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    MANUFACTURING METHOD OF IMAGE SENSOR
    1.
    发明公开
    MANUFACTURING METHOD OF IMAGE SENSOR 审中-公开

    公开(公告)号：US20230361150A1

    公开(公告)日：2023-11-09

    申请号：US18130014

    申请日：2023-04-03

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Hyeyeon Park ,  Boseong Kim ,  Yunki Lee

    IPC: H01L27/146

    CPC classification number: H01L27/14685 ,  H01L27/14621 ,  H01L27/14607

    Abstract: A manufacturing method of an image sensor includes, operations of: forming a color filter layer over a plurality of pixel regions having a plurality of photodetectors and arranged in a matrix on a substrate, and patterning the color filter layer with a mask including patterns disposed adjacently in a diagonal direction of the matrix, to form color filters for some of the plurality of pixel regions on the substrate. Each of the patterns may include a rectangular main pattern and sub-patterns outwardly extending from corners of the main patterns. Sizes of sub-patterns of different adjacent patterns that face each other may have sizes that are smaller than other sub-patterns of the adjacent patterns.

    IMAGE SENSOR
    2.
    发明申请
    IMAGE SENSOR 有权

    公开(公告)号：US20220406836A1

    公开(公告)日：2022-12-22

    申请号：US17672912

    申请日：2022-02-16

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Taehan Kim ,  Cheonho Park ,  Jaeho Choi ,  Bumsuk Kim ,  Jungsaeng Kim ,  Yunki Lee

    IPC: H01L27/146

    Abstract: An image sensor includes a pixel array including a plurality of pixels arranged in directions, parallel to an upper surface of a substrate, each of the plurality of pixels including at least one photodiode, a color filter above the at least one photodiode, and a pixel circuit below the at least one photodiode, and a logic circuit configured to obtain a pixel signal from the plurality of pixels. The plurality of pixels include red pixels each having a red color filter, green pixels each having a green color filter, and blue pixels each having a blue color filter, and a size of a first red color filter included in a first red pixel, disposed in a first area separated by a first distance from a center of the pixel array, is greater than a size of a second red color filter included in a second red pixel, disposed in a second area separated from the center of the pixel array by a second distance, greater than the first distance.

    Image sensor
    3.
    发明授权
    Image sensor 有权

    公开(公告)号：US12191331B2

    公开(公告)日：2025-01-07

    申请号：US18319101

    申请日：2023-05-17

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Masato Fujita ,  Yunki Lee ,  Eunsub Shim ,  Kyungho Lee ,  Bumsuk Kim ,  Taehan Kim

    IPC: H01L27/146 ,  H04N25/59 ,  H04N25/704 ,  H04N25/709 ,  H04N25/772

    Abstract: An image sensor includes a first photodiode group, a second photodiode group, a first transfer transistor group, a second transfer transistor group, a floating diffusion region of a substrate in which electric charges generated in the first photodiode group are stored, and a power supply node for applying a power supply voltage to the second photodiode group. A barrier voltage is applied to at least one transfer transistor of the second transfer transistor group. The power supply voltage allows electric charges, generated in the second photodiode group, to migrate to the power supply node, and the barrier voltage forms a potential barrier between the second photodiode group and the floating diffusion region.

    PIXEL ARRAY OF IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME
    4.
    发明申请
    PIXEL ARRAY OF IMAGE SENSOR AND METHOD OF MANUFACTURING THE SAME 有权

    公开(公告)号：US20220384508A1

    公开(公告)日：2022-12-01

    申请号：US17703217

    申请日：2022-03-24

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Dongmin Keum ,  Taehan Kim ,  Bumsuk Kim ,  Junsung Park ,  Kwanghee Lee ,  Yunki Lee

    IPC: H01L27/146 ,  H01L21/66 ,  H04N5/369 ,  H04N5/341

    Abstract: A pixel array of an image sensor includes a plurality of pixel groups. Each pixel group includes a plurality of unit pixels adjacent to each other and respectively including photoelectric conversion elements disposed in a semiconductor substrate, a color filter shared by the plurality of unit pixels, and a plurality of microlenses disposed on the color filter and having sizes different from each other such that the plurality of microlenses respectively focus an incident light to the photoelectric conversion elements included in the plurality of unit pixels. Deviations of sensing sensitivity of unit pixels are reduced and quality of images captured by the image sensor is enhanced by adjusting sizes of microlenses.

