公开(公告)号：US11609420B2

公开(公告)日：2023-03-21

申请号：US17861721

申请日：2022-07-11

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Toshimitsu Kawai ,  Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G02B26/00

Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.

公开(公告)号：US11448869B2

公开(公告)日：2022-09-20

申请号：US16765547

申请日：2018-11-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Toshimitsu Kawai ,  Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G02B26/00

Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.

公开(公告)号：US11118972B2

公开(公告)日：2021-09-14

申请号：US15569101

申请日：2016-04-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Takehiko Yashiro ,  Mitsushi Mineno ,  Shigeru Suzuki

IPC: G01J3/26 ,  G02B26/00 ,  G02B5/28 ,  G01J5/04 ,  G01J5/08 ,  G01J5/02 ,  G01J3/02 ,  G01J5/10 ,  G01J5/06 ,  G02B7/00

Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.

公开(公告)号：US10908022B2

公开(公告)日：2021-02-02

申请号：US16065856

申请日：2017-05-01

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi Kasahara ,  Katsumi Shibayama ,  Masaki Hirose ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Kuramoto

IPC: G01J3/26 ,  B23K26/53 ,  B23K26/00 ,  B23K26/064 ,  B81B3/00 ,  B81C1/00 ,  G01J3/02 ,  G02B5/28 ,  G02B26/00 ,  B23K103/00 ,  B23K101/40 ,  B23K26/06

Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.

公开(公告)号：US10656020B2

公开(公告)日：2020-05-19

申请号：US15764943

申请日：2016-09-27

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi

IPC: H01L31/02 ,  G01J5/08 ,  G02B26/00 ,  G01J3/26 ,  G01J3/02 ,  G01J5/20 ,  G02F1/21 ,  H01L31/0203 ,  H01L31/0232 ,  H01L31/0304 ,  G01J5/04 ,  H01L37/02

Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.

公开(公告)号：US10408761B2

公开(公告)日：2019-09-10

申请号：US14420506

申请日：2013-08-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masashi Ito ,  Katsumi Shibayama ,  Takafumi Yokino ,  Masaki Hirose ,  Toshimitsu Kawai ,  Kazuto Ofuji ,  Yoshihiro Maruyama

IPC: B82Y40/00 ,  G01N21/65

Abstract: A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; a frame part formed on the principal surface of the substrate so as to surround the support part and fine structure part along the principal surface; and a conductor layer formed on at least the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering; while the fine structure part are formed integrally with the support part.

公开(公告)号：USD829580S1

公开(公告)日：2018-10-02

申请号：US35503173

申请日：2016-12-13

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi ,  Takafumi Yokino ,  Katsuhiko Kato

公开(公告)号：USD829578S1

公开(公告)日：2018-10-02

申请号：US35503158

申请日：2016-12-13

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi ,  Takafumi Yokino ,  Katsuhiko Kato

公开(公告)号：USD821901S1

公开(公告)日：2018-07-03

申请号：US35502885

申请日：2016-10-25

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Masaki Hirose ,  Katsumi Shibayama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Hiroki Oyama ,  Yumi Teramachi ,  Takafumi Yokino ,  Katsuhiko Kato

公开(公告)号：US09863884B2

公开(公告)日：2018-01-09

申请号：US14420510

申请日：2013-08-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Masashi Ito ,  Takafumi Yokino ,  Masaki Hirose ,  Anna Yoshida ,  Kazuto Ofuji ,  Yoshihiro Maruyama ,  Takashi Kasahara ,  Toshimitsu Kawai ,  Toru Hirohata ,  Hiroki Kamei ,  Hiroki Oyama

IPC: G01N21/65 ,  G01N21/03 ,  B82Y40/00

CPC classification number: G01N21/658 ,  B82Y40/00 ,  G01N21/03 ,  G01N2021/651

Abstract: A SERS element comprises a substrate having a front face; a fine structure part formed on the front face and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part has a thickness greater than the height of the pillars.