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公开(公告)号:US12098958B2
公开(公告)日:2024-09-24
申请号:US17150003
申请日:2021-01-15
IPC分类号: G01J5/58 , G01J5/0802 , G01L11/02 , G01N21/3504 , G01N33/00
CPC分类号: G01J5/58 , G01J5/0802 , G01L11/02 , G01N21/3504 , G01N33/0027
摘要: An apparatus and method for determining a temperature in a system having an object, an optical sensor, and a gas flow passing between the object and the optical sensor, sensing, with the optical sensor, a wavelength emitted from the object and indicative of an attenuation, sensing, with the optical sensor, a wavelength emitted from the object and indicative of a temperature of at least one of the object or the gas; and calculating a temperature of the gas using the wavelengths.
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公开(公告)号:US11880053B2
公开(公告)日:2024-01-23
申请号:US17405013
申请日:2021-08-17
发明人: Gabriel Spahn
IPC分类号: G02B5/20 , G02B1/04 , G01T1/16 , G01K11/00 , G01J5/0802
CPC分类号: G02B5/208 , G01K11/006 , G01T1/1606 , G02B1/04 , G01J5/0802
摘要: Epoxy-based inline infrared (IR) filter assembly, and manufacture and use of the same. Co-axial infrared filter assemblies comprise a substantially cylindrical filter body forming a central cavity characterized by opposing holes at each end. The filter body forms an outer conductor, and SMA connectors coupled to the opposing holes at each end of the body are electrically coupled to form an inner conductor positioned along a long axis of the filter body. An infrared absorbing material (such as castable epoxy resin) fills the central cavity of the filter body. Methods for producing the co-axial infrared filter include pressing SMA connectors into the respective ends of the filter body, electrically coupling the SMA connectors, and filling the filter body with epoxy. Electronic systems for operating a dark matter detector include a feedline comprising a coaxial filter configured to advantageously block infrared noise.
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公开(公告)号:US20230203643A1
公开(公告)日:2023-06-29
申请号:US18175363
申请日:2023-02-27
发明人: Petar Atanackovic
IPC分类号: C23C14/54 , G01J5/00 , C30B23/02 , C30B29/16 , G01J5/0802 , H05B3/14 , C23C14/50 , G05D23/19 , H05B1/02 , H01J37/32 , C23C14/08 , C30B23/06
CPC分类号: C23C14/541 , G01J5/0007 , C30B23/025 , C30B29/16 , G01J5/0802 , H05B3/141 , C23C14/50 , G05D23/1928 , H05B1/0233 , H01J37/32724 , C23C14/08 , C30B23/063 , H05B2203/005
摘要: Methods and systems of heating a substrate in a vacuum deposition process include a resistive heater having a resistive heating element. Radiative heat emitted from the resistive heating element has a wavelength in a mid-infrared band from 5 μm to 40 μm that corresponds to a phonon absorption band of the substrate. The substrate comprises a wide bandgap semiconducting material and has an uncoated surface and a deposition surface opposite the uncoated surface. The resistive heater and the substrate are positioned in a vacuum deposition chamber. The uncoated surface of the substrate is spaced apart from and faces the resistive heater. The uncoated surface of the substrate is directly heated by absorbing the radiative heat.
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公开(公告)号:US11933675B2
公开(公告)日:2024-03-19
申请号:US16429888
申请日:2019-06-03
发明人: Jeffrey Montgomery , Magnus Lipp
IPC分类号: G01J5/0831 , G01J5/08 , G01J5/0802 , G01J5/0803 , G01J5/20 , G01J5/53
CPC分类号: G01J5/0831 , G01J5/0802 , G01J5/0803 , G01J5/0879 , G01J5/20 , G01J5/53 , G01J2005/202
摘要: The present disclosure relates to a system for sensing temperature changes on a microsecond scale. The system uses a multi-channel pyrometer that works in the NIR spectrum to receive thermal radiation. Each channel includes an interference filter tuned to pass thermal radiation within a specified wavelength range, and a detector. Each detector detects thermal radiation focused on it. Each channel further includes an interference filter which reflects thermal radiation which does not pass through it to a subsequent downstream interference filter of a subsequent channel. Each subsequent interference filter is oriented to reflect the thermal radiation not passing through it to a next downstream one of the subsequent interference filters. A subsystem is included for receiving the output from the detectors and determining sensed temperature data therefrom, allowing measurement of temperatures down to 800 K.
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公开(公告)号:US11835388B2
公开(公告)日:2023-12-05
申请号:US16843244
申请日:2020-04-08
发明人: Masaki Hirose , Katsumi Shibayama , Takashi Kasahara , Toshimitsu Kawai , Hiroki Oyama , Yumi Teramachi
IPC分类号: G01J5/08 , G01J3/26 , G02B26/00 , G01J3/02 , G01J5/0802 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304 , G01J5/04 , H10N15/10
CPC分类号: G01J3/26 , G01J3/0213 , G01J3/0256 , G01J3/0291 , G01J5/0802 , G01J5/20 , G02B26/00 , G02F1/21 , H01L31/0203 , H01L31/02005 , H01L31/02327 , H01L31/03046 , G01J5/045 , G02F1/213 , H10N15/10
摘要: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号:US20230221169A1
公开(公告)日:2023-07-13
申请号:US17726607
申请日:2022-04-22
申请人: WISTRON CORP.
