layer, and a first intermediate layer, the first intermediate layer being provided between the first magnetic layer and the second magnetic layer. The first stacked body includes a third magnetic layer, a fourth magnetic layer, and a second intermediate layer, the second intermediate layer being provided between the third magnetic layer and the fourth magnetic layer. The film unit is deformable. A portion of the film unit is disposed between the first sensor unit and the first stacked body.

公开(公告)号：US10246324B2

公开(公告)日：2019-04-02

申请号：US15701633

申请日：2017-09-12

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Tatsuya Ohguro ,  Akihiro Kojima ,  Yoshiaki Sugizaki ,  Mariko Takayanagi ,  Yoshihiko Fuji ,  Akio Hori ,  Michiko Hara

IPC: B81C1/00 ,  G01L9/00 ,  H04R1/08 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

Abstract: According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.

公开(公告)号：US10234343B2

公开(公告)日：2019-03-19

申请号：US15807020

申请日：2017-11-08

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Kei Masunishi ,  Hideaki Fukuzawa ,  Yoshihiro Higashi ,  Michiko Hara ,  Akio Hori ,  Tomohiko Nagata ,  Shiori Kaji ,  Akiko Yuzawa

IPC: G01L9/00 ,  G01L1/22 ,  A61B5/021 ,  G01L1/12 ,  A61B5/024 ,  H04R1/02 ,  H04R19/00 ,  G01L1/20 ,  G01L5/16 ,  G06F3/041 ,  A61B5/00 ,  H04R1/04 ,  H04R7/00 ,  H04R19/04

Abstract: According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.

公开(公告)号：US20190017891A1

公开(公告)日：2019-01-17

申请号：US15908626

申请日：2018-02-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kenji Otsu ,  Yoshihiko Fuji ,  Akiko Yuzawa ,  Michiko Hara ,  Yoshihiro Higashi ,  Shiori Kaji ,  Kazuaki Okamoto ,  Shotaro Baba ,  Tomohiko Nagata

IPC: G01L9/00 ,  H01L41/113 ,  H01L41/047 ,  H01L41/053 ,  H01L41/04

Abstract: According to one embodiment, a sensor includes a first film, a first sensor portion, and first to fourth terminals. The first film includes first to second electrode layers, and a piezoelectric layer. The first film is deformable. The first sensor portion is fixed to a portion of the first film. A first direction from the portion of the first film toward the first sensor portion is aligned with a direction from the second electrode layer toward the first electrode layer. The first sensor portion includes first to second sensor conductive layers, first to second magnetic layers, and a first intermediate layer. The first terminal is electrically connected to the first electrode layer. The second terminal is electrically connected to the second electrode layer. The third terminal is electrically connected to the first sensor conductive layer. The fourth terminal is electrically connected to the second sensor conductive layer.

公开(公告)号：US10082435B2

公开(公告)日：2018-09-25

申请号：US14742453

申请日：2015-06-17

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kazuaki Okamoto ,  Akio Hori ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa

IPC: G01L9/00 ,  G01L9/16

CPC classification number: G01L9/0041 ,  G01L9/0047 ,  G01L9/008 ,  G01L9/16

Abstract: A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.

公开(公告)号：US20180210041A1

公开(公告)日：2018-07-26

申请号：US15689221

申请日：2017-08-29

Applicant: Kabushiki Kaisha Toshiba

Inventor： Shotaro Baba ,  Yoshihiko Fuji ,  Kei Masunishi ,  Michiko Hara ,  Akiko Yuzawa ,  Shiori Kaji ,  Tomohiko Nagata ,  Yoshihiro Higashi ,  Kenji Otsu ,  Kazuaki Okamoto

IPC: G01R33/09 ,  G01B7/31 ,  G01D5/245 ,  G02B7/08 ,  G01L9/16

CPC classification number: G01R33/091 ,  A61B2562/0247 ,  G01B7/31 ,  G01D5/245 ,  G01L9/16 ,  G01R33/093 ,  G02B7/08 ,  H04R19/04

Abstract: According to one embodiment, a sensor includes a support body, a film portion, a first sensing element, and a structure body. The first sensing element is fixed to the film portion, and includes a first magnetic layer, a first opposing magnetic layer, and a first intermediate layer. The structure body includes a first region overlapping the support body, and a second region being continuous with the first region and overlapping the film portion. The structure body includes a first structure body layer, a first opposing structure body layer, and a first structure body intermediate layer. The first opposing structure body layer is provided between the first structure body layer and the support body and between the first structure body layer and the film portion. The first structure body intermediate layer is provided between the first structure body layer and the first opposing structure body layer.