    IMAGE SENSOR INCLUDING AUTO-FOCUS PIXELS
    5.
    发明申请
    IMAGE SENSOR INCLUDING AUTO-FOCUS PIXELS 有权

    公开(公告)号：US20220181372A1

    公开(公告)日：2022-06-09

    申请号：US17507374

    申请日：2021-10-21

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Taesung LEE ,  Dongmin Keum ,  Bumsuk Kim ,  Jinho Kim ,  Junsung Park ,  Kwanghee Lee ,  Dongkyu Lee ,  Yunki Lee

    IPC: H01L27/146 ,  H04N5/232

    Abstract: An image sensor includes a normal pixel, a first auto-focus (AF) pixel, and a second AF pixel, each of the normal pixel, the first AF pixel and the second AF pixel including a photodiode. The image sensor further includes a normal microlens disposed on the normal pixel, and a first AF microlens disposed on the first AF pixel and the second AF pixel. The photodiode of the normal pixel, the photodiode of the first AF pixel, and the photodiode of the second AF pixel are respectively disposed in photo-detecting areas of a semiconductor substrate. A height of the first AF microlens in a vertical direction from a top surface of the semiconductor substrate is greater than a height of the normal microlens in the vertical direction from the top surface of the semiconductor substrate.

    Pixel array and an image sensor including the same
    6.
    发明授权
    Pixel array and an image sensor including the same 有权

    公开(公告)号：US12302659B2

    公开(公告)日：2025-05-13

    申请号：US17402756

    申请日：2021-08-16

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Jonghoon Park ,  Bumsuk Kim ,  Yunki Lee ,  Bomi Kim ,  Kwanhee Lee ,  Yoongi Joung

    IPC: H01L23/58 ,  H10F39/00 ,  H10F39/18 ,  H04N25/71 ,  H04N25/75 ,  H04N25/77

    Abstract: A pixel array including: a plurality of pixel groups, each pixel group including: a plurality of unit pixels respectively including photoelectric conversion elements disposed in a semiconductor substrate; trench structures disposed in the semiconductor substrate and extending in a vertical direction from a first surface of the semiconductor substrate to a second surface of the semiconductor substrate to electrically and optically separate the photoelectric conversion elements from each other; and a microlens disposed above or below the semiconductor substrate, the microlens covering all of the photoelectric conversion elements in the plurality of unit pixels to focus an incident light to the photoelectric conversion elements.

    Image sensor including a double-sided spherical lens
    7.
    发明授权
    Image sensor including a double-sided spherical lens 有权

    公开(公告)号：US11552118B2

    公开(公告)日：2023-01-10

    申请号：US16945965

    申请日：2020-08-03

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Sanghoon Kim ,  Yunki Lee ,  Hyeongdong Jo

    IPC: H01L27/146 ,  G01J1/04 ,  G01J1/44 ,  G02B5/20 ,  G02B3/00

    Abstract: An image sensor including: a substrate which has a first surface and a second surface opposite to the first surface and pixels arranged in a two-dimensional array, wherein each of the pixels includes a photodiode; a multi-wiring layer arranged on the first surface of the substrate; a color filter layer arranged on the second surface of the substrate and including color filters that respectively correspond to the pixels; and a lens layer arranged on the color filter layer and including a double-sided spherical lens, wherein the double-sided spherical lens includes at least two material layers having different refractive indexes.

    IMAGE SENSOR, AND ELECTRONIC DEVICE COMPRISING THE IMAGE SENSOR
    9.
    发明公开
    IMAGE SENSOR, AND ELECTRONIC DEVICE COMPRISING THE IMAGE SENSOR 审中-公开

    公开(公告)号：US20240055455A1

    公开(公告)日：2024-02-15

    申请号：US18207546

    申请日：2023-06-08

    Applicant: SAMSUNG ELECTRONICS CO., LTD.

    Inventor： Junghun Kim ,  Chulsoo Choi ,  Jonghoon Park ,  Yunki Lee

    IPC: H01L27/146 ,  G02B3/08

    CPC classification number: H01L27/14627 ,  H01L27/14685 ,  H01L27/14645 ,  G02B3/08 ,  G02B2207/101

    Abstract: An image sensor is provided. The image sensor includes: a photodetector with a plurality of photodetection cells; an interlayer device provided on the photodetector; and a color separation lens layer including a plurality of nano-posts disposed on the interlayer device and spaced apart from each other, the plurality of nano-posts focusing light of different spectra to at least two of the plurality of photodetection cells. Each of the plurality of nano-posts includes a first refractive layer having a first refractive index and a cylindrical shape, and a second refractive layer having a second refractive index and surrounding bottom and side surfaces of the first refractive layer, and the second refractive index is higher than the first refractive index.

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