公开(公告)号：US20150287711A1

公开(公告)日：2015-10-08

申请号：US14562788

申请日：2014-12-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： SEOKHOON KIM ,  BONYOUNG KOO ,  JinBum KIM ,  CHUL KIM ,  KWAN HEUM LEE ,  BYEONGCHAN LEE ,  Sujin JUNG

IPC: H01L27/02 ,  H01L29/06 ,  H01L27/088 ,  H01L29/78

CPC classification number: H01L27/0207 ,  H01L21/823431 ,  H01L27/0886 ,  H01L29/0649 ,  H01L29/66545 ,  H01L29/7834 ,  H01L29/7848

Abstract: Provided is a semiconductor device which includes a substrate including a first region and a second region different from the first region, a first active pattern provided on the substrate in the first region, a second active pattern provided on the substrate in the second region, a first gate structure crossing over the first active pattern and a second gate structure crossing over the second active pattern, first source/drain regions disposed on the first active pattern at opposite sides of the first gate structure, second source/drain regions disposed on the second active pattern at opposite sides of the second gate structure, and auxiliary spacers disposed in the first region to cover a lower portion of each of the first source/drain regions.

Abstract translation: 提供一种半导体器件，其包括：衬底，其包括第一区域和与第一区域不同的第二区域;设置在第一区域中的衬底上的第一有源图案，设置在第二区域中的衬底上的第二有源图案; 在第一有源图案上交叉的第一栅极结构和与第二有源图案交叉的第二栅极结构，在第一栅极结构的相对侧设置在第一有源图案上的第一源/漏区，设置在第二有源图案上的第二栅极结构的第二栅极结构 在第二栅极结构的相对侧的有源图案以及设置在第一区域中以覆盖每个第一源极/漏极区域的下部的辅助间隔物。

公开(公告)号：US20170194479A1

公开(公告)日：2017-07-06

申请号：US15335492

申请日：2016-10-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SEUNG RYUL LEE ,  SANG MOON LEE ,  CHUL KIM ,  JI EON YOON

IPC: H01L29/78 ,  H01L29/423

CPC classification number: H01L29/785 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66469 ,  H01L29/7848 ,  H01L29/78696

Abstract: A semiconductor device has a fin-type structure which extends in a first direction and includes a laminate of oxide and semiconductor patterns disposed one on another on a first region of a substrate, and a first gate electrode that extends longitudinally in a second direction different from the first direction on the fin-type structure. Each oxide pattern is an oxidized compound containing a first element.