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公开(公告)号：US6120350A
公开(公告)日：2000-09-19
申请号：US282391
申请日：1999-03-31
Applicant: Yi-yang Zhou , Eugene C. Davis
Inventor： Yi-yang Zhou , Eugene C. Davis
IPC: B24B53/12 , B24B37/04 , B24B49/02 , B24B53/007 , B24B53/017 , B24B53/14 , B24D7/06 , H01L21/304 , B24B49/18
CPC classification number: B24B53/017 , B24B37/042 , B24B49/02 , B24B53/14 , B24D7/06
Abstract: A pad shaping tool for shaping a polishing pad. The tool includes a disk having a first side and a second side and at least two discontinuous pad shaping surfaces located in spaced apart positions relative to each other on the first side of the disk. The pad shaping surfaces are simultaneously engageable with a polishing surface of the polishing pad for shaping the polishing surface as the pad rotates relative to the tool to change a cross sectional profile of the polishing surface from a curved shape to a flatter shape. A process for reconditioning the polishing pad on a rotatable platform of a wafer polishing machine includes the steps of engaging the pad shaping tool with the polishing surface of the pad such that at least two discontinuous pad shaping surfaces of the tool simultaneously engage the polishing surface, and rotating the polishing pad while preventing translational movement of the tool relative to the pad so that the tool shapes the polishing surface of the pad to be more nearly flat.
Abstract translation: 一种用于成形抛光垫的垫整形工具。 该工具包括具有第一侧和第二侧的盘，以及至少两个不连续的衬垫整形表面，其位于盘的第一侧上彼此相对分开的位置。 焊盘成形表面可同时与抛光垫的抛光表面接合，用于当焊盘相对于工具旋转时成形抛光表面，以将抛光表面的横截面轮廓从弯曲形状改变为更平坦的形状。 用于在晶片抛光机的可旋转平台上修复抛光垫的过程包括以下步骤：使焊盘成形工具与焊盘的抛光表面接合，使得工具的至少两个不连续焊盘成形表面同时接合抛光表面， 并且在防止所述工具相对于所述垫的平移运动的同时旋转所述抛光垫，使得所述工具将所述垫的抛光表面形状更接近平坦。
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公开(公告)号：US4915089A
公开(公告)日：1990-04-10
申请号：US296291
申请日：1989-01-10
Applicant: William W. Ruark , Joseph A. Zahorchak , Glenn A. Johnson
Inventor： William W. Ruark , Joseph A. Zahorchak , Glenn A. Johnson
IPC: B24B53/14
CPC classification number: B24B53/14
Abstract: There is provided a tool for trueing and dressing a grinding wheel, comprising a wheel having a thin layer of diamonds in a plane perpendicular to the rotational axis of the tool. There is also provided a method for trueing and dressing a grinding wheel, comprising engaging the periphery of a rotating grinding wheel with a rotating trueing and dressing wheel having a thin layer of diamonds in a plane perpendicular to the rotational axis of the trueing and dressing wheel. Preferably, the trueing and dressing wheel is disposed between the headstock and tailstock of a grinding machine in place of the workpiece.
Abstract translation: 提供了一种用于修整和修整砂轮的工具，其包括在与工具的旋转轴线垂直的平面中具有薄的金刚石层的轮。 还提供了一种用于对砂轮进行真实和修整的方法，包括使旋转砂轮的周边与旋转的真实和修整轮啮合，所述转动的真实和修整轮在与真实和修整轮的旋转轴线垂直的平面中具有薄的金刚石层 。 优选地，真实和修整轮被置于研磨机的主轴箱和尾座之间以代替工件。
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公开(公告)号：US4892082A
公开(公告)日：1990-01-09
申请号：US288016
申请日：1988-12-20
Applicant: Horst J. Wedeniwski
Inventor： Horst J. Wedeniwski
Abstract: A dressing roll comprises a revolving circumferential surface, in particular two conical circumferential surfaces (12, 13) intersecting each other along an outer circumferential line (14). The circumferential surface is garnished with diamonds. In order to ensure that the diamond needles attack a grinding wheel to be dressed over a two-dimensional surface and to avoid the production of spiral-shaped dressing grooves in the grinding wheel surface, the diamonds take the form of diamond needles (15, 16) which project obliquely from the circumferential surface (12, 13) and whose free ends (17, 18) overlap each other in the circumferential direction (FIG. 1).
