PREPARATION AND USE OF EXO-2-FLUOROALKYL(BICYCLO[2.2.1] HEPT-5-ENES)
    7.
    发明申请
    PREPARATION AND USE OF EXO-2-FLUOROALKYL(BICYCLO[2.2.1] HEPT-5-ENES) 失效
    二-2-氟代烷基(双丙基[2.2.1]庚二烯-5-烯)的制备和使用)

    公开(公告)号:US20050058932A1

    公开(公告)日:2005-03-17

    申请号:US10664303

    申请日:2003-09-16

    摘要: There is disclosed a composition comprising a mixture of endo- and exo-2-(bicyclo[2.2.1]hept-5-en-2-yl)-2,2-fluoroalkyl-ethan-2-ol which is rich in the exo isomer, preferably the endo/exo concentration ratio is no greater than 5/95. The composition is useful for forming a repeat unit of a polymer which polymer may further comprise additional repeat units derived from tert-butyl acrylate, hydroxyadamantyl acrylate, protected or unprotected fluorinated olefins, 2-methyl-2-adamantyl acrylate, 2-propenoic acid, 2-hydroxy-1,1,2-trimethylpropyl ester. Polymers of this invention are useful as the binder component of a photoresist composition for microlithography.

    摘要翻译: 公开了一种组合物,其包含内 - 和外-2-(二环[2.2.1]庚-5-烯-2-基)-2,2-氟烷基 - 乙-2-醇的混合物,其富含 外异构体,优选内/外浓度比不大于5/95。 该组合物可用于形成聚合物的重复单元,该聚合物可以进一步包含衍生自丙烯酸叔丁酯,丙烯酸羟基金刚烷基酯,被保护或未保护的氟化烯烃,丙烯酸2-甲基-2-金刚烷基酯,2-丙烯酸, 2-羟基-1,1,2-三甲基丙基酯。 本发明的聚合物可用作微光刻用光致抗蚀剂组合物的粘合剂组分。

    Process for preparing fluorine-containing norbornene derivative
    8.
    发明申请
    Process for preparing fluorine-containing norbornene derivative 有权
    含氟降冰片烯衍生物的制备方法

    公开(公告)号:US20040214103A1

    公开(公告)日:2004-10-28

    申请号:US10753529

    申请日:2004-01-09

    IPC分类号: C08F026/06 G03C001/76

    摘要: There are provided a novel norbornene derivative which is a material for a chemically amplifying type photoresist for F2 laser, possesses excellent transparency and improved dry etching resistivity and has a fluorine-containing ketone unit or fluorine-containing tertiary alcohol unit directly bonded to the norbornene backbone; a fluorine-containing polymer obtained by using the norbornene derivative as a copolymerizable monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoacid generator and a solvent.

    摘要翻译: 提供了一种新型的降冰片烯衍生物,它是用于F2激光的化学放大型光致抗蚀剂的材料,具有优异的透明性和改善的干蚀刻电阻率,并且具有直接键合在降冰片烯骨架上的含氟酮单元或含氟叔醇单元 ; 通过使用降冰片烯衍生物作为可共聚单体得到的含氟聚合物; 以及包含含氟聚合物,光致酸产生剂和溶剂的化学放大型光致抗蚀剂组合物。

    Microbicidal hydroxyethyl-cyclopropyl-azolyl derivatives
    9.
    发明授权
    Microbicidal hydroxyethyl-cyclopropyl-azolyl derivatives 失效
    杀微生物羟乙基 - 环丙基 - 唑基衍生物

    公开(公告)号:US5216180A

    公开(公告)日:1993-06-01

    申请号:US786481

    申请日:1991-11-01

    摘要: A herbicidal hydroxyethyl-cyclopropyl-azolyl derivative of the formula ##STR1## in which R.sup.1 represents halogen, phenyl or the grouping --Z-R.sup.3, whereinZ represents oxygen, sulphur, SO or SO.sub.2 andR.sup.3 represents alkyl, phenyl or benzyl,R.sup.2 represents alkenyl, optionally substituted furyl, optionally substituted thienyl or the radical of the formula ##STR2## wherein R.sup.4 represents difluoromethoxy, 1,1,2,2-tetrafluoroethoxy, 1,1,2-trifluoro-2-chloro-ethoxy, cyano, formyl, alkoximinoalkyl, carbalkoxy, dialkoxyalkyl, phenoxyalkyl which is optionally substituted in the phenyl moiety by halogen, or benzyloxy which is optionally substituted in the phenyl moiety by halogen andR.sup.5 represents hydrogen or halogen, orR.sup.4 and R.sup.5 are linked in the ortho-position and together represent --O--CH.sub.2 --O--, orR.sup.2 represents the radical of the formula ##STR3## in which R.sup.6 represents difluoromethoxy, 1,1,2,2-tetrafluoroethoxy or 1,1,2-trifluoro-2-chloro-ethoxy, orR.sup.2 also represents phenyl which is optionally substituted by halogen and/or phenyl if Y represents the grouping ##STR4## X represents nitrogen or a CH group and Y represents the groupings --CH.sub.2 -CH.sub.2 --, --CH.dbd.CH--, --C.tbd.C-- or ##STR5## or an acid or metal salt addition product thereof.

    摘要翻译: 式(I)的除草羟乙基 - 环丙基 - 唑基衍生物,其中R 1表示卤素,苯基或基团-Z-R 3,其中Z表示氧,硫,SO或SO 2,R 3表示烷基,苯基或苄基 ,R 2表示烯基,任选取代的呋喃基,任选取代的噻吩基或式的基团其中R 4表示二氟甲氧基,1,1,2,2-四氟乙氧基,1,1,2-三氟-2-氯乙氧基, 氰基,甲酰基,肟基烷基,烷氧基,二烷氧基烷基,在苯基部分被卤素任意取代的苯氧基烷基,或在苯基部分被卤素任意取代的苄氧基,R5代表氢或卤素,或R4和R5连接在邻位 并且一起表示-O-CH 2 -O-,或R 2表示式“IMAGE”的基团,其中R 6表示二氟甲氧基,1,1,2,2-四氟乙氧基或1,1,2-三氟-2- 氯乙氧基,或R2也表示任选取代的苯基 如果Y表示分组,则由卤素和/或苯基发生。X表示氮或CH基,Y表示分组-CH 2 -CH 2 - , - CH = CH - , - C 3BOND C或或 酸或金属盐加成产物。