-
公开(公告)号:US20070138638A1
公开(公告)日:2007-06-21
申请号:US11594875
申请日:2006-11-09
申请人: Yukitoshi Ota , Noriyuki Nagai , Tsuyoshi Hamatani
发明人: Yukitoshi Ota , Noriyuki Nagai , Tsuyoshi Hamatani
IPC分类号: H01L23/52
CPC分类号: H01L23/522 , H01L22/32 , H01L24/05 , H01L2224/02166 , H01L2224/05001 , H01L2224/05093 , H01L2224/0554 , H01L2224/05554 , H01L2224/45124 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01078 , H01L2924/01082 , H01L2924/04953 , H01L2924/05042 , H01L2924/00 , H01L2224/48
摘要: In a semiconductor device having a multilayer interconnection structure, wires are formed by a damascene process, at least part of electrode pads includes a first conductive layer having a region provided for an electrical connection with an external unit. Herein, the first conductive layer is formed on a passivation film that is formed a semiconductor substrate and is indispensable for the multilayer interconnection structure.
摘要翻译: 在具有多层互连结构的半导体器件中,通过镶嵌工艺形成导线,至少部分电极焊盘包括具有设置用于与外部单元的电连接的区域的第一导电层。 这里,第一导电层形成在形成半导体衬底的钝化膜上,对于多层互连结构是不可或缺的。
-
公开(公告)号:US20070029641A1
公开(公告)日:2007-02-08
申请号:US11498188
申请日:2006-08-03
申请人: Tsuyoshi Hamatani , Yukitoshi Ota
发明人: Tsuyoshi Hamatani , Yukitoshi Ota
IPC分类号: H01L23/544
CPC分类号: H01L23/585 , H01L21/78 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A seal ring is continuously formed along a boundary between a semiconductor element region and a scribe grid region, auxiliary parts are intermittently arranged along the seal ring, and the seal ring is constituted by a metal layer.
摘要翻译: 沿着半导体元件区域和划线格栅区域之间的边界连续地形成密封环,辅助部件沿着密封环间歇地布置,密封环由金属层构成。
-
公开(公告)号:US07777304B2
公开(公告)日:2010-08-17
申请号:US11498188
申请日:2006-08-03
申请人: Tsuyoshi Hamatani , Yukitoshi Ota
发明人: Tsuyoshi Hamatani , Yukitoshi Ota
IPC分类号: H01L23/544
CPC分类号: H01L23/585 , H01L21/78 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A seal ring is continuously formed along a boundary between a semiconductor element region and a scribe grid region, auxiliary parts are intermittently arranged along the seal ring, and the seal ring is constituted by a metal layer.
摘要翻译: 沿着半导体元件区域和划线格栅区域之间的边界连续地形成密封环,辅助部件沿着密封环间歇地布置,密封环由金属层构成。
-
公开(公告)号:US20100090344A1
公开(公告)日:2010-04-15
申请号:US12540043
申请日:2009-08-12
申请人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
发明人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
CPC分类号: H01L24/05 , H01L22/32 , H01L23/53223 , H01L23/53238 , H01L2224/02166 , H01L2224/05073 , H01L2224/05093 , H01L2224/05096 , H01L2224/05166 , H01L2224/05181 , H01L2224/05187 , H01L2224/05624 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01078 , H01L2924/01082 , H01L2924/04953 , H01L2924/05042 , H01L2924/04941 , H01L2924/00014
摘要: A semiconductor device includes an insulating film formed on a semiconductor substrate, a contact wiring formed in the insulating film, a protective film formed on the contact wiring and the insulating film, an opening portion formed in the protective film, the contact wiring being exposed through the opening portion, and an electrode pad formed in the opening portion, the electrode pad being electrically connected to the contact wiring. A region where the contact wiring is not provided is present below the opening portion.
