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    Light detection device
    1.
    发明授权
    Light detection device 有权

    公开(公告)号：US11796391B2

    公开(公告)日：2023-10-24

    申请号：US17634280

    申请日：2020-10-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Takashi Kasahara ,  Katsumi Shibayama ,  Kei Tabata ,  Masaki Hirose ,  Hiroki Oyama ,  Yumi Kuramoto

    IPC: G01J3/02 ,  G01J3/26 ,  G01J3/45 ,  G02B26/00 ,  G02B5/28

    CPC classification number: G01J3/26 ,  G01J3/0297 ,  G01J3/45 ,  G02B5/281 ,  G02B26/001

    Abstract: A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.

    Optical filter system
    2.
    发明授权
    Optical filter system 有权

    公开(公告)号：US11480783B2

    公开(公告)日：2022-10-25

    申请号：US16621919

    申请日：2018-06-12

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Helmut Teichmann ,  Andreas Durandi ,  Peter Seitz ,  Takashi Kasahara ,  Katsumi Shibayama

    IPC: G02B26/00

    Abstract: An optical filter system includes a Fabry-Perot interference filter, and a controller that controls the Fabry-Perot interference filter. The Fabry-Perot interference filter includes a first mirror portion, a second mirror portion, a first driving electrode and a first monitor electrode provided with the first mirror portion, and a second driving electrode and a second monitor electrode provided with the second mirror portion. The controller includes a control unit that calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on an alternating voltage generated between the first monitor electrode and the second monitor electrode while an alternating current is applied between the first monitor electrode and the second monitor electrode.

    Light-detecting device
    5.
    发明授权
    Light-detecting device 有权

    公开(公告)号：US10775238B2

    公开(公告)日：2020-09-15

    申请号：US16059744

    申请日：2018-08-09

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

    IPC: G01J3/26 ,  G01J3/02

    Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the transmission region.

    Fabry-Perot interference filter
    6.
    发明授权
    Fabry-Perot interference filter 有权

    公开(公告)号：US10591715B2

    公开(公告)日：2020-03-17

    申请号：US15117757

    申请日：2015-02-03

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

    IPC: G02B26/00 ,  G02B5/28 ,  G01J3/26

    Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.

    Light-detecting device
    8.
    发明授权
    Light-detecting device 有权

    公开(公告)号：US10184832B2

    公开(公告)日：2019-01-22

    申请号：US15031786

    申请日：2014-10-31

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

    IPC: G01J3/26 ,  G01J3/02 ,  G01J3/45

    Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.

    Light-detecting device
    9.
    发明授权
    Light-detecting device 有权

    公开(公告)号：US10175107B2

    公开(公告)日：2019-01-08

    申请号：US15031780

    申请日：2014-10-31

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Katsumi Shibayama ,  Takashi Kasahara ,  Masaki Hirose ,  Toshimitsu Kawai

    IPC: G01J3/45 ,  G01J3/26 ,  G01J3/02 ,  G01J5/04 ,  G01J5/20 ,  G02B26/00

    Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.

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