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公开(公告)号：US20160272484A1
公开(公告)日：2016-09-22
申请号：US14843699
申请日：2015-09-02
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Tomohiro SAITO , Kei OBARA
CPC classification number: H01G5/16 , B81B7/0051 , B81B7/0058 , B81C2203/0136 , B81C2203/0145 , H01G5/18
Abstract: According to one embodiment, an electronic device includes a MEMS element provided on an underlying region, and a protection film including a first layer, a second layer provided on the first layer, and a third layer provided on the second layer, the protection film covering the MEMS element and forming a cavity in an inside thereof. An outer periphery of the second layer is located inside an outer periphery of the cavity, as viewed in a direction perpendicular to a surface of the underlying region.
Abstract translation: 根据一个实施例，电子设备包括设置在下面的区域上的MEMS元件，以及保护膜，其包括第一层，设置在第一层上的第二层和设置在第二层上的第三层，保护膜覆盖 MEMS元件并在其内部形成空腔。 第二层的外围位于垂直于下方区域的表面的方向观察时位于空腔的外周的内侧。
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公开(公告)号：US20230238344A1
公开(公告)日：2023-07-27
申请号：US17888915
申请日：2022-08-16
Inventor： Tomohiro SAITO
IPC: H01L23/00
CPC classification number: H01L24/13 , H01L24/16 , H01L24/81 , H01L2224/13076 , H01L2224/13144 , H01L2224/13124 , H01L2224/13147 , H01L2224/13109 , H01L2224/13184 , H01L2224/13166 , H01L2224/13164 , H01L2224/13188 , H01L2224/16145 , H01L2924/05442 , H01L2924/05042 , H01L2924/04941 , H01L2924/1306 , H01L2924/1461 , H01L2924/1436 , H01L2924/12041 , H01L2924/12042 , H01L2224/81193 , H01L2224/81201
Abstract: An electronic device includes a first structure body and a second structure body. The first structure body includes a first base body, a first bonding electrode and a first hard part. The second structure body includes a second base body, and a second bonding electrode. The first bonding electrode and the second bonding electrode are bonded to each other between the first base body and the second base body. The first hard part is located between the first base body and the second base body. The first hard part is positioned within an area in which the first bonding electrode is located when viewed along a first direction. The first direction is from the first base body toward the first bonding electrode. The first hard part has a higher hardness than the first bonding electrode.
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公开(公告)号：US20210047171A1
公开(公告)日：2021-02-18
申请号：US16808499
申请日：2020-03-04
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Fumitaka ISHIBASHI , Naofumi NAKAMURA , Hiroaki YAMAZAKI , Tomohiro SAITO , Tomohiko NAGATA , Kei MASUNISHI , Yoshihiko KURUI
IPC: B81B3/00
Abstract: According to one embodiment, a MEMS element includes a base body, a supporter, a film part, a first electrode, a second electrode, and an insulating member. The supporter is fixed to the base body. The film part is separated from the base body in a first direction and supported by the supporter. The first electrode is fixed to the base body and provided between the base body and the film part. The second electrode is fixed to the film part and provided between the first electrode and the film part. The insulating member includes a first insulating region and a second insulating region. The first insulating region is provided between the first electrode and the second electrode. A first gap is provided between the first insulating region and the second electrode. The second insulating region does not overlap the first electrode in the first direction.
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公开(公告)号：US20170108391A1
公开(公告)日：2017-04-20
申请号：US15069216
申请日：2016-03-14
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Tamio IKEHASHI , Tomohiro SAITO , Ryunosuke GANDO , Etsuji OGAWA
CPC classification number: G01L9/0072 , G01L9/0042 , G01L9/12
Abstract: According to one embodiment, a sensor includes a substrate, a variable capacitor including a bottom electrode provided on the substrate and a top electrode provided above the bottom electrode so as to face the bottom electrode, a movable structure including a portion located above the top electrode and being movable in accordance with a specific physical quantity, a support structure including at least one support portion supporting the top electrode, and a connection structure connecting the movable structure and the top electrode to displace the top electrode based on displacement of the movable structure, wherein the top electrode is displaced about an axis penetrating the at least one support portion, which serves as a first rotation axis.
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公开(公告)号：US20130285164A1
公开(公告)日：2013-10-31
申请号：US13839600
申请日：2013-03-15
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Tomohiro SAITO , Yohei SYUHAMA
CPC classification number: B81B3/0018 , B81B2203/0163 , B81C1/00134 , B81C1/0019
Abstract: According to one embodiment, a MEMS device comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face the first electrode, and vertically movable, a second anchor portion formed on the substrate and configured to support the second electrode, and a second spring portion configured to connect the second electrode and the second anchor portion. The second spring portion is continuously formed from an upper surface of the second electrode to an upper surface of the second anchor portion, and has a flat lower surface.
