公开(公告)号：US10651371B2

公开(公告)日：2020-05-12

申请号：US15699813

申请日：2017-09-08

Applicant: Kabushiki Kaisha Toshiba

Inventor： Kazuaki Okamoto ,  Yoshihiko Fuji ,  Yoshihiro Higashi ,  Michiko Hara ,  Shiori Kaji

IPC: H01L43/10 ,  G11C11/16 ,  G11B5/39 ,  H01L43/02 ,  B32B15/04 ,  H01L43/08 ,  G11B5/48 ,  H01L27/22

Abstract: According to an embodiment, a magnetic element includes a first layer, a first magnetic layer, a second magnetic layer, a first nonmagnetic layer, a second layer, and a third magnetic layer. The first layer includes ruthenium. The second magnetic layer is provided between the first layer and the first magnetic layer. The first nonmagnetic layer provided between the first magnetic layer and the second magnetic layer. The second layer includes tantalum. The second layer contacts the first layer and is provided between the first layer and the second magnetic layer. A lattice plane spacing of the second layer in a first direction is not less than 0.23 nm and not more than 0.25 nm. The first direction is from the first layer toward the first magnetic layer. The third magnetic layer includes manganese. The third magnetic layer is provided between the second layer and the second magnetic layer.

公开(公告)号：US10477323B2

公开(公告)日：2019-11-12

申请号：US16053832

申请日：2018-08-03

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiro Higashi ,  Yoshihiko Fuji ,  Michiko Hara ,  Akiko Yuzawa ,  Shiori Kaji ,  Tomohiko Nagata ,  Akio Hori ,  Hideaki Fukuzawa

IPC: H04R25/00 ,  H04R19/04 ,  H04R7/10 ,  H04R1/04

Abstract: According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.

公开(公告)号：US20190285436A1

公开(公告)日：2019-09-19

申请号：US16119373

申请日：2018-08-31

Applicant: KABUSHIKI KAISHA TOSHIBA ,  TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION

Inventor： Yoshihiko FUJI ,  Keiju Yamada ,  Kei Masunishi ,  Michiko Hara ,  Yoshihiro Higashi ,  Kazuaki Okamoto ,  Shiori Kaji

IPC: G01D5/16 ,  G01D5/48

Abstract: According to one embodiment, a sensor includes a sensing element portion and a first magnetic portion. The sensing element portion includes a supporter, a deformable film portion supported by the supporter, and a first element including a magnetic layer and being provided at the film portion. The first magnetic portion is separated from the sensing element portion. The first magnetic portion includes a plurality of first holes. A width of one of the plurality of first holes along a second direction is narrower than a length of the sensing element portion along the second direction and wider than a length of the first element along the second direction. The second direction crosses a first direction from the film portion toward the first element.

公开(公告)号：US09921114B2

公开(公告)日：2018-03-20

申请号：US15388629

申请日：2016-12-22

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yoshihiko Fuji ,  Kei Masunishi ,  Hideaki Fukuzawa ,  Yoshihiro Higashi ,  Michiko Hara ,  Akio Hori ,  Tomohiko Nagata ,  Shiori Kaji ,  Akiko Yuzawa

IPC: G01L1/22 ,  G01L1/12 ,  G01L5/16 ,  G01L9/00 ,  H04R1/02 ,  H04R1/04 ,  H04R7/00 ,  H04R19/00 ,  G06F3/041 ,  A61B5/00 ,  A61B5/021 ,  A61B5/024 ,  G01L1/20 ,  H04R19/04

CPC classification number: G01L1/2287 ,  A61B5/02141 ,  A61B5/02438 ,  A61B5/7475 ,  G01L1/12 ,  G01L1/205 ,  G01L1/2262 ,  G01L1/2293 ,  G01L5/161 ,  G01L9/0051 ,  G06F3/041 ,  G06F3/0414 ,  G06F2203/04105 ,  H04R1/028 ,  H04R1/04 ,  H04R7/00 ,  H04R19/005 ,  H04R19/04 ,  H04R2499/11

Abstract: According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.

公开(公告)号：US09810711B2

公开(公告)日：2017-11-07

申请号：US14460450

申请日：2014-08-15

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hideaki Fukuzawa ,  Michiko Hara ,  Yoshihiko Fuji ,  Yoshihiro Higashi ,  Shiori Kaji ,  Akio Hori ,  Tomohiko Nagata ,  Akiko Yuzawa ,  Akira Kikitsu

IPC: G01P15/08 ,  G01P15/105

CPC classification number: G01P15/105 ,  G01P15/0802 ,  G01P2015/0805

Abstract: An inertial sensor includes a base portion, a weight portion, a connection portion, and a first sensing element unit. The connection portion connects the weight portion and the base portion and is capable of being deformed in accordance with a change in relative position of the weight portion with respect to the position of the base portion. The first sensing element unit is provided on a first portion of the connection portion and includes a first magnetic layer, a second magnetic layer, and a nonmagnetic first intermediate layer. The nonmagnetic first intermediate layer is provided between the first magnetic layer and the second magnetic layer.

