Multiple storage tank system
    1.
    发明授权

    公开(公告)号:US12117124B2

    公开(公告)日:2024-10-15

    申请号:US17706616

    申请日:2022-03-29

    Abstract: A multiple storage tank system includes: storage tanks in which cryogenic fluid is stored; discharge lines connected to the storage tanks to discharge the stored cryogenic fluid or introduce cryogenic fluid; a supply line connected to the discharge lines and a supply target to supply the discharged cryogenic fluid to the supply target; a build-up line branching off the supply line to control internal pressure of a first storage tank of the storage tanks; and a gas transfer line connected to the storage tanks to transfer gas inside the storage tanks, wherein when the internal pressure of the first storage tank is controlled while the cryogenic fluid passes through the build-up line, gas inside the first storage tank is transferred to at least one other storage tank through the gas transfer line so that internal pressure of the at least one other storage tank is controlled.

    CONSTANT PRESSURE GAS STORAGE IN CONTAINMENTS WITH MITIGATION FOR GAS DISSOLUTION PROBLEMS

    公开(公告)号:US20240117938A1

    公开(公告)日:2024-04-11

    申请号:US17642005

    申请日:2020-09-14

    Inventor: Michael Simpson

    Abstract: Disclosed herein is a system for storing gas at almost constant pressure, which involves the injection and withdrawal of a liquid in a process known as hydraulic compensation. This disclosure teaches a way to minimize that dissolution by ensuring that, as the gas containment is charged up, the hydraulic compensation liquid emerges from the containment at the gas storage pressure and the pressure of that liquid is caused to fall in a number of discrete steps with settling volumes present at the nodes between these steps. These settling volumes enable some gas to come out of solution at each node having lost relatively small amounts of pressure. The gas is compressed back up to storage pressure and re-injected into the main storage containment without significant use of energy.

    SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

    公开(公告)号:US20230408034A1

    公开(公告)日:2023-12-21

    申请号:US18245341

    申请日:2021-09-16

    Abstract: A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed. The supply control system for the tank according to an embodiment of the present disclosure includes a plurality of tanks for storing a large amount of process material used to manufacture a semiconductor; a main-supply pipe configured to communicate with sub-supply pipes respectively coupled to the plurality of tanks and to supply process material to a semiconductor manufacturing device; a plurality of flow control devices respectively included in the sub-supply pipes and configured to control a process material flow rate discharged from each of the plurality of tanks; a sensor included in the main-supply pipe and configured to measure in real time the process material flow rate and a process material supply pressure supplied from each of the plurality of tanks to the semiconductor manufacturing device; a back-up portion coupled to the main-supply pipe and configured to supplementally discharge stored process material, such that process material is stably supplied to the semiconductor manufacturing device; and a controller configured to control the plurality of flow control devices and the back-up portion based on information on the process material flow rate or information on the process material supply pressure measured by the sensor, such that a set process material flow rate is supplied to the semiconductor manufacturing device through the main-supply pipe.

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