公开(公告)号：US20220278121A1

公开(公告)日：2022-09-01

申请号：US17748261

申请日：2022-05-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Junsoo Kim ,  Hui-Jung Kim ,  Bong-Soo Kim ,  Satoru Yamada ,  Kyupil Lee ,  Sunghee Han ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/11556 ,  H01L23/532 ,  G11C7/18 ,  H01L49/02 ,  G11C8/14 ,  H01L27/11524

Abstract: A semiconductor memory device includes a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also includes a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer includes semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.

公开(公告)号：US11616065B2

公开(公告)日：2023-03-28

申请号：US17090419

申请日：2020-11-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Kiseok Lee ,  Bong-Soo Kim ,  Junsoo Kim ,  Dongsoo Woo ,  Kyupil Lee ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/06 ,  H01L49/02

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

公开(公告)号：US10861854B2

公开(公告)日：2020-12-08

申请号：US16707019

申请日：2019-12-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Kiseok Lee ,  Bong-Soo Kim ,  Junsoo Kim ,  Dongsoo Woo ,  Kyupil Lee ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/06 ,  H01L49/02

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

公开(公告)号：US10535659B2

公开(公告)日：2020-01-14

申请号：US16038052

申请日：2018-07-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jiyoung Kim ,  Kiseok Lee ,  Bong-Soo Kim ,  Junsoo Kim ,  Dongsoo Woo ,  Kyupil Lee ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L27/06 ,  H01L49/02

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

公开(公告)号：US11844212B2

公开(公告)日：2023-12-12

申请号：US17748261

申请日：2022-05-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Junsoo Kim ,  Hui-Jung Kim ,  Bong-Soo Kim ,  Satoru Yamada ,  Kyupil Lee ,  Sunghee Han ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H10B41/27 ,  H01L23/532 ,  G11C7/18 ,  G11C8/14 ,  H10B41/35 ,  G11C11/404 ,  G11C11/4097 ,  H01L49/02

CPC classification number: H10B41/27 ,  G11C7/18 ,  G11C8/14 ,  H01L23/53295 ,  H01L28/60 ,  H10B41/35 ,  G11C11/404 ,  G11C11/4097

Abstract: A semiconductor memory device includes a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also includes a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer includes semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.

公开(公告)号：US11355509B2

公开(公告)日：2022-06-07

申请号：US17000857

申请日：2020-08-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Junsoo Kim ,  Hui-Jung Kim ,  Bong-Soo Kim ,  Satoru Yamada ,  Kyupil Lee ,  Sunghee Han ,  Hyeongsun Hong ,  Yoosang Hwang

IPC: H01L27/11556 ,  H01L23/532 ,  G11C7/18 ,  H01L49/02 ,  G11C8/14 ,  H01L27/11524 ,  G11C11/404 ,  G11C11/4097

Abstract: A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.

公开(公告)号：US10784272B2

公开(公告)日：2020-09-22

申请号：US16027887

申请日：2018-07-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Junsoo Kim ,  Hui-Jung Kim ,  Bong-Soo Kim ,  Satoru Yamada ,  Kyupil Lee ,  Sunghee Han ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/11556 ,  H01L23/532 ,  G11C7/18 ,  H01L49/02 ,  G11C8/14 ,  H01L27/11524 ,  G11C11/404 ,  G11C11/4097

Abstract: A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.