Abstract translation: 根据一个实施例，MEMS器件包括固定在衬底上的第一电极，形成在第一电极上面以面对第一电极的第二电极和可垂直移动的第二锚定部分，形成在衬底上并构造成支撑第二电极 以及构造成连接第二电极和第二锚定部的第二弹簧部。 第二弹簧部分从第二电极的上表面连续地形成到第二锚固部分的上表面，并且具有平坦的下表面。
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Patent Agency Ranking
公开(公告)号：US20240321662A1
公开(公告)日：2024-09-26
申请号：US18453682
申请日：2023-08-22
Inventor： Yutaka ONOZUKA , Tomohiro SAITO , Kazuyuki HIGASHI , Kazumichi TSUMURA
IPC: H01L23/31 , H01L23/00 , H01L23/13 , H01L23/498 , H05K1/18
CPC classification number: H01L23/3121 , H01L23/13 , H01L23/49811 , H01L24/13 , H01L24/14 , H01L24/16 , H05K1/181 , H01L24/32 , H01L24/48 , H01L24/73 , H01L2224/13013 , H01L2224/1416 , H01L2224/16225 , H01L2224/32225 , H01L2224/48091 , H01L2224/48105 , H01L2224/48227 , H01L2224/73265 , H05K2201/10734
Abstract: An electronic component includes: a first substrate having a first surface with a first region and a second region, a plurality of first bumps provided in the first region, and zero or one or more second bumps provided in the second region, the number of second bumps being smaller than the number of first bumps; and a second substrate having a second surface with a third region facing the first surface and the first region and a fourth region facing the second region, a plurality of third bumps provided in the third region and in contact with the first bumps, zero or one or more fourth bumps provided in the fourth region and in contact with the second bumps, a third surface provided on a side opposite to the third region and having a first distance from the second surface, and a fourth surface provided on a side opposite to the fourth region and having a second distance from the second surface shorter than the first distance, the number of fourth bumps being smaller than the number of third bumps.
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公开(公告)号：US20240321544A1
公开(公告)日：2024-09-26
申请号：US18455589
申请日：2023-08-24
Inventor： Tomohiro SAITO
IPC: H01J37/12
Abstract: According to one embodiment, an electronic device includes a substrate, an electrode, and a facing portion. The substrate has a through hole. The electrode is provided in the through hole in the substrate and extends along an axial direction of the through hole. The facing portion is provided on the substrate, is disposed at a position closer to a center of the through hole in a width direction than is the electrode, and faces, in the width direction, a portion of the electrode on one end side in the axial direction.
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公开(公告)号：US20230298848A1
公开(公告)日：2023-09-21
申请号：US17929826
申请日：2022-09-06
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Hiroko NAKAMURA , Tomohiro SAITO , Yoshiaki SHIMOOKA
CPC classification number: H01J37/20 , H01J37/09 , H01J2237/0455 , H01J2237/0453 , H01J2237/0458 , H01J37/28
Abstract: A charged particle beam pattern forming device is described, a charged particle beam passing through a third aperture for forming a charged particle beam pattern, the charged particle beam pattern forming device including: a first element including a first aperture, a second element including a second aperture, the second aperture overlapping the first aperture, wherein the third aperture is defined by an overlap of the first aperture and the second aperture, and a shape of the third aperture is capable of being changed by a driver such that the first element is moved in a first direction and the second element is moved in a second direction opposite to the first direction.
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公开(公告)号：US20150284242A1
公开(公告)日：2015-10-08
申请号：US14744327
申请日：2015-06-19
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Tomohiro SAITO
IPC: B81B7/00
CPC classification number: B81B7/0058 , B81B7/0035 , B81B7/0054 , B81C1/00277 , B81C2203/0136 , B81C2203/0145 , B81C2203/0163
Abstract: According to one embodiment, an electrical component comprises a substrate, a functional element formed on the substrate, a first layer configured to form a cavity which stores the functional element on the substrate, the first layer having through holes, the first layer having a first recessed portion and a first projecting portion on an upper surface thereof, and the first layer having different film thicknesses in a direction perpendicular to a surface of the substrate, and a second layer formed on the first layer and configured to close the through holes.
Abstract translation: 根据一个实施例，电气部件包括衬底，形成在衬底上的功能元件，第一层，被配置为形成将功能元件存储在衬底上的空腔，第一层具有通孔，第一层具有第一层 凹部和在其上表面上的第一突出部分，并且所述第一层在垂直于所述基板的表面的方向上具有不同的膜厚度;以及第二层，形成在所述第一层上并且被构造成闭合所述通孔。
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公开(公告)号：US20140291780A1
公开(公告)日：2014-10-02
申请号：US14024178
申请日：2013-09-11
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： Tomohiro SAITO
CPC classification number: B81B3/0086 , B81B2201/0221 , H01G5/18
Abstract: According to one embodiment, a MEMS device including a first electrode provided on a support substrate, a second electrode opposed to the first electrode, having at least one end part overlapping the first electrode, and able to move in a direction it is opposed to the first electrode, and beam parts provided on the support substrate and supporting the second electrode. The surface of that part of the first electrode, which opposes the end part of the second electrode, is set at a lower level than the surface of that part of the second electrode, which opposes a center part of the second electrode.
Abstract translation: 根据一个实施例，一种MEMS器件，包括设置在支撑衬底上的第一电极，与第一电极相对的第二电极，具有与第一电极重叠的至少一个端部，并且能够沿着与第一电极相反的方向移动 第一电极和设置在支撑基板上并支撑第二电极的光束部分。 第一电极的与第二电极的端部相对的部分的表面设置在比第二电极的与第二电极的中心部分相对的部分的表面更低的水平处。
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