Method and apparatus for cooling a tool

    公开(公告)号:US11981971B2

    公开(公告)日:2024-05-14

    申请号:US17275220

    申请日:2019-09-24

    摘要: The invention relates to a method for cooling a tool in a heat treatment furnace, wherein: the tool is supplied during normal cooling operation with coolant from a coolant reservoir through a supply inlet (1), which coolant is returned into the coolant reservoir from the tool via a return flow (2); the supply inlet (1) is coupled by means of an electric actuator (3) alternatively to the coolant reservoir or to the public water supply and the return flow (2) is coupled by means of a further electric actuator (3) alternatively to the coolant reservoir or to the public waste water system (4); the actuators (3, 3′) are supplied with a feed current during normal cooling operation and held in a first position in which coolant is supplied to the tool through the supply inlet (5) from the coolant reservoir and the coolant is fed back through the return flow (2, 6) into the coolant reservoir; and, upon interruption in the power supply, the actuators (3, 3′) are forced into an emergency position in which cold water is supplied to the tool through the supply inlet (7) from the public water supply and the water is discharged through the return flow (2, 8) into the public waste water system (4).

    Pressure regulation in remote zones
    2.
    发明授权
    Pressure regulation in remote zones 有权
    偏远地区的压力调节

    公开(公告)号:US08689822B2

    公开(公告)日:2014-04-08

    申请号:US13271447

    申请日:2011-10-12

    IPC分类号: F16K31/02

    摘要: A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.

    摘要翻译: 压力控制系统通过控制流入每个外壳的流动来远程控制一个或多个远程区域内的压力,每个远程区域分别通过导管连接到外壳。 在每个外壳内测量流体的压力。 根据外壳中测量的压力和导管和区域的已知特性,计算每个区域内的估计压力。 对于每个区域,操作每个外壳的入口比例阀和出口比例阀,以便控制流体进入相应外壳的流体的输入流量和流出外壳的输出流量作为 压力设定点和估计压力,从而根据压力设定点调节区域内的压力。

    MULTI-ZONE PRESSURE CONTROL SYSTEM
    3.
    发明申请
    MULTI-ZONE PRESSURE CONTROL SYSTEM 审中-公开
    多区域压力控制系统

    公开(公告)号:US20090137192A1

    公开(公告)日:2009-05-28

    申请号:US11946388

    申请日:2007-11-28

    IPC分类号: B24B7/00

    CPC分类号: G05D16/206 Y10T137/86493

    摘要: A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.

    摘要翻译: 控制多个区域中的流体压力的压力控制系统包括分配歧管,连接到分配歧管的至少一个主歧管以及连接到分配歧管和主歧管的至少一个一次性歧管。 一次性歧管适于独立于分配歧管和主歧管而被替换,并且连接到每个区域和至少一个真空源。 分配歧管将流体分配到多个区域,以使流体流入和流出位于每个区域内的测量室。 主歧管包括对于每个区域,配置成测量该区域中的测量室中的压力的​​压力传感器,以及配置成调节通过该区域的流体流动的控制阀。

    Relative pressure control system and relative flow control system
    4.
    发明授权
    Relative pressure control system and relative flow control system 有权
    相对压力控制系统和相对流量控制系统

    公开(公告)号:US07353841B2

    公开(公告)日:2008-04-08

    申请号:US11295649

    申请日:2005-12-07

    IPC分类号: G05D11/13 G05D16/20

    摘要: Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

    摘要翻译: 提供一种相对压力控制系统具有简单的结构,但是能够精确地调节操作气体的分配比,并且在紧急情况下同时可以从操作气体管道可靠地排出操作气体。 该系统包括多个常开型气动阀,其连接到供给操作气体的操作气体管道; 压力传感器串联连接到相应的气动阀并且检测各个气动阀的输出压力; 控制器,其根据压力传感器检测到的压力来控制各个气动阀的操作压力; 以及将所述多个气动阀彼此关联使得所述多个气动阀中的至少一个通常打开的硬联锁电磁阀。 在这种构造中,调节多个气动阀中的指定的一个的开度,以预定的分配比率输出操作气体。