摘要翻译: 半导体器件包括形成在半导体衬底上的绝缘膜,形成在绝缘膜中的接触布线,形成在接触布线和绝缘膜上的保护膜,形成在保护膜中的开口部分,接触布线通过 开口部分和形成在开口部分中的电极焊盘,电极焊盘电连接到接触布线。 未设置接触配线的区域存在于开口部的下方。
-
公开(公告)号:US20080087993A1
公开(公告)日:2008-04-17
申请号:US11826673
申请日:2007-07-17
申请人: Isamu Aokura , Toshiyuki Fukuda , Yukitoshi Ota , Keiji Miki
发明人: Isamu Aokura , Toshiyuki Fukuda , Yukitoshi Ota , Keiji Miki
IPC分类号: H01L23/495 , H01L21/60
CPC分类号: H01L24/81 , H01L23/13 , H01L23/49816 , H01L23/5386 , H01L24/16 , H01L25/0655 , H01L2224/05001 , H01L2224/05022 , H01L2224/05124 , H01L2224/05572 , H01L2224/056 , H01L2224/10175 , H01L2224/13099 , H01L2224/16 , H01L2224/16225 , H01L2224/26175 , H01L2224/32225 , H01L2224/45124 , H01L2224/48465 , H01L2224/49171 , H01L2224/8121 , H01L2224/81815 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01018 , H01L2924/01022 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01072 , H01L2924/01074 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04941 , H01L2924/10253 , H01L2924/14 , H01L2924/15192 , H01L2924/15311 , H01L2924/1532 , H01L2924/157 , H01L2924/19107 , H01L2924/351 , H01L2924/00
摘要: A semiconductor device in accordance with the present invention includes IC chips (semiconductor elements) (2, 3, 4) having solder bumps (24) (projecting electrodes) formed on electrode pads, and a first wiring board (1) having connection terminals (7) to which the respective solder bumps (24) of the IC chips (2, 3, 4) are connected, external connection terminals (8) for connection to an external apparatus, and conductor wires (9) provided in respective groove portions formed in a board surface and connected to the respective connection terminals (7). In spite of the reduced pitch of the conductor wires (9), the presence of the groove portions enables an increase in cross section, allowing a reduction in wiring resistance.
摘要翻译: 根据本发明的半导体器件包括在电极焊盘上形成有焊料凸点(24)(突出电极)的IC芯片(半导体元件)(2,3,4)和具有连接端子的第一布线板(1) 7),IC芯片(2,3,4)的各个焊料凸块(24)连接到其上,用于连接到外部设备的外部连接端子(8)和形成在各个槽部分中的导线(9) 在板表面上并连接到相应的连接端子(7)。 尽管导体线(9)的间距减小,但是沟槽部分的存在使得横截面增加,从而允许降低布线电阻。
-
公开(公告)号:US08736067B2
公开(公告)日:2014-05-27
申请号:US13191818
申请日:2011-07-27
申请人: Hiroshige Hirano , Yukitoshi Ota , Yutaka Itoh
发明人: Hiroshige Hirano , Yukitoshi Ota , Yutaka Itoh
IPC分类号: H01L23/48 , H01L23/485
CPC分类号: H01L21/76807 , H01L23/528 , H01L24/03 , H01L24/05 , H01L24/48 , H01L2224/02166 , H01L2224/04042 , H01L2224/05017 , H01L2224/05093 , H01L2224/05546 , H01L2224/05551 , H01L2224/05552 , H01L2224/05553 , H01L2224/05557 , H01L2224/05578 , H01L2224/05624 , H01L2224/48453 , H01L2224/48463 , H01L2224/85205 , H01L2924/00014 , H01L2924/00012 , H01L2924/00 , H01L2224/45099
摘要: A semiconductor device includes: a first insulating film formed on a substrate; a pad embedded in the first insulating film; and a second insulating film that is formed on the first insulating film and has an opening exposing at least part of the pad. The pad includes a plurality of pad interconnects, and an interconnect link is provided to electrically connect adjacent interconnects among the plurality of pad interconnects. The width of the pad interconnects is smaller than the height of the pad interconnects and larger than the width of the interconnect link.
摘要翻译: 半导体器件包括:形成在衬底上的第一绝缘膜; 嵌入在所述第一绝缘膜中的焊盘; 以及第二绝缘膜,其形成在所述第一绝缘膜上并具有暴露所述焊盘的至少一部分的开口。 焊盘包括多个焊盘互连,并且提供互连链路以电连接多个焊盘互连中的相邻互连。 焊盘互连的宽度小于焊盘互连的高度,并且大于互连链路的宽度。
-
公开(公告)号:US08710667B2
公开(公告)日:2014-04-29
申请号:US13289683
申请日:2011-11-04
申请人: Hiroshige Hirano , Yukitoshi Ota
发明人: Hiroshige Hirano , Yukitoshi Ota
IPC分类号: H01L23/48
CPC分类号: H01L23/522 , H01L23/528 , H01L23/5286 , H01L27/0203 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes a first interconnect layer and a second interconnect layer provided above or under the first interconnect layer. The first interconnect layer includes a plurality of first interconnect blocks, and in each of the first interconnect blocks, a first interconnect has a first potential, and extends in at least two or more directions, and a second interconnect has a second potential, and extends in at least two or more directions. The second interconnect layer includes a third interconnect which electrically connects the first interconnect of one of a pair of adjacent first interconnect blocks and the first interconnect of the other of the pair of adjacent first interconnect blocks, and a fourth interconnect which electrically connects the second interconnect of one of the pair of adjacent first interconnect blocks and the second interconnect of the other of the pair of adjacent first interconnect blocks.
