公开(公告)号：US12189113B2

公开(公告)日：2025-01-07

申请号：US17414462

申请日：2019-09-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Andreas Durandi ,  Helmut Teichmann

IPC: G02B26/00

Abstract: Provided is a monitor device used with a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes, and having a distance between the mirror parts changed in accordance with charges stored between the driving electrodes. The monitor device includes: a current application unit that applies an AC current having a frequency higher than a resonant frequency of the mirror parts across the driving electrodes; a voltage detection unit that detects a temporal development of a voltage generated between the driving electrodes during application of the AC current; a control unit that controls the AC current across the driving electrodes, based on an evaluation of a DC component of the voltage detected by the voltage detection unit; and a monitor unit that monitors the distance between the mirror parts based on an AC component of the voltage detected by the voltage detection unit.

公开(公告)号：US11480783B2

公开(公告)日：2022-10-25

申请号：US16621919

申请日：2018-06-12

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Helmut Teichmann ,  Andreas Durandi ,  Peter Seitz ,  Takashi Kasahara ,  Katsumi Shibayama

IPC: G02B26/00

Abstract: An optical filter system includes a Fabry-Perot interference filter, and a controller that controls the Fabry-Perot interference filter. The Fabry-Perot interference filter includes a first mirror portion, a second mirror portion, a first driving electrode and a first monitor electrode provided with the first mirror portion, and a second driving electrode and a second monitor electrode provided with the second mirror portion. The controller includes a control unit that calculates an electrostatic capacitance between the first mirror portion and the second mirror portion based on an alternating voltage generated between the first monitor electrode and the second monitor electrode while an alternating current is applied between the first monitor electrode and the second monitor electrode.

公开(公告)号：US12259275B2

公开(公告)日：2025-03-25

申请号：US17294051

申请日：2019-09-09

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Peter Seitz ,  Helmut Teichmann ,  Katsumi Shibayama ,  Takashi Kasahara

IPC: G02B5/28 ,  G01J3/26 ,  G02B26/00

Abstract: Provided is a control device for controlling a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes. The control device includes: a first driving source that is controlled by using a current as a control parameter, and changes the distance between the pair of mirror parts; a second driving source that is controlled by using a voltage as a control parameter, and changes the distance; and a control unit that controls the first driving source and the second driving source in such a way that the distance is changed by a first driving source in a first region and the distance is changed by the second driving source in at least one part of an region other than the first region when an region including a maximum of the voltage is defined as the first region.