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    Method of using biochip with biosensors
    2.
    发明授权
    Method of using biochip with biosensors 有权

    公开(公告)号：US10989685B2

    公开(公告)日：2021-04-27

    申请号：US15913642

    申请日：2018-03-06

    申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

    发明人： Yi-Shao Liu ,  Chun-Wen Cheng ,  Chun-Ren Cheng

    IPC分类号： G01N27/414 ,  G03F7/20 ,  G03F7/00 ,  B01L3/00 ,  G01N33/543

    摘要： A method of sensing a biological sample includes introducing a fluid containing the biological sample through a first opening in a substrate. The method further includes passing the fluid from the first opening to a first cavity through at least one microfluidic channel. The method further includes repelling the biological sample from a first surface of the first cavity using a first surface modification layer. The method further includes attracting the biological sample to a sensing device using a plurality of modified surface patterns, wherein a first modified surface pattern of the plurality of modified surface patterns has different surface properties from a second modified surface pattern of the plurality of modified surface patterns. The method further includes outputting the fluid through a second opening in the substrate.

    Integrated electro-microfluidic probe card, system and method for using the same
    4.
    发明授权
    Integrated electro-microfluidic probe card, system and method for using the same 有权
    集成电微流体探针卡，系统及其使用方法

    公开(公告)号：US09523642B2

    公开(公告)日：2016-12-20

    申请号：US13673602

    申请日：2012-11-09

    申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

    发明人： Yi-Shao Liu ,  Fei-Lung Lai ,  Chun-Ren Cheng ,  Chun-Wen Cheng

    IPC分类号： G01N27/22 ,  G01N21/75 ,  G01N27/414 ,  B01L3/00 ,  B01L9/00 ,  G01N33/543 ,  G01N27/327

    CPC分类号： G01N27/4145 ,  B01L3/502707 ,  B01L9/527 ,  B01L2200/025 ,  B01L2200/027 ,  B01L2200/10 ,  B01L2200/143 ,  B01L2300/0645 ,  G01N21/75 ,  G01N27/3271 ,  G01N27/3275 ,  G01N33/5438 ,  Y10T29/49

    摘要： The present disclosure provides a biological field effect transistor (BioFET) device testing and processing methods, system and apparatus. A wafer-level bio-sensor processing tool includes a wafer stage, an integrated electro-microfluidic probe card, and a fluid supply and return. The integrated electro-microfluidic probe card includes a fluidic mount that may be transparent, a microfluidic channels in the fluidic mount, at least one microfluidic probe and a number of electronic probe tips at the bottom of the fluidic mount, fluidic and electronic input and output ports on the sides of the fluidic mount, and at least one handle lug on the fluidic mount. The method includes aligning a wafer, mounting the integrated electro-microfluidic probe card, flowing a test fluid, and measuring electrical properties. The tool may also be used for stamping or printing a fluid in the device area on the wafer.

    摘要翻译： 本公开提供了一种生物场效应晶体管（BioFET）器件的测试和处理方法，系统和装置。 晶片级生物传感器处理工具包括晶片台，集成电微流体探针卡和流体供应和返回。 集成的电微流体探针卡包括可以是透明的流体安装件，流体安装件中的微流体通道，至少一个微流体探针和在流体安装底部的多个电子探针尖端，流体和电子输入和输出 流体支架侧面上的端口以及流体支架上的至少一个手柄凸耳。 该方法包括对准晶片，安装集成电微流体探针卡，流动测试流体以及测量电气特性。 该工具还可用于在晶片的装置区域中冲压或印刷流体。

    Backside sensing bioFET with enhanced performance
    6.
    发明授权
    Backside sensing bioFET with enhanced performance 有权
    具有增强性能的背面感测bioFET

    公开(公告)号：US09389199B2

    公开(公告)日：2016-07-12

    申请号：US13905912

    申请日：2013-05-30

    申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

    发明人： Chun-Wen Cheng ,  Yi-Shao Liu ,  Fei-Lung Lai ,  Wei-Cheng Lin ,  Ta-Chuan Liao ,  Chien-Kuo Yang

    IPC分类号： G01N27/414

    CPC分类号： G01N27/4148 ,  G01N27/4145

    摘要： The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a substrate, a transistor structure having a treated layer adjacent to the channel region, an isolation layer, and a dielectric layer in an opening of the isolation layer on the treated layer. The dielectric layer and the treated layer are disposed on opposite side of the transistor from a gate structure. The treated layer may be a lightly doped channel layer or a depleted layer.

