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公开(公告)号：US10479084B2
公开(公告)日：2019-11-19
申请号：US15586113
申请日：2017-05-03
Applicant: CANON KABUSHIKI KAISHA
Inventor： Seiichiro Yaginuma , Keiji Matsumoto , Koji Sasaki
Abstract: A method for manufacturing liquid ejection heads includes the steps of forming ejection port members on a substrate, the ejection port members each having a liquid channel and an ejection port for ejecting liquid through the channel, the liquid channel communicating with the substrate; forming supply ports passing through the substrate to supply liquid to the channels; and forming a separation groove in the substrate to separate the substrate for each liquid ejection head. The step of forming the ejection port members includes the step of hardening a material constituting the ejection port member by heat treatment. The step of forming the separation groove is performed before the step of hardening.
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公开(公告)号：US09421773B2
公开(公告)日：2016-08-23
申请号：US13956607
申请日：2013-08-01
Applicant: CANON KABUSHIKI KAISHA
Inventor： Kazuhiro Asai , Keiji Matsumoto , Kunihito Uohashi , Shuji Koyama
CPC classification number: B41J2/1631 , B41J2/1603 , B41J2/1629 , B41J2/1639 , B41J2/1645 , Y10T29/49401
Abstract: The invention provides a process for producing a liquid ejection head having an ejection orifice forming member in which an ejection orifice for ejecting a liquid has been formed, and a substrate having an energy-generating element for generating energy for ejecting a liquid from the ejection orifice on the side of a front surface thereof, the process includes the steps of providing a film having a support, a first layer and a second layer in this order, arranging the film on the substrate in such a manner that the second layer faces the front surface, detaching the support from the film arranged, forming the ejection orifice in the second layer, and removing at least a part of the first layer from the second layer.
Abstract translation: 本发明提供一种制造液体喷射头的方法，该液体喷射头具有喷射孔形成部件，其中已经形成有用于喷射液体的喷射孔，以及具有用于产生从喷射口喷出液体的能量的能量产生元件的基板 在其前表面侧，该方法包括以下步骤：依次提供具有支撑体，第一层和第二层的膜，以使第二层面向前方的方式将膜设置在基板上 表面，从布置的膜分离支撑体，在第二层中形成喷射孔，以及从第二层去除第一层的至少一部分。
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公开(公告)号：US09381737B2
公开(公告)日：2016-07-05
申请号：US14098122
申请日：2013-12-05
Applicant: XEROX CORPORATION
Inventor： Terrance L. Stephens , Dan Leo Massopust , John R. Andrews , Christopher J. Laharty
CPC classification number: B41J2/01 , B41J2/14072 , B41J2/14201 , B41J2/1601 , B41J2/1607 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2002/14491 , Y10T29/49401
Abstract: A method of manufacturing a print head includes forming a jet stack having an array of jets, arranging an array of transducers on the jet stack such that each transducer in the array of transducers corresponds to each jet in the array of jets, embossing a flexible circuit substrate having contact pads such that the contact pads extend out of a plane of the flexible circuit substrate, and arranging the flexible circuit substrate such that the contact pads electrically connect to at least some of the transducers in the array of transducers.
