公开(公告)号：US12298270B2

公开(公告)日：2025-05-13

申请号：US18232318

申请日：2023-08-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Tsun Chen ,  Allen Timothy Chang ,  Jui-Cheng Huang

IPC: G01N27/414 ,  B01L3/00

Abstract: In an embodiment, a device includes: an electrode configured to change a contact angle of a liquid droplet above the electrode when a first voltage is applied to the electrode; a sensing film overlaying the electrode, wherein the electrode is configured for assessment of a state of the liquid droplet based on a second voltage sensed at the electrode; a reference electrode above the electrode, the reference electrode configured to provide a reference voltage; and a microfluidic channel between the electrode and the reference electrode, wherein the microfluidic channel is configured to manipulate the liquid droplet using the electrode.

公开(公告)号：US11860121B2

公开(公告)日：2024-01-02

申请号：US17884382

申请日：2022-08-09

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun Chen ,  Yi-Hsing Hsiao ,  Jui-Cheng Huang ,  Yu-Jie Huang

IPC: G01N27/414 ,  G01N33/569 ,  H01L21/762

CPC classification number: G01N27/4148 ,  G01N27/4145 ,  G01N33/56966 ,  H01L21/76251

Abstract: An IC includes a source region and a drain region in a semiconductor layer. A channel region is between the source region and the drain region. A sensing well is on a back surface of the semiconductor layer and over the channel region. An interconnect structure is on a front surface of the semiconductor layer opposite the back surface of the semiconductor layer. A biosensing film lines the sensing well and contacts a bottom surface of the sensing well that is defined by the semiconductor layer. A coating of selective binding agent is over the biosensing film and configured to bind with a cardiac cell.

公开(公告)号：US11614422B2

公开(公告)日：2023-03-28

申请号：US17135508

申请日：2020-12-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Jie Huang ,  Jui-Cheng Huang ,  Cheng-Hsiang Hsieh

IPC: G01N27/414

Abstract: A biologically sensitive field effect transistor includes a substrate, a first control gate and a second control gate. The substrate has a first side and a second side opposite to the first side, a source region and a drain region. The first control gate is disposed on the first side of the substrate. The second control gate is disposed on the second side of the substrate. The second control gate includes a sensing film disposed on the second side of the substrate. A voltage biasing between the source region and the second control gate is smaller than a threshold voltage of the second control gate.

公开(公告)号：US11360045B2

公开(公告)日：2022-06-14

申请号：US16441672

申请日：2019-06-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Tsung-Tsun Chen ,  Allen Timothy Chang ,  Jui-Cheng Huang

IPC: G01N27/414 ,  B01L3/00

Abstract: In an embodiment, a device includes: an electrode configured to change a contact angle of a liquid droplet above the electrode when a first voltage is applied to the electrode; a sensing film overlaying the electrode, wherein the electrode is configured for assessment of a state of the liquid droplet based on a second voltage sensed at the electrode; a reference electrode above the electrode, the reference electrode configured to provide a reference voltage; and a microfluidic channel between the electrode and the reference electrode, wherein the microfluidic channel is configured to manipulate the liquid droplet using the electrode.

公开(公告)号：US20190145927A1

公开(公告)日：2019-05-16

申请号：US16227646

申请日：2018-12-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Jie HUANG ,  Jui-Cheng Huang ,  Cheng-Hsiang Hsieh

IPC: G01N27/414

Abstract: A biologically sensitive field effect transistor includes a substrate, a first control gate and a second control gate. The substrate has a first side and a second side opposite to the first side, a source region and a drain region. The first control gate is disposed on the first side of the substrate. The second control gate is disposed on the second side of the substrate. The second control gate includes a sensing film disposed on the second side of the substrate. A voltage biasing between the source region and the second control gate is smaller than a threshold voltage of the second control gate.

公开(公告)号：US10139364B2

公开(公告)日：2018-11-27

申请号：US15492548

申请日：2017-04-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd

Inventor： Yi-Shao Liu ,  Jui-Cheng Huang ,  Tung-Tsun Chen

IPC: H01L27/14 ,  G01N27/414 ,  H01L23/34 ,  H01L27/085 ,  H01L27/16 ,  H01L27/02

Abstract: A device layer of an integrated circuit device includes a semiconductor active layer spanning a plurality of device regions. Each of the device regions has a heating element, a temperature sensor, and bioFETs in the device layer. The bioFETs have source/drain regions and channel regions in the semiconductor active layer and fluid gates exposed on a surface for fluid interfacing on one side of the device layer. A multilayer metal interconnect structure is disposed on the opposite side of the device layer. This structure places the heating elements in proximity to the fluid gates enabling localized heating, precision heating, and multiplexed temperature control for multiplexed bio-sensing applications.

