Invention Grant
- Patent Title: Pressure sensor
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Application No.: US14742453Application Date: 2015-06-17
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Publication No.: US10082435B2Publication Date: 2018-09-25
- Inventor: Kazuaki Okamoto , Akio Hori , Hideaki Fukuzawa , Yoshihiko Fuji , Akiko Yuzawa
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2014-136503 20140702
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L9/16

Abstract:
A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.
Public/Granted literature
- US20160003697A1 PRESSURE SENSOR Public/Granted day:2016-01-07
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