发明人: Yu-Ju LIU , Chia Ming LIANG , Chin-Kun TSAI
IPC分类号: G01G19/52 , G01J5/00 , G01J5/0802
CPC分类号: G01G19/52 , G01J5/0037 , G01J5/0802
摘要: A measurement device includes a base, a platform, a temperature sensor, and a weighing component. The platform is movably disposed on the base. The temperature sensor is disposed on the base or the platform. The weighing component is accommodated in the base. The platform has a weight-measuring area and a temperature-measuring area which is located within the weight-measuring area and corresponding to the temperature sensor.
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公开(公告)号:US11686623B2
公开(公告)日:2023-06-27
申请号:US17200713
申请日:2021-03-12
申请人: PIXART IMAGING INC.
发明人: Ming-Han Tsai , Chih-Ming Sun , Jian-Cheng Liao
IPC分类号: G01J5/04 , G01J5/12 , G01J5/0875 , G01J5/00 , G01J5/05 , G01J5/0802
CPC分类号: G01J5/048 , G01J5/0025 , G01J5/05 , G01J5/0802 , G01J5/0875 , G01J5/12
摘要: An electronic device includes an outer case, a circuit substrate, a thermopile sensor chip, a filter structure, and a waterproof structure. The outer case has an opening. The circuit substrate is disposed inside the outer case. The thermopile sensor chip is disposed on the circuit substrate. The filter structure is disposed above the thermopile sensor chip. The waterproof structure is surroundingly connected between the filter structure and the outer case, wherein the waterproof structure has a through hole for exposing the filter structure and communicated with the opening of the outer case.
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公开(公告)号:US12050134B2
公开(公告)日:2024-07-30
申请号:US17719519
申请日:2022-04-13
发明人: Masatsugu Matsui
IPC分类号: G01J5/04 , G01J5/02 , G01J5/0802
CPC分类号: G01J5/046 , G01J5/0215 , G01J5/0225 , G01J5/0802
摘要: An optical sensor includes a light receiver, a circuit portion having an electronic component electrically connected to the light receiver, a metal cap covering an upper portion of the light receiver and includes a cavity facing the light receiver, an optical filter in the cavity of the metal cap, and a metal stem connected to the metal cap, and the circuit portion is on the metal stem.
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公开(公告)号:US11874176B2
公开(公告)日:2024-01-16
申请号:US17015062
申请日:2020-09-08
IPC分类号: G01J5/08 , G01J5/59 , G02B27/28 , G01J5/0802 , G01J5/0804 , G01J5/00 , G01J5/48
CPC分类号: G01J5/59 , G01J5/0802 , G01J5/0804 , G02B27/283 , G02B27/286 , G01J5/48 , G01J2005/0077
摘要: A two-wavelength, single-camera imaging thermography system for in-situ temperature measurement of a target, comprising: a target light path inlet conduit for receiving a target light beam reflected from the target; a beam splitter installed in a splitter housing at a distal end of the target light path conduit, wherein the beam splitter divides the target light beam into a first light beam and a second light beam; a first light path conduit emanating from the splitter housing comprising a first aperture iris installed within the first light path conduit for aligning the first light beam; a first band pass filter installed within the first light path conduit for regulating the first light beam to a first wavelength λ1 and an optional half waveplate installed within the first light path conduit to modulate a polarization ratio of the first light beam of λ1 wavelength; a second light path conduit emanating from the splitter housing comprising a second aperture iris installed within the second light path conduit for aligning the second light beam; a second band pass filter installed within the second light path conduit for regulating the second light beam to a second wavelength λ2; a junction housing, wherein distal ends of each of the first and second light path conduits are connected to the junction housing; a polarizing beam splitter installed in the junction housing, wherein the polarizing beam splitter reflects the first light beam of λ1 wavelength along the same path or a parallel path of the second light beam of λ2 wavelength that passes directly through the polarizing beam splitter unreflected to create a merged light beam comprising light of λ1 and λ2 wavelengths; and a light path outlet conduit connected to the junction for directing the merged beam to a high-speed camera for imaging.
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公开(公告)号:US11664250B2
公开(公告)日:2023-05-30
申请号:US17728461
申请日:2022-04-25
发明人: Ji-Dih Hu , Wolfgang R. Aderhold , Dongming Iu
IPC分类号: G01J5/00 , H01L21/00 , H01L21/67 , G01K7/01 , G01J5/0802 , G01J5/0818 , G01J5/0806
CPC分类号: H01L21/67248 , G01J5/0802 , G01J5/0806 , G01J5/0818 , G01K7/01 , H01L21/67115
摘要: An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.
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