公开(公告)号：US10008535B2

公开(公告)日：2018-06-26

申请号：US15090883

申请日：2016-04-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seokha Lee ,  Kyungah Jeon ,  Yunki Lee

IPC: H01L27/146

CPC classification number: H01L27/14643 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/1463 ,  H01L27/1464 ,  H01L27/14689

Abstract: An image sensor includes a substrate including a plurality of photoelectric conversion parts and a pixel isolation trench extending from a surface of the substrate between the photoelectric conversion parts, a first fixed charge film directly on the surface of the substrate, a second fixed charge film directly on the first fixed charge film and an inner wall of the pixel isolation trench, and an insulating layer directly on the second fixed charge film, the insulating layer configured to fill the pixel isolation trench.