According to one embodiment, a MEMS device comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face the first electrode, and vertically movable, a second anchor portion formed on the substrate and configured to support the second electrode, and a second spring portion configured to connect the second electrode and the second anchor portion. The second spring portion is continuously formed from an upper surface of the second electrode to an upper surface of the second anchor portion, and has a flat lower surface.