METHODS AND APPARATUS TO THERMALLY ACTUATE MICROELECTROMECHANICAL STRUCTURES DEVICES

    公开(公告)号:US20230068451A1

    公开(公告)日:2023-03-02

    申请号:US17461235

    申请日:2021-08-30

    IPC分类号: H01H37/32 H01H37/04 H01H37/64

    摘要: An example microelectromechanical structures (MEMS) switch includes a body having a first end and a second end opposite the first end. The body extends from a base at the first end and has a first width. The MEMS switch further includes a bridge extending laterally from the body at the second end, and a spine extending between the bridge and the base. The spine has a second width smaller than the first width. At least one of the spine or the body includes a first material with a first thermal coefficient and a second material with a second thermal coefficient different from the first thermal coefficient.

    BAW resonator based pressure sensor

    公开(公告)号:US10985729B2

    公开(公告)日:2021-04-20

    申请号:US16235512

    申请日:2018-12-28

    摘要: A pressure sensor apparatus is disclosed. The pressure sensor apparatus includes a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, a sensor BAW resonator and a reference BAW resonator disposed on the die interface side of the BAW die, a control circuit die coupled to the die interface side of the BAW die via an attachment layer, and an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator, the extended opening being configured to translate an external pressure on the pressure contact side onto the sensor BAW resonator.

    Beating High-Q Resonators Oscillator
    7.
    发明申请

    公开(公告)号:US20190068198A1

    公开(公告)日:2019-02-28

    申请号:US15690144

    申请日:2017-08-29

    摘要: Methods and systems for producing a low-power, low-phase noise oscillating signal using a self-injection locking oscillator. Preferred embodiments include, for example, producing, using an oscillator, a signal having a base frequency component, an Mth harmonic component and a Pth harmonic component, wherein M and P are selected integers and M>P>1; filtering said signal through one or more bandpass filters comprising at least two resonators, said filters having Q factor ≥5, said filters configured to pass said Mth and Pth harmonic components; multiplying said filtered Mth and Pth harmonic components together to produce a multiplied signal, and filtering said multiplied signal using a low pass filter to pass a difference between said filtered Mth and Pth harmonic components, said difference comprising a filtered beat frequency waveform; and injecting said filtered beat frequency waveform into said oscillator to thereby injection lock said signal to said filtered beat frequency waveform.