    Method and apparatus for controlling hydraulic braking pressure for a
vehicle
    5.
    发明授权
    Method and apparatus for controlling hydraulic braking pressure for a vehicle 失效
    用于控制车辆的液压制动压力的方法和装置

    公开(公告)号:US4940291A

    公开(公告)日:1990-07-10

    申请号:US293773

    申请日:1989-01-05

    申请人: Makoto Sato

    发明人: Makoto Sato

    摘要: A method of controlling a hydraulic braking pressure for a vehicle wherein a reference deceleration is set corresponding to an amount of braking operation, a standard hydraulic braking pressure is determined corresponding to the reference deceleration and an amount of electricity corresponding to the standard hydraulic braking pressure is applied to an actuator so as to allow the hydraulic braking pressure to be fed to a braking unit in dependence on the amount of electricity applied thereto so that ideal control for the hydraulic braking pressure is performed in correspondence to the quantity of braking operation. An apparatus for controlling a hydraulic braking pressure for a vehicle wherein its structure is simplified so as to carry out the aforementioned method. The apparatus is so constructed that a spool adapted to change over a communicated state between output port, input port and release port in dependence on an axial displacement thereof is slidably fitted in a housing having input ports leading to the hydraulic pressure sypply source, output ports leading to braking units and release port leading to an oil tank, an actuator adapted to generate a thrust force in dependence on an amount of electricity input thereinto is operatively connected to one ends of the spools and a hydraulic pressure chamber leading to the output port is formed in the housing to generate hydraulic force adapted to counteract against a thrust force while it is exposed to the other end face of the spool.

    摘要翻译: 一种控制车辆的液压制动压力的方法,其中对应于制动操作量设定基准减速度,根据基准减速度确定标准液压制动压力,并且与标准液压制动压力相对应的电量为 施加到致动器以允许液压制动压力根据施加到其上的电力供给到制动单元,从而对应于制动操作量执行用于液压制动压力的理想控制。 一种用于控制车辆的液压制动压力的装置,其中其结构被简化以便执行上述方法。 该装置被构造成使得适于根据其轴向位移在输出端口,输入端口和释放端口之间的连通状态改变的线轴可滑动地装配在具有通向液压源的输入端口的壳体中,输出端口 导致制动单元和通向油箱的释放口,适于根据其中输入的电力量产生推力的致动器可操作地连接到阀芯的一端,并且通向输出端口的液压室是 形成在壳体中以产生适于在暴露于卷轴的另一端面的同时抵抗推力的液压力。

    METHOD, APPARATUS AND SYSTEM FOR BALANCING THE FLUID PRESSURE OF FLUID DISTRIBUTION SYSTEMS

    公开(公告)号:US20180113481A1

    公开(公告)日:2018-04-26

    申请号:US15363636

    申请日:2016-11-29

    申请人: John Faiczak

    发明人: John Faiczak

    IPC分类号: G05D7/06 G05D16/20

    摘要: The present invention is a fluid distribution system comprising connected conduits (e.g., lines) wherein fluid flows, such as pipes within a building. The lines may be configured to: (i) include multiple lines that connect at intersections (some of the intersections will be identified as nodes); and (ii) incorporate node units associated with line pressure loss simulation assemblies (“LLSAs”). Activities of a node unit incorporating a LLSA can result in alterations in fluid pressure, such as by a loop control process to reposition balancing valves or other valves of one or more LLSAs, and/or by alteration of the speed of the system pump. These activities adjust fluid pressure to cause the system to produce a balanced and high efficiency energy transfer (e.g., heating or cooling), and do not involve or require any identification or use of any specific, fixed or absolute pressure value. They function based on an operation locus (for a node unit) and/or an operation locus range (for node unit groupings) to adjust the fluid pressure.