Abstract translation: 修整辊包括旋转圆周表面，特别是沿着外圆周线（14）彼此相交的两个圆锥形周向表面（12,13）。 圆周表面装饰有钻石。 为了确保金刚石针头攻击砂轮以穿过二维表面，并避免在砂轮表面产生螺旋形修整槽，钻石采取金刚石针（15,16）的形式 ），其从周面（12,13）倾斜地突出并且其自由端（17,18）在圆周方向（图1）上彼此重叠。
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公开(公告)号：US4744348A
公开(公告)日：1988-05-17
申请号：US929688
申请日：1986-11-12
Applicant: Hideaki Oda , Akira Unozawa
Inventor： Hideaki Oda , Akira Unozawa
CPC classification number: B24B49/003 , B24B47/22 , B24B53/14
Abstract: A grinding wheel dressing apparatus including a housing, a dresser shaft rotatably mounted on the housing and having one end adapted for connection to a drive shaft and an opposite end adapted to receive a dresser wheel, and an acoustic sensor retained by the housing and adapted to detect acoustic signals produced by contact between the rotating dresser wheel and a grinding wheel being dressed thereby.
Abstract translation: 一种砂轮修整设备，包括壳体，可旋转地安装在壳体上的修整器轴，并且具有适于连接到驱动轴的一端和适于接收修整器轮的相对端以及由壳体保持的声学传感器， 检测由旋转的修整器轮和被磨损的砂轮之间的接触产生的声信号。
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公开(公告)号：US4730596A
公开(公告)日：1988-03-15
申请号：US915461
申请日：1986-10-06
Applicant: Horst E. Maack , Manfred M. Funke
Inventor： Horst E. Maack , Manfred M. Funke
Abstract: A dressing roll unit is supported on a nonrotating shaft clamped and maintained as a "fixed end" beam, thereby restrained against axial movement and deflection. The shaft is formed with spaced-apart bearing points, wherein wedge-shaped relief sectors are formed about the shaft at the bearing points, and a roll body is maintained about the bearing points with an annular clearance. Rotation of the dressing roll body and roll thereby forms high pressure hydrodynamic wedges of oil at the relief sectors and annular clearances, to create an extremely rigid roll mounting unit, without the need for pivoting bearing parts.
Abstract translation: 修整辊单元支撑在作为“固定端”梁夹持并保持的非旋转轴上，从而抑制轴向运动和偏转。 轴形成有间隔开的轴承点，其中在轴承点处围绕轴形成楔形浮雕扇区，并且辊体围绕具有环形间隙的轴承点保持。 修整辊体和辊的旋转从而在浮雕扇区和环形间隙处形成高压油压楔形油，以形成非常刚性的辊安装单元，而不需要枢转轴承部件。
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Patent Agency Ranking
公开(公告)号：US4685440A
公开(公告)日：1987-08-11
申请号：US832350
申请日：1986-02-24
Applicant: Warren J. Owens
Inventor： Warren J. Owens
Abstract: Apparatus and method to provide a rotary dressing tool, formed to the geometric shape of any part piece to be ground, which is utilized to reform an abrasive wheel so that it will produce desired dimensional characteristics on the part piece. A combination of diamond particles and preformed polycrystalline diamond segments are spaced around the outer perimeter of the tool and surrounded by a matrix of abrasive resistant nickel based alloy. Co-utilization of the diamond particles and the preformed segments creates a rotary dressing tool which is highly resistant to abrasive wear, enhancing the performance and durability of the tool.
