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公开(公告)号：US12125754B2
公开(公告)日：2024-10-22
申请号：US17894584
申请日：2022-08-24
申请人： TDK CORPORATION
CPC分类号： H01L23/13 , G01H3/00 , G01K13/02 , G01L9/0041 , G01N33/0027 , H01L23/5389 , H01L25/18
摘要： A sensor package substrate disclosed in the present specification has a mounting area in which a sensor chip is mounted and a controller chip connected to the sensor chip. A through hole is formed in the sensor package substrate so as to overlap the mounting area in a plan view and to penetrate the substrate from one surface to the other surface thereof. The mounting area and the controller chip overlap each other in a plan view. According to the present invention, by reducing the thickness of an insulating layer, it is possible not only to reduce the distance of a wiring for the sensor chip and controller chip, but also to reduce the area of the substrate.
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公开(公告)号：US12038339B2
公开(公告)日：2024-07-16
申请号：US17756786
申请日：2020-11-20
发明人： Michael Hügel , Frank Volz , Nils Ponath , Armin Rupp
CPC分类号： G01L19/0654 , G01L9/0041 , G01L13/025
摘要： A relative-pressure sensor determines the pressure of a medium in relation to an atmospheric pressure. The sensor includes a housing having a measuring element located in the housing, wherein the pressure to be measured acts upon an outer surface of the measuring element. The surface is in contact with the medium. The sensor also includes a reference-pressure supply, which supplies an inner surface of the measuring element with atmospheric pressure in the form of ambient air, and an evaluation unit, which determines the pressure of the medium from a variable determined using the measuring element. A drying chamber takes-up atmospheric humidity from the ambient air that is supplied via the reference-pressure supply. The drying chamber has a drying module comprising a container and a humidity-adsorbing material that is completely surrounded by the container.
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公开(公告)号：US20230296463A1
公开(公告)日：2023-09-21
申请号：US18136952
申请日：2023-04-20
发明人： Yoshihiro YOSHIDA
CPC分类号： G01L19/0038 , G01L9/0041
摘要： A semiconductor device includes a detector mounted on a base substrate and including a pressure detector to detect pressure, a base portion on the base substrate where the detector is buried, a protruding portion protruding upward from the base portion and including an exposure hole which causes the pressure detector to be exposed upward, and a lid supported by an upper surface of the protruding portion to close the exposure hole. An outer circumferential portion of the lid extends outward from the protruding portion in plan view. The lid includes a slit that is open to an outer side surface and causes the exposure hole to communicate with outside sideward of the semiconductor device.
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4.发明授权公开(公告)号：US11719589B2
公开(公告)日：2023-08-08
申请号：US17420588
申请日：2019-12-19
发明人： Jia luan Lau , Cheng Feng Lee
CPC分类号： G01L19/147 , G01L9/0041 , G01L19/141 , G01L23/24
摘要： A pressure sensor assembly includes an external housing unit; a sensor unit received within the external housing unit, the external housing unit has an external surface including a mounting surface; a sensing element mounted within the sensor unit and including a pressure-sensing surface; a substrate upon which the mounting surface is mounted; an air passage to enable air to impinge on the sensing element; and a filling passage, separate from the air flow passage, for the introduction of an encapsulation material onto the sensor unit, during assembly. The encapsulation material covers at least a part of the external surface of the sensor unit but does not cover the pressure-sensing surface of the sensing element which remains directly exposed to air within the air passage.
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5.发明申请公开(公告)号：US20190239760A9
公开(公告)日：2019-08-08
申请号：US15421283
申请日：2017-01-31
发明人： Yoshihiko Fuji , Hideaki Fukuzawa , Shiori Kaji
CPC分类号： A61B5/02141 , B81B3/0078 , B81B2201/0257 , B81B2201/06 , G01L1/125 , G01L9/0041 , G01L9/16 , G06F3/0414 , H04R3/00 , H04R19/04 , H04R23/00 , H04R23/006 , H04R31/006 , H04R2201/003 , H04R2410/03 , H04R2420/07 , H04R2499/11
摘要： According to one embodiment, a strain sensing element provided on a deformable substrate includes: a first magnetic layer; a second magnetic layer; a spacer layer; and a bias layer. Magnetization of the second magnetic layer changes according to deformation of the substrate. The spacer layer is provided between the first magnetic layer and the second magnetic layer. The second magnetic layer is provided between the spacer layer and the bias layer. The bias layer is configured to apply a bias to the second magnetic layer.