    摘要翻译： 本公开提供了生物场效应晶体管（BioFET）和制造BioFET器件的方法。 该方法包括使用与互补金属氧化物半导体（CMOS）工艺兼容或典型的一个或多个工艺步骤形成BioFET。 BioFET器件包括衬底，具有与沟道区相邻的处理层的晶体管结构，隔离层和处理层上的隔离层开口中的电介质层。 电介质层和处理层设置在晶体管的与栅极结构相反的一侧。 处理层可以是轻掺杂沟道层或耗尽层。

    METHOD FOR FORMING BIOCHIPS AND BIOCHIPS WITH NON-ORGANIC LANDINGS FOR IMPROVED THERMAL BUDGET
    7.
    发明申请
    METHOD FOR FORMING BIOCHIPS AND BIOCHIPS WITH NON-ORGANIC LANDINGS FOR IMPROVED THERMAL BUDGET 有权
    用于改善热量预算的生物化学和生物化学方法与非有机土地的形成

    公开(公告)号：US20140273281A1

    公开(公告)日：2014-09-18

    申请号：US13801182

    申请日：2013-03-13

    申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

    发明人： Chia-Hua Chu ,  Allen Timothy Chang ,  Ching-Ray Chen ,  Yi-Hsien Chang ,  Yi-Shao Liu ,  Chun-Ren Cheng ,  Chun-Wen Cheng

    IPC分类号： G01N33/543

    CPC分类号： G01N33/54386 ,  H01L21/00 ,  H01L2224/18

    摘要： The present disclosure provides biochips and methods of fabricating biochips. The method includes combining three portions: a transparent substrate, a first substrate with microfluidic channels therein, and a second substrate. Through-holes for inlet and outlet are formed in the transparent substrate or the second substrate. Various non-organic landings with support medium for bio-materials to attach are formed on the first substrate and the second substrate before they are combined. In other embodiments, the microfluidic channel is formed of an adhesion layer between a transparent substrate and a second substrate with landings on the substrates.

    摘要翻译： 本公开提供了生物芯片和制造生物芯片的方法。 该方法包括组合三个部分：透明衬底，其中具有微流体通道的第一衬底和第二衬底。 用于入口和出口的通孔形成在透明基板或第二基板中。 在组合之前，在第一基板和第二基板上形成具有用于附着生物材料的支撑介质的各种非有机着陆。 在其他实施例中，微流体通道由透明基板和第二基板之间的粘合层形成，在基板上具有着陆。

    Backside Sensing BioFET with Enhanced Performance
    10.
    发明申请
    Backside Sensing BioFET with Enhanced Performance 审中-公开
    具有增强性能的背面感应BioFET

    公开(公告)号：US20160320337A1

    公开(公告)日：2016-11-03

    申请号：US15207288

    申请日：2016-07-11

    申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

    发明人： Chun-Wen Cheng ,  Yi-Shao Liu ,  Fei-Lung Lai ,  Wei-Cheng Lin ,  Ta-Chuan Liao ,  Chien-Kuo Yang

    IPC分类号： G01N27/414

    CPC分类号： G01N27/4148 ,  G01N27/4145

    摘要： The present disclosure provides a bio-field effect transistor (BioFET) and a method of fabricating a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a substrate, a transistor structure having a treated layer adjacent to the channel region, an isolation layer, and a dielectric layer in an opening of the isolation layer on the treated layer. The dielectric layer and the treated layer are disposed on opposite side of the transistor from a gate structure. The treated layer may be a lightly doped channel layer or a depleted layer.

    摘要翻译： 本公开提供了生物场效应晶体管（BioFET）和制造BioFET器件的方法。 该方法包括使用与互补金属氧化物半导体（CMOS）工艺兼容或典型的一个或多个工艺步骤形成BioFET。 BioFET器件包括衬底，具有与沟道区相邻的处理层的晶体管结构，隔离层和处理层上的隔离层开口中的电介质层。 电介质层和处理层设置在晶体管的与栅极结构相反的一侧。 处理层可以是轻掺杂沟道层或耗尽层。