Abstract translation: 用于提供旋转修整工具的装置和方法，其形成为待研磨的任何部件的几何形状，其用于改变砂轮，使得其将在零件上产生期望的尺寸特性。 金刚石颗粒和预成型的多晶金刚石区段的组合围绕工具的外周边间隔开，并由耐磨镍基合金基体包围。 金刚石颗粒和预制段的共同利用产生了高度耐磨损的旋转修整工具，提高了工具的性能和耐久性。
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公开(公告)号：US4551950A
公开(公告)日：1985-11-12
申请号：US634430
申请日：1984-07-26
Applicant: Kunihiko Unno , Toshio Tsujiuchi , Yukio Oda
Inventor： Kunihiko Unno , Toshio Tsujiuchi , Yukio Oda
CPC classification number: G05B19/182 , B24B53/08 , G05B2219/45159
Abstract: A truing apparatus includes a truing tool supported on a tool support movable radially and axially of a grinding wheel having a rounded corner and drivable by a feed drive unit coupled to the tool support to move along a predetermined path for truing the rounded corner of the grinding wheel. At least one contact member for contacting outer peripheral and end surfaces of the grinding wheel is mounted on the tool support, and a sensor is also mounted on the tool support for detecting a contact between the contact member and the grinding wheel. A feed control system controls the feed drive unit for moving the truing tool along the predetermined path. The feed control system controls the feed drive unit so that the contact member will move radially and axially of the grinding wheel until the sensor is actuated immediately after one truing process and immediately before a next truing process. A grinding wheel position detector detects radial and axial positions of the grinding wheel when the sensor is actuated immediately after the one truing process and immediately before the next truing process. A correcting unit corrects the predetermined path along which the truing tool is to move in the next truing process based on the positions of the grinding wheel detected by the grinding wheel position detector immediately after the one truing process and immediately before the next truing process.
Abstract translation: 修整装置包括修整工具，该工具支撑件可在具有圆角的砂轮的径向和轴向上移动并且可通过联接到工具支撑件的进给驱动单元驱动的工具支撑件沿着预定的路径移动，以便研磨研磨的圆角 轮。 用于接触砂轮的外周和端表面的至少一个接触构件安装在工具支架上，传感器也安装在工具支架上，用于检测接触构件和砂轮之间的接触。 进给控制系统控制进给驱动单元，用于沿着预定路径移动修整工具。 进给控制系统控制进给驱动单元，使得接触构件将沿砂轮的径向和轴向移动，直到在一个修整过程之后立即致动传感器并且在下一个修整过程之前。 砂轮位置检测器在传感器在一个修整过程之后立即致动并且紧接在下一个修整过程之前，检测砂轮的径向和轴向位置。 校正单元基于在一次修整处理之后和紧接在下一个修整处理之前由砂轮位置检测器检测到的砂轮的位置来校正修整工具在下一个修整过程中要移动的预定路径。
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公开(公告)号：US4163346A
公开(公告)日：1979-08-07
申请号：US874312
申请日：1978-02-01
Applicant: Charles B. Matson
Inventor： Charles B. Matson
Abstract: A tangential grinding machine has a variable grinding feed rate which is dependent upon the length of the cutting or grinding path which occurs between the grinding wheel and a workpiece. The variable feed rate accomodates fluctuations in grinding wheel and workpiece dimensions to control the grinding time and optimize stock removal rates.
Abstract translation: 切向研磨机具有可变的磨削进给速率，其取决于在砂轮和工件之间发生的切割或磨削路径的长度。 可变进给速率适应砂轮和工件尺寸的波动，以控制研磨时间并优化原料清除率。
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公开(公告)号：US4112624A
公开(公告)日：1978-09-12
申请号：US816268
申请日：1977-07-18
Applicant: Herbert R. Uhtenwoldt , Norman S. Humes
Inventor： Herbert R. Uhtenwoldt , Norman S. Humes
IPC: B24B53/14
CPC classification number: B24B53/14
Abstract: Grinding machine having annular dressing wheel whose inner surface is used for dressing.
Abstract translation: 研磨机具有内表面用于修整的环形修整轮。
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公开(公告)号：US3602210A
公开(公告)日：1971-08-31
申请号：US3602210D
申请日：1969-06-27
Applicant: JEROME APPLETON
Inventor： APPLETON JEROME
Abstract: Apparatus for dressing, smoothing and reshaping the cutting surface of an abrasive impregnated cutting wheel. Apparatus includes a frame member suitable for mounting in the object vise of a cutting machine having a diamond impregnated cutting wheel, a rotatable cylindrical dressing surface mounted on the frame member, and guide means to hold the cutting wheel in proper position. The dressing surface engages the periphery of the cutting wheel under pressure to smooth and shape it by a peening action of the rotating cylindrical dressing surface upon the periphery of the cutting wheel.
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