Abstract translation: 制造打印头的方法包括形成具有射流阵列的喷射叠层，在喷射叠层上布置换能器阵列，使得换能器阵列中的每个换能器对应于射流阵列中的每个射流，压印柔性电路 衬底具有接触焊盘，使得接触垫延伸出柔性电路衬底的平面，并且布置柔性电路衬底，使得接触垫电连接到换能器阵列中的至少一些换能器。
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公开(公告)号：US09266331B2
公开(公告)日：2016-02-23
申请号：US13926651
申请日：2013-06-25
Applicant: CANON KABUSHIKI KAISHA
Inventor： Sadayoshi Sakuma , Hirokazu Komuro , Yuzuru Ishida , Kazuaki Shibata , Makoto Sakurai
CPC classification number: B41J2/1637 , B41J2/14129 , B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1639 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , Y10T29/49002 , Y10T29/49401
Abstract: Provided is a method for manufacturing a substrate for liquid ejection head including an ejection energy generating element and a nozzle layer including an ejection port and a liquid channel. The method includes the steps of: forming, on the substrate including the element, a metal mold member made of metal and having a flat surface, the metal mold member making up at least a part of a mold for the liquid channel, and a planarization layer made of the metal and having a flat surface to planarize a surface of the nozzle layer; coating the mold for the liquid channel and the planarization layer with negative-type photosensitive resin, thus forming a negative-type photosensitive resin layer to be the nozzle layer; exposing the resin layer to ultraviolet rays, thus forming the ejection port; and selectively removing the mold for the liquid channel, thus forming the liquid channel.
Abstract translation: 本发明提供一种液体喷射头用基板的制造方法，其特征在于，具有喷射能量产生元件和喷出口以及液体通道的喷嘴层。 该方法包括以下步骤：在包括元件的基板上形成由金属制成并具有平坦表面的金属模具构件，所述金属模具构件构成用于液体通道的模具的至少一部分，以及平坦化 由金属制成并具有平坦表面以使喷嘴层的表面平坦化的层; 用负型感光树脂涂布液体通道的模具和平坦化层，从而形成作为喷嘴层的负型感光性树脂层; 将树脂层暴露于紫外线，从而形成喷出口; 并选择性地去除用于液体通道的模具，从而形成液体通道。
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5.发明授权Method of manufacturing liquid ejection head, method of manufacturing recording apparatus including the same, liquid ejection head, and recording apparatus 有权液体喷射头的制造方法，包括该液体喷射头的记录装置的制造方法，液体喷射头和记录装置公开(公告)号：US09233537B2
公开(公告)日：2016-01-12
申请号：US12715511
申请日：2010-03-02
Applicant: Hideki Hayashi
Inventor： Hideki Hayashi
CPC classification number: B41J2/14209 , B41J2/1609 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2002/14217 , B41J2002/14225 , B41J2002/14306 , B41J2002/14459 , B41J2002/14491 , B41J2202/20 , Y10T29/49401
Abstract: A method of manufacturing a liquid ejection head having a plurality of passage modules that have individual passages, actuator modules that include a plurality of actuators and a drive unit and the liquid ejection head produced by the method. The method comprising ranking the actuator modules according to a magnitude of a capacitance of the actuators, classifying the passage modules into a terminal region group and a central region group, fixing the actuator modules to the passage modules so that the actuator modules that having a capacitance not less than a predetermined capacitance correspond to the passage modules in the terminal group and so that the actuator modules having a capacitance less than the predetermined capacitance in the actuator module ranking correspond to the passage modules in the central region group.
Abstract translation: 一种液体喷射头的制造方法，具有具有单独通路的多个通道模块，包括多个致动器的致动器模块和通过该方法制造的驱动单元和液体喷射头。 该方法包括根据致动器的电容的大小对致动器模块进行排序，将通道模块分类为端子区域组和中心区域组，将致动器模块固定到通道模块，使得具有电容的致动器模块 不小于预定电容对应于端子组中的通道模块，并且使得具有小于致动器模块等级中的预定电容的电容的致动器模块对应于中心区域组中的通道模块。
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Patent Agency Ranking
公开(公告)号：US09090064B2
公开(公告)日：2015-07-28
申请号：US13665460
申请日：2012-10-31
Applicant: FUJIFILM CORPORATION
Inventor： Yasukazu Nihei
CPC classification number: B41J2/1433 , B41J2/1606 , B41J2/162 , Y10T29/49401
Abstract: An object of the invention is to provide a method of manufacturing a liquid droplet ejection head that is capable of realizing cost reduction by a simple process and obtaining ejection reliability over a long period of time. The method includes: forming a water repellent film on a nozzle forming substrate having a nozzle hole and inside the nozzle hole; adhering a protective film on the water repellent film that is formed on the surface of the nozzle forming substrate; removing the water repellent film formed inside the nozzle by a plasma treatment; and peeling the protective film, wherein polysiloxane is not contained in an adhesion component and a base material of the protective film.
