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109 条记录 (耗时 0.019 秒)

    Methods and apparatus for measuring edge ring temperature
    6.
    发明授权
    Methods and apparatus for measuring edge ring temperature 有权

    公开(公告)号：US11664250B2

    公开(公告)日：2023-05-30

    申请号：US17728461

    申请日：2022-04-25

    申请人： APPLIED MATERIALS, INC.

    发明人： Ji-Dih Hu ,  Wolfgang R. Aderhold ,  Dongming Iu

    IPC分类号： G01J5/00 ,  H01L21/00 ,  H01L21/67 ,  G01K7/01 ,  G01J5/0802 ,  G01J5/0818 ,  G01J5/0806

    CPC分类号： H01L21/67248 ,  G01J5/0802 ,  G01J5/0806 ,  G01J5/0818 ,  G01K7/01 ,  H01L21/67115

    摘要： An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.

    Window obscuration sensors for mobile gas and chemical imaging cameras
    7.
    发明授权
    Window obscuration sensors for mobile gas and chemical imaging cameras 有权

    公开(公告)号：US11624705B2

    公开(公告)日：2023-04-11

    申请号：US17654320

    申请日：2022-03-10

    申请人： REBELLION PHOTONICS, INC.

    发明人： Ryan Mallery ,  Ohad Israel Balila ,  Robert Timothy Kester

    IPC分类号： G01N21/3504 ,  H04N5/33 ,  G01J5/0806 ,  G01N21/31

    摘要： An infrared (IR) imaging system for determining a concentration of a target species in an object is disclosed. The imaging system can include an optical system including a focal plane array (FPA) unit behind an optical window. The optical system can have components defining at least two optical channels thereof, said at least two optical channels being spatially and spectrally different from one another. Each of the at least two optical channels can be positioned to transfer IR radiation incident on the optical system towards the optical FPA. The system can include a processing unit containing a processor that can be configured to acquire multispectral optical data representing said target species from the IR radiation received at the optical FPA. One or more of the optical channels may be used in detecting objects on or near the optical window, to avoid false detections of said target species.

    Self-referenced ambient radiation thermometer and process for determining a temperature of a blackbody object
    8.
    发明授权
    Self-referenced ambient radiation thermometer and process for determining a temperature of a blackbody object 有权

    公开(公告)号：US11624661B2

    公开(公告)日：2023-04-11

    申请号：US16830393

    申请日：2020-03-26

    申请人： Government of the United States of America, as represented by the Secretary of Commerce

    发明人： Howard Wuk Yoon

    IPC分类号： G01J5/53 ,  G01J5/0806 ,  G01J5/10 ,  G01J5/0804

    摘要： A self-referenced ambient radiation thermometer determines a temperature of a blackbody object and includes a temperature stabilized detector; a detector lens; a Lyot stop; a collimating lens; a field stop; an optical chopper such that the central radiation received by the temperature stabilized detector is modulated at a modulation frequency of the optical chopper; an objective lens in optical communication with the blackbody object and the temperature stabilized detector, optically interposed between the blackbody object and the field stop and that: receives the central radiation from the blackbody object and communicates the central radiation to the field stop; and a temperature-stabilized isothermal enclosure that provides a stable temperature and isothermal environment to elements disposed in the temperature-stabilized isothermal enclosure, wherein the elements disposed in the temperature-stabilized isothermal enclosure comprise: the temperature stabilized detector, the detector lens, the collimating lens, the Lyot stop, and the field stop.

    Infrared presence detector system
    10.
    发明授权
    Infrared presence detector system 有权

    公开(公告)号：US11525735B2

    公开(公告)日：2022-12-13

    申请号：US16069062

    申请日：2017-01-11

    申请人： Carrier Corporation

    发明人： Alan Matthew Finn ,  Ziyou Xiong ,  Nicholas Charles Soldner ,  Joseph V. Mantese

    IPC分类号： G01J5/00 ,  G01J5/02 ,  G01J5/0806 ,  G01J5/0803

    摘要： An infrared presence detector system includes a focal plane array and a processor coupled to the focal plane array. The array includes a first radiant energy sensor and a plurality of second radiant energy sensors, with the first and second radiant energy sensors configured to convert incident radiation into an electrical signal. The processor is coupled to the focal plane array, and is configured to control the focal plane array in a sleep mode, wherein the first radiant energy sensor is energized and the plurality of second radiant energy sensors are de-energized, and an active mode, wherein at least the plurality of second radiant energy sensors are energized when the first radiant energy sensor detects a presence.