    PRESSURE REGULATION IN REMOTE ZONES
    7.
    发明申请
    PRESSURE REGULATION IN REMOTE ZONES 有权
    远程区域的压力调节

    公开(公告)号:US20120202408A1

    公开(公告)日:2012-08-09

    申请号:US13271447

    申请日:2011-10-12

    IPC分类号: B24B57/00 F17D3/00

    摘要: A pressure control system remotely controls pressure within one or more remote zones, each respectively connected to an enclosure through a conduit, by controlling flow of a fluid into and out of each enclosure. The pressure of the fluid is measured within each enclosure. An estimated pressure within each zone is computed, as a function of the measured pressure in the enclosure and known characteristics of the conduit and the zone. For each zone, an inlet proportional valve and an outlet proportional valve of each enclosure is operated so as to control the input flow rate of the fluid into the respective enclosure and the output flow rate of the fluid out of the enclosure as a function of a pressure set point and the estimated pressure, thereby regulating pressure within the zone in accordance with the pressure set point.

    摘要翻译: 压力控制系统通过控制流入每个外壳的流动来远程控制一个或多个远程区域内的压力,每个远程区域分别通过导管连接到外壳。 在每个外壳内测量流体的压力。 根据外壳中测量的压力和导管和区域的已知特性,计算每个区域内的估计压力。 对于每个区域,操作每个外壳的入口比例阀和出口比例阀,以便控制流体进入相应外壳的流体的输入流量和流出外壳的输出流量作为 压力设定点和估计压力,从而根据压力设定点调节区域内的压力。

    METHODS OF AND APPARATUS FOR CONTROLLING PRESSURE IN MULTIPLE ZONES OF A PROCESS TOOL
    8.
    发明申请
    METHODS OF AND APPARATUS FOR CONTROLLING PRESSURE IN MULTIPLE ZONES OF A PROCESS TOOL 有权
    用于控制工艺工具的多个区域中的压力的​​方法和装置

    公开(公告)号:US20110135821A1

    公开(公告)日:2011-06-09

    申请号:US12632514

    申请日:2009-12-07

    申请人: Junhua Ding

    发明人: Junhua Ding

    IPC分类号: C23C16/52 C23C16/00

    摘要: A method of and a multiple zone pressure controller system for controlling the pressure of a gas or vapor flowing to at least two zones of a process tool such as a vacuum deposition chamber. The system comprises: at least two channels configured and arranged so as to provide the flow of the gas or vapor to corresponding zones of the process tool, each channel including a pressure controller configured and arranged to control the pressure of gas or vapor in each channel, a leakby orifice or nozzle configured to provide a leak rate of gas or vapor from the channel; and a controller configured and arrange to determine the true flow information to each zone of the process tool so that the true leak rate in the chamber can be determined.

    摘要翻译: 一种用于控制气流或蒸气的压力的多区域压力控制器系统的方法和多区域压力控制器系统,该气体或蒸气流到诸如真空沉积室的处理工具的至少两个区域。 该系统包括:构造和布置至少两个通道,以将气体或蒸汽的流动提供给处理工具的相应区域,每个通道包括压力控制器,其配置和布置成控制每个通道中的气体或蒸汽的压力 ,漏孔或喷嘴,其构造成从通道提供气体或蒸气的泄漏率; 以及控制器,其配置和布置以确定到处理工具的每个区域的真实流量信息,使得可以确定室中的真实泄漏率。

    System and method for controlling pressure in remote zones
    10.
    发明授权
    System and method for controlling pressure in remote zones 有权
    控制偏远地区压力的系统和方法

    公开(公告)号:US06986359B2

    公开(公告)日:2006-01-17

    申请号:US10796723

    申请日:2004-03-09

    IPC分类号: G05D16/20 B24B51/00

    摘要: A system for controlling fluid flow through i lines, wherein the i lines are connectable through tubing to i zones, respectively, and wherein i=1, 2, . . . , N. The system includes at least one valve and a pressure transducer in each of the i lines, a control device for controlling the valves, and a zone pressure estimator. The zone pressure estimator is connected to the pressure transducers and is programmed to calculate an estimated pressure in each the i zones and provide the estimated pressures to the control device.

    摘要翻译: 用于控制通过i线的流体流动的系统,其中i线分别通过管道连接到i区域,并且其中i = 1,2。 。 。 该系统包括在i行中的每一个中的至少一个阀和压力传感器,用于控制阀的控制装置和区域压力估计器。 区域压力估计器连接到压力传感器,并被编程为计算每个i区域中的估计压力,并将估计的压力提供给控制装置。