Abstract translation: 本发明的目的是提供一种制造液滴喷射头的方法，该方法能够通过简单的工艺实现成本降低并且在长时间内获得喷射可靠性。 该方法包括：在具有喷嘴孔和喷嘴孔内的喷嘴形成基板上形成防水膜; 在形成在喷嘴形成基板的表面上的防水膜上粘附保护膜; 通过等离子体处理除去在喷嘴内形成的防水膜; 并剥离保护膜，其中聚硅氧烷不包含在保护膜的粘合组分和基底材料中。
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7.发明授权公开(公告)号：US08839520B2
公开(公告)日：2014-09-23
申请号：US12844373
申请日：2010-07-27
Applicant: Tsuyoshi Yoda
Inventor： Tsuyoshi Yoda
CPC classification number: B41J2/14233 , B41J2002/14419 , B41J2002/14491 , H01L2224/0554 , H01L2224/0557 , H01L2224/05571 , H01L2224/05573 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05671 , H01L2224/16 , H01L2924/00014 , H05K1/0306 , H05K3/185 , H05K3/32 , H05K3/403 , Y10T29/49126 , Y10T29/49401 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
Abstract: A method of manufacturing a device that has a semiconductor element includes: forming a first wiring on a first surface of a first member; forming a second wiring on a second surface of a second member with a gap from a connection terminal and a third wiring on an inclined plane of the second member, the second member being disposed on the first member so that the first and second surfaces face in the same direction, the third wiring being aligned with, and connecting, the first and second wirings; disposing the semiconductor element on the first or second surface; and providing plating that electrically connects the first, second and third wiring with the connection terminal, wherein the connection terminal faces the second wiring, and the plating is provided in the gap between the connection terminal and the second wiring.
Abstract translation: 一种制造具有半导体元件的器件的方法包括：在第一部件的第一表面上形成第一布线; 在第二构件的第二表面上形成与第二构件的倾斜平面上的连接端子和第三布线间隙的第二布线，第二构件设置在第一构件上，使得第一和第二表面面向 相同的方向，第三布线与第一布线和第二布线对准并连接; 将半导体元件设置在第一或第二表面上; 并且提供将所述第一，第二和第三布线与所述连接端子电连接的电镀，其中所述连接端子面向所述第二布线，并且所述电镀设置在所述连接端子和所述第二布线之间的间隙中。
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公开(公告)号：US08819935B2
公开(公告)日：2014-09-02
申请号：US13079287
申请日：2011-04-04
Applicant: Seiichi Fujita , Yutaka Yamazaki
Inventor： Seiichi Fujita , Yutaka Yamazaki
CPC classification number: B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1642 , B41J2/1646 , B41J2002/14241 , B41J2002/14491 , Y10T29/49401
Abstract: A method for producing a liquid-ejecting head including a passage-forming substrate and a protective substrate. The passage-forming substrate has pressure-generating chambers communicating with nozzle orifices, piezoelectric devices that change the inner pressures of the pressure-generating chambers, and liquid supply channels for supplying the pressure-generating chambers. The protective substrate has a piezoelectric-device accommodating portion and a through-hole, through which wirings to lead electrodes extended from the piezoelectric devices pass thorough. The method includes forming the piezoelectric-device accommodating portion and a portion of the through-hole in the protective substrate while leaving a lid, a portion of the protective substrate, closing off an opening of the through-hole, bonding the protective substrate to the passage-forming substrate, forming the pressure-generating chambers and the liquid supply channels in the passage-forming substrate, forming a protective film on surfaces of the passage-forming substrate and the protective substrate, and removing the lid to complete the formation of the through-hole.