摘要翻译: 半导体器件包括设置在第一互连层上方或下方的第一互连层和第二互连层。 第一互连层包括多个第一互连块,并且在每个第一互连块中,第一互连具有第一电位,并且在至少两个或更多个方向上延伸,并且第二互连具有第二电位,并且延伸 在至少两个或更多个方向。 第二互连层包括第三互连,其将一对相邻的第一互连块中的一个的第一互连与该对相邻的第一互连块中的另一个的第一互连电连接,以及将第二互连电连接的第四互连 所述一对相邻的第一互连块中的一个和所述一对相邻的第一互连块中的另一个的所述第二互连。
-
公开(公告)号:US08421236B2
公开(公告)日:2013-04-16
申请号:US12976618
申请日:2010-12-22
申请人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou
发明人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou
IPC分类号: H01L23/48
CPC分类号: H01L24/05 , H01L23/522 , H01L2224/04042 , H01L2224/05093 , H01L2224/05554 , H01L2224/05556 , H01L2224/05558 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01082
摘要: A semiconductor device includes an electrode pad formed above a semiconductor substrate, and being a connecting portion for an external electrical connection; a multilayer body including a plurality of first interconnect layers formed in a plurality of insulating films stacked between the semiconductor substrate and the connecting portion and including an upper interconnect connected to the connecting portion, and a via configured to connect the first interconnect layers; a ring body formed in the plurality of insulating films to surround the multilayer body without interposing space, and including a plurality of second interconnect layers and at least one line via linearly connecting the second interconnect layers; and a lead line electrically connecting the connecting portion to an internal circuit. The multilayer body is connected to the ring body by at least one of the plurality of first interconnect layers. The lead line is connected to the ring body.
摘要翻译: 半导体器件包括形成在半导体衬底上的电极焊盘,并且是用于外部电连接的连接部分; 多层体,包括形成在所述半导体衬底和所述连接部之间的多个绝缘膜中的多个第一互连层,并且包括连接到所述连接部的上互连件,以及通孔,被配置为连接所述第一互连层; 形成在所述多个绝缘膜中的环体,以在不插入空间的情况下包围所述多层体,并且包括多个第二互连层和至少一条经由线连接所述第二互连层的线; 以及将连接部电连接到内部电路的引线。 多层体通过多个第一互连层中的至少一个连接到环体。 引线与环体连接。
-
公开(公告)号:US20100225005A1
公开(公告)日:2010-09-09
申请号:US12782360
申请日:2010-05-18
申请人: Taichi NISHIO , Hiroshige Hirano , Yukitoshi Ota
发明人: Taichi NISHIO , Hiroshige Hirano , Yukitoshi Ota
IPC分类号: H01L23/522
CPC分类号: H01L23/481 , H01L24/48 , H01L25/0657 , H01L2224/48227 , H01L2224/73207 , H01L2225/06513 , H01L2225/06541 , H01L2924/00014 , H01L2924/01004 , H01L2924/01327 , H01L2924/14 , H01L2924/3025 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: A semiconductor device includes a plurality of through vias extending through a substrate. The plurality of through vias are arranged dividedly in three or more via groups. Each of the via groups includes three or more of the through vias that are arranged in two dimensions.
摘要翻译: 半导体器件包括延伸穿过衬底的多个通孔。 多个贯通孔分成三个以上通孔组。 通孔组中的每一个包括三个或更多个以二维排列的通孔。
-
公开(公告)号:US08344515B2
公开(公告)日:2013-01-01
申请号:US12782360
申请日:2010-05-18
申请人: Taichi Nishio , Hiroshige Hirano , Yukitoshi Ota
发明人: Taichi Nishio , Hiroshige Hirano , Yukitoshi Ota
IPC分类号: H01L23/48
CPC分类号: H01L23/481 , H01L24/48 , H01L25/0657 , H01L2224/48227 , H01L2224/73207 , H01L2225/06513 , H01L2225/06541 , H01L2924/00014 , H01L2924/01004 , H01L2924/01327 , H01L2924/14 , H01L2924/3025 , H01L2924/00 , H01L2224/45099 , H01L2224/45015 , H01L2924/207
摘要: A semiconductor device includes a plurality of through vias extending through a substrate. The plurality of through vias are arranged dividedly in three or more via groups. Each of the via groups includes three or more of the through vias that are arranged in two dimensions.
摘要翻译: 半导体器件包括延伸穿过衬底的多个通孔。 多个贯通孔分成三个以上通孔组。 通孔组中的每一个包括三个或更多个以二维排列的通孔。
-
-
-
-
-
-
-
-
-