公开(公告)号：US20170363704A1

公开(公告)日：2017-12-21

申请号：US15691296

申请日：2017-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chin-Hua WEN ,  Jui-Cheng Huang ,  Yi-Shao Liu ,  Chun-Wen Cheng ,  Tung-Tsun Chen

IPC: G01R35/00 ,  G01N27/414

CPC classification number: G01R35/00 ,  G01N27/4145

Abstract: A device includes a first biosensor of a biosensor array; a second biosensor of a biosensor array; a readout circuit electrically connected to the biosensor array; a decoder electrically connected to the biosensor array; a voltage generator electrically connected to the biosensor array; and a decision system electrically connected to the voltage generator and the readout circuit.

公开(公告)号：US20160334362A1

公开(公告)日：2016-11-17

申请号：US14713543

申请日：2015-05-15

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Shao Liu ,  Jui-Cheng Huang ,  Tung-Tsun Chen

IPC: G01N27/414 ,  H01L27/02 ,  H01L27/085 ,  H01L23/34 ,  H01L23/522

CPC classification number: G01N27/4148 ,  G01N27/4145 ,  H01L23/345 ,  H01L27/0211 ,  H01L27/085 ,  H01L27/16

Abstract: A device layer of an integrated circuit device includes a semiconductor active layer spanning a plurality of device regions. Each of the device regions has a heating element, a temperature sensor, and bioFETs in the device layer. The bioFETs have source/drain regions and channel regions in the semiconductor active layer and fluid gates exposed on a surface for fluid interfacing on one side of the device layer. A multilayer metal interconnect structure is disposed on the opposite side of the device layer. This structure places the heating elements in proximity to the fluid gates enabling localized heating, precision heating, and multiplexed temperature control for multiplexed bio-sensing applications.

Abstract translation: 集成电路器件的器件层包括跨越多个器件区域的半导体有源层。 每个器件区域在器件层中具有加热元件，温度传感器和bioFET。 生物FET在半导体有源层中具有源极/漏极区域和沟道区域，并且暴露在表面上的流体栅极用于在器件层的一侧上进行流体接口。 多层金属互连结构设置在器件层的相对侧上。 该结构将加热元件放置在靠近流体浇口处，从而能够进行局部加热，精确加热和多路复用生物传感应用的多路温度控制。

公开(公告)号：US11970688B2

公开(公告)日：2024-04-30

申请号：US16944140

申请日：2020-07-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Hsing Hsiao ,  Jui-Cheng Huang

IPC: C12M1/34 ,  C12M1/00 ,  C12M3/00 ,  C12M3/06 ,  C12N5/00 ,  G01N33/50

CPC classification number: C12M41/38 ,  C12M21/08 ,  C12M23/16 ,  C12M23/38 ,  C12N5/0062 ,  G01N33/5005 ,  C12N2513/00

Abstract: Cell monitoring apparatus includes sensing chip and channel module. Sensing chip includes channel region, source and drain regions, and sensing film. The channel region includes first semiconductor material. The source and drain regions are disposed at opposite sides of the channel region, and include a second semiconductor material. Sensing film is disposed on the channel region at a sensing surface of the sensing chip. Channel module is disposed on the sensing surface of sensing chip. A microfluidic channel is formed between the sensing surface of the sensing chip and a proximal surface of the channel module. The microfluidic channel includes a culture chamber and a micro-well. The culture chamber is concave into the proximal surface of the channel module, and overlies the channel region. The micro-well is concave into a side of the culture chamber, and directly faces the sensing film.

公开(公告)号：US11860120B2

公开(公告)日：2024-01-02

申请号：US17007973

申请日：2020-08-31

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Tung-Tsun Chen ,  Yi-Hsing Hsiao ,  Jui-Cheng Huang ,  Yu-Jie Huang

IPC: G01N27/414 ,  G01N33/569 ,  H01L21/762

CPC classification number: G01N27/4148 ,  G01N27/4145 ,  G01N33/56966 ,  H01L21/76251

Abstract: An IC includes a source region and a drain region in a semiconductor layer. A channel region is between the source region and the drain region. A sensing well is on a back surface of the semiconductor layer and over the channel region. An interconnect structure is on a front surface of the semiconductor layer opposite the back surface of the semiconductor layer. A biosensing film lines the sensing well and contacts a bottom surface of the sensing well that is defined by the semiconductor layer. A coating of selective binding agent is over the biosensing film and configured to bind with a cardiac cell.