Abstract translation: 一种包括通道形成基板和保护基板的液体喷射头的制造方法。 通道形成基板具有与喷嘴孔连通的压力产生室，改变压力发生室的内部压力的压电装置和用于供应压力产生室的液体供应通道。 保护基板具有压电器件容纳部和贯通孔，使从压电元件延伸的引线电极的布线通过。 该方法包括在保留基板的同时留下盖子的同时形成压电装置容纳部分和通孔的一部分，保护基板的一部分封闭通孔的开口，将保护基板接合到 通道形成基板，在通道形成基板中形成压力产生室和液体供应通道，在通道形成基板和保护基板的表面上形成保护膜，并且移除盖以完成 通孔。
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9.发明授权Micro-fluid ejection device and method for assembling a micro-fluid ejection device by a wafer-to-wafer bonding 有权微流体喷射装置和通过晶片到晶片结合来组装微流体喷射装置的方法公开(公告)号：US08806752B2
公开(公告)日：2014-08-19
申请号：US13407865
申请日：2012-02-29
Applicant: Zachary Justin Reitmeier
Inventor： Zachary Justin Reitmeier
CPC classification number: B41J2/1631 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1634 , B41J2/1645
Abstract: A micro-fluid ejection device is assembled by wafer-to-wafer bonding at a temperature below about 150° C. a first silicon oxide layer of a first wafer, having flow features patterned in the first silicon oxide layer on an actuator chip in a first silicon substrate of the first wafer, to a second silicon oxide layer of a second wafer, defining a nozzle plate on a second silicon substrate of the second wafer. Nozzle holes are formed in the nozzle plate in alignment with actuator elements of the actuator chip of the first wafer either before or after bonding the first and second wafers together. The second silicon substrate of the second wafer is used as a handle and then removed from the silicon oxide layer of the second wafer after bonding the first and second wafers together.
Abstract translation: 微流体喷射装置在低于约150℃的温度下通过晶片与晶片结合来组装第一晶片的第一氧化硅层，其具有在第一氧化硅层中图案化的致动器芯片上的流动特征 第一晶片的第一硅衬底，到第二晶片的第二氧化硅层，在第二晶片的第二硅衬底上限定喷嘴板。 在将第一和第二晶片结合在一起之前或之后，在喷嘴板中形成与第一晶片的致动器芯片的致动器元件对准的喷嘴孔。 将第二晶片的第二硅衬底用作手柄，然后在将第一和第二晶片接合在一起之后从第二晶片的氧化硅层去除。
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公开(公告)号：US08806751B2
公开(公告)日：2014-08-19
申请号：US12767828
申请日：2010-04-27
Applicant: Yonglin Xie , John A. Lebens , Charles F. Faisst
Inventor： Yonglin Xie , John A. Lebens , Charles F. Faisst
CPC classification number: B41J2/175 , B41J2/03 , B41J2/09 , B41J2/105 , B41J2002/031 , B41J2002/14403
Abstract: A method of manufacturing a printhead includes providing a substrate and a filter membrane structure. A first portion of the substrate defines a plurality of nozzles and a second portion of the substrate defines a plurality of liquid chambers. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a respective one of the plurality of nozzles. The filter membrane structure is adhered, for example, laminated, to the second portion of the substrate. Each liquid chamber of the plurality of liquid chambers is in fluid communication with a distinct portion of the filter membrane structure. Pores are formed in the filter membrane structure using a photo-lithography process.
Abstract translation: 打印头的制造方法包括提供基板和滤膜结构。 衬底的第一部分限定多个喷嘴，并且衬底的第二部分限定多个液体室。 多个液体室中的每个液体室与多个喷嘴中的相应一个流体连通。 过滤膜结构例如层叠在基板的第二部分上。 多个液体室的每个液体室与过滤膜结构的不同部分流体连通。 使用光刻工艺在滤膜结构中形成孔。
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