公开(公告)号：US09790087B2

公开(公告)日：2017-10-17

申请号：US14582295

申请日：2014-12-24

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki Fukuzawa ,  Tatsuya Ohguro ,  Akihiro Kojima ,  Yoshiaki Sugizaki ,  Mariko Takayanagi ,  Yoshihiko Fuji ,  Akio Hori ,  Michiko Hara

IPC: H04R3/00 ,  B81C1/00 ,  G01L9/00 ,  H04R1/08 ,  H04R19/00 ,  H04R19/04 ,  H04R31/00

CPC classification number: B81C1/00158 ,  B81B2201/0264 ,  B81C1/00246 ,  B81C2203/0771 ,  G01L9/0042 ,  H04R1/08 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00

Abstract: According to one embodiment, a strain and pressure sensing device includes a semiconductor circuit unit and a sensing unit. The semiconductor circuit unit includes a semiconductor substrate and a transistor. The transistor is provided on a semiconductor substrate. The sensing unit is provided on the semiconductor circuit unit, and has space and non-space portions. The non-space portion is juxtaposed with the space portion. The sensing unit further includes a movable beam, a strain sensing element unit, and first and second buried interconnects. The movable beam has fixed and movable portions, and includes first and second interconnect layers. The fixed portion is fixed to the non-space portion. The movable portion is separated from the transistor and extends from the fixed portion into the space portion. The strain sensing element unit is fixed to the movable portion. The first and second buried interconnects are provided in the non-space portion.

公开(公告)号：US09618411B2

公开(公告)日：2017-04-11

申请号：US13749404

申请日：2013-01-24

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hiromi Yuasa ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Michiko Hara ,  Yoshihiro Higashi ,  Tomohiko Nagata ,  Akio Hori

IPC: G01L9/16 ,  G01L9/00 ,  G01L1/12 ,  H01L41/12

CPC classification number: G01L9/0051 ,  G01L1/125 ,  G01L9/16 ,  H01L41/125

Abstract: A pressure sensor device comprises a support substrate including a thin film area which is bendable by a pressure, a sensor film comprising a first electrode provided on the thin film area, a second electrode provided on the first electrode, a reference layer provided between the first electrode and the second electrode, a free layer provided between the reference layer and the first electrode or between the reference layer and the second electrode, a spacer layer provided between the reference layer and the free layer, a shield provided on a side of the support substrate.

公开(公告)号：US20150204739A1

公开(公告)日：2015-07-23

申请号：US14565755

申请日：2014-12-10

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hideaki FUKUZAWA ,  Yoshihiko Fuji ,  Yoshihiro Higashi ,  Michiko Hara

IPC: G01L1/22 ,  G01P15/105

CPC classification number: G01L1/2287 ,  G01L1/12 ,  G01L1/125 ,  G01L5/16 ,  G01L9/16 ,  G01P15/105

Abstract: According to one embodiment, a pressure sensor includes a base and a sensor unit provided on the base. The sensor unit includes a transducing thin film having a first surface, a first strain sensing element provided on the first surface, and a second strain sensing element provided on the first surface. The first strain sensing element includes a first magnetic layer, a first film having a first oxygen concentration, a second magnetic layer provided between the first magnetic layer and the first film, and a first intermediate layer provided between the first and the second magnetic layer. The second strain sensing element includes a third magnetic layer, a second film having a second oxygen concentration different from the first concentration, a fourth magnetic layer provided between the third magnetic layer and the second film, and a second intermediate layer provided between the third and the fourth magnetic layer.

Abstract translation: 根据一个实施例，压力传感器包括设置在基座上的底座和传感器单元。 传感器单元包括具有第一表面的转换薄膜，设置在第一表面上的第一应变感测元件和设置在第一表面上的第二应变感测元件。 第一应变传感元件包括第一磁性层，具有第一氧浓度的第一膜，设置在第一磁性层和第一膜之间的第二磁性层以及设置在第一和第二磁性层之间的第一中间层。 第二应变传感元件包括第三磁性层，具有不同于第一浓度的第二氧浓度的第二膜，设置在第三磁性层和第二膜之间的第四磁性层，以及设置在第三和第二膜之间的第二中间层， 第四磁性层。

公开(公告)号：US09000547B2

公开(公告)日：2015-04-07

申请号：US14203868

申请日：2014-03-11

Applicant: Kabushiki Kaisha Toshiba

Inventor： Yusaku Asano ,  Kazuhito Higuchi ,  Takeshi Miyagi ,  Yoshihiro Higashi ,  Michiko Hara ,  Hideaki Fukuzawa ,  Masayuki Kii ,  Eizo Fujisawa

IPC: H01L29/82 ,  H01L21/00 ,  G01L1/12 ,  H01L29/84 ,  H01L43/12 ,  H01L43/08

CPC classification number: G01L1/125

Abstract: According to one embodiment, a strain sensor includes a substrate, a lid, a frame, and a sensing unit. The substrate has a first surface. The lid is provided on the first surface. The frame is provided between the substrate and the lid. The frame is nonconductive and includes a magnetic body. The sensing unit is provided inside the frame between the substrate and the lid, and includes a magnetoresistance effect element.

Abstract translation: 根据一个实施例，应变传感器包括基板，盖子，框架和感测单元。 衬底具有第一表面。 盖子设置在第一表面上。 框架设置在基板和盖子之间。 框架是不导电的并且包括磁体。 感测单元设置在基板和盖子之间的框架内部，并且包括磁阻效应元件。

公开(公告)号：US20140236028A1

公开(公告)日：2014-08-21

申请号：US14261917

申请日：2014-04-25

Applicant: Kabushiki Kaisha Toshiba

Inventor： Hiromi Yuasa ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Alexander Devin Giddings ,  Michiko Hara ,  Shuichi Murakami

IPC: A61B5/021 ,  A61B5/00

Abstract: A blood-pressure sensor includes a substrate, a first electrode, a magnetization fixed layer, a nonmagnetic layer, a magnetization free layer, and a second electrode. The substrate is bent to generate a tensile stress at least in a first direction. The first electrode is provided on the substrate. The magnetization fixed layer has magnetization to be fixed in a second direction, and is provided on the substrate. The nonmagnetic layer is provided on the magnetization fixed layer. The magnetization free layer has a magnetization direction which is different from the first direction and from a direction perpendicular to the first direction. The second electrode is provided on the magnetization free layer.