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公开(公告)号：US20190162574A1
公开(公告)日：2019-05-30
申请号：US15826481
申请日：2017-11-29
发明人： Mark Bellinger
CPC分类号： G01F23/0076 , G01F22/02 , G01F23/0061 , G01F23/164 , G01F23/18 , G01L9/0041 , G01L19/0092 , G01L19/086 , G01L19/14 , G01L19/149
摘要： A wireless pressure sensor for sensing pressure of a liquid in a tank includes a hermetically sealed housing, at least one sensor, at least one photocell array, at least one communication device, and at least one energy storage device. At least a portion of the hermetically sealed housing has a diaphragm. The at least one sensor within the hermetically sealed housing is configured to sense the pressure of the liquid. The at least one photocell array is configured to receive light and generate power from the light. The at least one communication device is configured to transmit data corresponding to the sensed pressure using wireless radio frequency signals. The at least one energy storage device is configured to store power generated by the at least one photocell array and provide power to the at least one sensor and the at least one communication device.
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公开(公告)号：US10082435B2
公开(公告)日：2018-09-25
申请号：US14742453
申请日：2015-06-17
发明人： Kazuaki Okamoto , Akio Hori , Hideaki Fukuzawa , Yoshihiko Fuji , Akiko Yuzawa
CPC分类号： G01L9/0041 , G01L9/0047 , G01L9/008 , G01L9/16
摘要： A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.
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公开(公告)号：US10035700B2
公开(公告)日：2018-07-31
申请号：US15416411
申请日：2017-01-26
发明人： Chun-Wen Cheng , Chia-Hua Chu , Fei-Lung Lai , Shiang-Chi Lin
CPC分类号： B81B7/007 , B81B2201/0214 , B81B2203/0127 , B81B2203/0315 , B81B2203/04 , B81B2207/012 , B81B2207/07 , B81C1/0015 , B81C1/00158 , B81C1/00182 , B81C1/00301 , B81C2203/035 , B81C2203/0792 , G01L9/0041 , G01L9/0042 , G01L9/0044 , G01L9/0045 , G01L9/0048 , G01N27/123
摘要： A semiconductor structure includes a substrate including a plurality of vias passing through the substrate and filled with a conductive or semiconductive material, and an oxide layer surrounding the conductive or semiconductive material, the substrate defining a cavity therein; a membrane disposed over the substrate and the cavity; a heater disposed within the membrane and electrically connected with the substrate; and a sensing electrode disposed over the membrane and the heater.
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公开(公告)号：US20180040926A1
公开(公告)日：2018-02-08
申请号：US15229953
申请日：2016-08-05
CPC分类号： H01M10/48 , G01L9/0041 , G01L19/04 , G01L19/0645 , H01M2/14 , H01M2/348 , H01M10/0413 , H01M10/0436 , H01M10/0525 , H01M10/425 , H01M10/4285 , H01M10/486 , H01M2200/10 , H01M2200/20
摘要： Embodiments described herein relate to a battery cells and methods for measuring internal pressure in a battery cell. According to one embodiment, a battery cell includes an interior space, in which a battery electrolyte resides, and a housing that gas-tightly encloses the interior space. The battery cell further includes a gas-tight sealed measurement chamber, which is separated from the interior space by a deformable membrane, in which a pressure sensor is arranged.
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10.发明申请公开(公告)号：US20170343430A1
公开(公告)日：2017-11-30
申请号：US15464869
申请日：2017-03-21
发明人： Daniele Caltabiano , Mohammad Abbasi Gavarti , Bruno Murari , Roberto Brioschi , Domenico Giusti
IPC分类号： G01L1/18
CPC分类号： G01L1/18 , G01L1/04 , G01L9/0041
摘要： A load-sensing device is arranged in a package forming a chamber. The package has a deformable substrate configured, in use, to be deformed by an external force. A sensor unit is positioned in direct contact with the deformable substrate and is configured to detect deformations of the deformable substrate. An elastic element within of the chamber is arranged to act between the package and the sensor unit to generate, on the sensor unit, a force keeping the sensor unit in contact with the deformable substrate. The deformable substrate may be a base of the package, and the elastic element may be a metal lamina arranged between the lid of the package and the sensor unit. The sensor unit may be a semiconductor die integrating piezoresistors.
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