Relative-pressure sensor comprising a reference-pressure supply

    公开(公告)号:US12050145B2

    公开(公告)日:2024-07-30

    申请号:US17756817

    申请日:2020-11-20

    IPC分类号: G01L19/06 G01L13/02

    CPC分类号: G01L19/0654 G01L13/025

    摘要: A relative-pressure sensor for determining a pressure of a medium in relation to an atmospheric pressure includes a housing; a measuring element arranged in the housing, wherein the pressure to be measured acts upon an outer surface of the measuring element in contact with the medium; a reference-pressure supply, which supplies an inner surface of the measuring element with atmospheric pressure in the form of ambient air, an evaluation unit, which determines the pressure of the medium from a variable determined using the measuring element; and at least one drying chamber arranged in the housing for taking up atmospheric humidity from the ambient air supplied through the reference-pressure supply. A bushing can be pressed into the housing and has a capillary-type groove, which is helical at least in sections and runs around the bushing.

    WATER-VAPOR SEPARATION BOX FOR INSTANT-HOT TYPE WATER DISPENSER
    5.
    发明申请
    WATER-VAPOR SEPARATION BOX FOR INSTANT-HOT TYPE WATER DISPENSER 有权
    恒温型水分配器的水蒸气分离盒

    公开(公告)号:US20160256797A1

    公开(公告)日:2016-09-08

    申请号:US15051536

    申请日:2016-02-23

    发明人: Guo-qiang Yu

    IPC分类号: B01D19/00

    摘要: A water-vapor separation box for an instant-hot type water dispenser comprises: a box body, including: a water input tube, disposed on a side wall at an upper end of the box body; a first block plate, disposed on a rear side of a water output end of the water input tube; a second block plate, disposed at a rear side of the first block plate, to make the vapor flow upward; a water output tube, disposed at a rear side of the first block plate to directly flow the water out; a vapor output tube, disposed around outer perimeter of the water output tube, with vapor input elevation of the vapor output tube higher than the water input elevation of the water output tube; and a box cover, disposed over an upper opening of the box body.

    摘要翻译: 一种用于即热式饮水机的水蒸气分离箱,包括:盒体,包括:水输入管,设置在箱体上端的侧壁上; 第一块板,设置在所述水输入管的水输出端的后侧; 第二块板,设置在第一块板的后侧,以使蒸气向上流动; 水输出管,设置在第一块板的后侧以直接将水流出; 蒸汽输出管,其布置在水输出管的外周边周围,蒸汽输出管的蒸气输入高度高于输水管的水输入高度; 以及设置在箱体的上部开口上的盒盖。

    INTEGRATED REFERENCE VACUUM PRESSURE SENSOR WITH ATOMIC LAYER DEPOSITION COATED INPUT PORT
    7.
    发明申请
    INTEGRATED REFERENCE VACUUM PRESSURE SENSOR WITH ATOMIC LAYER DEPOSITION COATED INPUT PORT 审中-公开
    具有原子层沉积输入口的集成参考真空压力传感器

    公开(公告)号:US20150308912A1

    公开(公告)日:2015-10-29

    申请号:US14738348

    申请日:2015-06-12

    发明人: Gregory C. Brown

    摘要: An integrated reference vacuum pressure sensor with an atomic layer deposition (ALD) coated input port comprises a housing with an port for a media to enter the housing; a substrate and stress isolation member in the housing; wherein a channel extends through the substrate and the stress isolation member, wherein a trace is embedded within the stress isolation member, wherein stress isolation member and substrate surfaces exposed to the channel are coated with an ALD; a sensor die bonded to the stress isolation member, the sensor die comprising a diaphragm having circuitry, wherein a side of the diaphragm is exposed to the channel and the circuitry is mounted to another side of the diaphragm; a via extending through the sensing die electrically connecting the circuitry to the trace; and a cover bonded to the stress isolation member, the cover having a recess, the sensor die in the recess.

    摘要翻译: 具有原子层沉积(ALD)涂覆输入端口的集成参考真空压力传感器包括具有用于介质进入壳体的端口的壳体; 壳体中的衬底和应力隔离构件; 其中通道延伸穿过所述基板和所述应力隔离构件,其中迹线嵌入所述应力隔离构件内,其中暴露于所述通道的应力隔离构件和基板表面涂覆有ALD; 传感器芯片,其结合到所述应力隔离构件,所述传感器管芯包括具有电路的隔膜,其中所述隔膜的一侧暴露于所述通道,并且所述电路安装到所述隔膜的另一侧; 通过所述感测芯片延伸的通孔将所述电路电连接到所述迹线; 以及与所述应力隔离构件接合的盖,所述盖具有凹部,所述传感器模具位于所述凹部中。

    PRESSURE DETECTION DEVICE AND INTAKE PRESSURE MEASUREMENT APPARATUS USING THE SAME
    8.
    发明申请
    PRESSURE DETECTION DEVICE AND INTAKE PRESSURE MEASUREMENT APPARATUS USING THE SAME 有权
    压力检测装置和使用该压力测量装置的压力测量装置

    公开(公告)号:US20150075266A1

    公开(公告)日:2015-03-19

    申请号:US14474788

    申请日:2014-09-02

    IPC分类号: G01L19/14

    CPC分类号: G01L19/145 G01L19/0654

    摘要: In a pressure detection device which is provided in an intake pressure measurement apparatus, a detection space surrounded by an outer wall portion is formed in a housing, and an inner wall portion is formed integrally in the detection space such that both end portions are connected to the outer wall portion. The inner wall portion has a cylindrical shape, and a sensor storage portion is formed between the inner wall portion and the outer wall portion. In the sensor storage portion, a pressure sensor is disposed in a region with the least influence of thermal stress at a position closer to the inner wall portion than the outer wall portion.

    摘要翻译: 在设置在进气压力测量装置中的压力检测装置中,由外壁部包围的检测空间形成在壳体中,内壁部一体地形成在检测空间中,使得两端部连接到 外壁部分。 内壁部具有圆筒状,在内壁部和外壁部之间形成有传感器收纳部。 在传感器存储部中,压力传感器配置在与外壁部靠近内壁部的位置的热应力影响最小的区域。

    PRESSURE SENSOR STRUCTURE
    10.
    发明申请
    PRESSURE SENSOR STRUCTURE 有权
    压力传感器结构

    公开(公告)号:US20140352446A1

    公开(公告)日:2014-12-04

    申请号:US14293317

    申请日:2014-06-02

    发明人: Heikki KUISMA

    IPC分类号: G01L9/12 G01L7/08

    摘要: A microelectromechanical pressure sensor structure that comprises a planar base and side walls and a diaphragm plate. The side walls extend circumferentially away from the planar base to a top surface of the side walls. The planar base, the side walls and the diaphragm plate are attached to each other to form a hermetically closed gap in a reference pressure, and a top edge of the inner surfaces of the side walls forms a periphery of a diaphragm. The diaphragm plate comprises one or more planar material layers of which a first planar material layer spans over the periphery of the diaphragm. The top surface of the side walls comprises at least one isolation area that is not covered by the first planar material layer.

    摘要翻译: 一种微机电压力传感器结构,其包括平面基座和侧壁以及隔膜板。 侧壁从平面基部周向延伸到侧壁的顶表面。 平面基座,侧壁和隔膜板彼此附接以形成参考压力的气密闭合的间隙,并且侧壁的内表面的顶部边缘形成隔膜的周边。 隔膜板包括一个或多个平面材料层,第一平面材料层跨过隔膜的周边。 侧壁的顶表面包括至少一个不被第一平面材料层覆盖的隔离区域。