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1.发明申请MULTI-FUNCTIONAL APPARATUS FOR TESTING AND ETCHING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME 审中-公开用于测试和蚀刻基板和基板处理装置的多功能装置公开(公告)号：US20140182785A1
公开(公告)日：2014-07-03
申请号：US13902698
申请日：2013-05-24
Applicant: Samsung Display Co., Ltd.
Inventor： Sung-Hwan Kim , Sang-Su Kim , Byoung-Seong Jeong , Je-Hyun Song , Tae-Hun Lee , Sung-Won Yang , Tae-Hyung Kim
IPC: B29C59/14
CPC classification number: B23K26/70 , B23K26/032 , B23K26/0823 , B23K26/083 , B23K26/0876 , B23K26/123 , B23K26/361 , B23K31/10 , B23K2103/30 , B23K2103/50 , G09G3/006 , G09G3/3208 , H01L21/67069 , H01L21/76894 , H01L22/12 , H01L51/56
Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.
Abstract translation: 一种用于测试和蚀刻基板的多功能设备，其能够通过在相同的室主体中进行测试和蚀刻操作来提高空间效率和制造效率，以及包括其的基板处理设备，所述多功能设备包括具有 基板在其一侧注入基板的入口和基板在其另一侧排出的出口; 传送单元，设置在所述室主体的内部，并用于沿着从所述入口到所述出口的方向传送所述注入的基板; 激光蚀刻单元，设置在所述转印单元的上部并用于蚀刻设置在所述转印单元上的所述基板的一部分; 以及用于测试设置在转印单元上的基板的测试单元。
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公开(公告)号：US09001487B2
公开(公告)日：2015-04-07
申请号：US14053976
申请日：2013-10-15
Applicant: Samsung Display Co., Ltd.
Inventor： Sang-Su Kim
Abstract: An ionizer includes an electrode shaft, a fixing bar, a driver, and a controller. The electrode shaft includes first and second electrode rows, the first electrode row having a plurality of ionizer electrodes arranged in a first direction and the second electrode row having a plurality of ionizer electrodes arranged in the first direction and spaced apart from the first electrode row. The fixing bar includes a discharge area facing an object to be processed, and accommodates the electrode shaft so a single electrode row is disposed in the discharge area. The driver is inside the fixing bar so as to be coupled to both end portions of the electrode shaft, and controls a position of the electrode shaft. The controller controls the driver to replace the electrode row disposed in the discharge area with another electrode row according to a previously input replacement condition.
Abstract translation: 电离器包括电极轴，固定杆，驱动器和控制器。 电极轴包括第一电极列和第二电极列，第一电极列具有沿第一方向布置的多个电离电极电极，第二电极列具有沿第一方向布置并与第一电极列间隔开的多个电离电极电极。 固定杆包括面向待处理物体的排出区域，并且容纳电极轴，使得在排出区域中设置单个电极排。 驱动器位于固定杆的内部，以便连接到电极轴的两个端部，并且控制电极轴的位置。 控制器控制驱动器根据先前输入的替换条件将布置在放电区域中的电极行替换为另一电极行。
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Patent Agency Ranking
3.发明授权公开(公告)号：US08962360B2
公开(公告)日：2015-02-24
申请号：US14032152
申请日：2013-09-19
Applicant: Samsung Display Co., Ltd.
Inventor： Yun-Ho Chang , Jong-Won Hong , Sang-Su Kim
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/50 , H01L51/0011
Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.
Abstract translation: 有机层沉积设备包括：输送单元，包括转印单元，第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元，其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元，用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元，其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动，并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。
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4.发明申请公开(公告)号：US20140370633A1
公开(公告)日：2014-12-18
申请号：US14032152
申请日：2013-09-19
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Yun-Ho Chang , Jong-Won Hong , Sang-Su Kim
IPC: H01L51/56
CPC classification number: H01L51/56 , C23C14/042 , C23C14/12 , C23C14/50 , H01L51/0011
Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.
Abstract translation: 有机层沉积设备包括：输送单元，包括转印单元，第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元，其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元，用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元，其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动，并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。
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公开(公告)号：US10137533B2
公开(公告)日：2018-11-27
申请号：US15156194
申请日：2016-05-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sung-Hwan Kim , Sang-Su Kim , Byoung-Seong Jeong , Je-Hyun Song , Tae-Hun Lee , Sung-Won Yang , Tae-Hyung Kim
IPC: C03C15/00 , B23K26/70 , H01L21/768 , G09G3/00 , B23K26/03 , B23K26/08 , B23K26/12 , B23K31/10 , H01L21/67 , H01L21/66 , H01L51/56 , B23K26/361 , B23K103/00 , G09G3/3208
Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.
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6.发明申请MULTI-FUNCTIONAL APPARATUS FOR TESTING AND ETCHING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME 审中-公开用于测试和蚀刻基板和基板处理装置的多功能装置公开(公告)号：US20160256960A1
公开(公告)日：2016-09-08
申请号：US15156194
申请日：2016-05-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor： Sung-Hwan Kim , Sang-Su Kim , Byoung-Seong Jeong , Je-Hyun Song , Tae-Hun Lee , Sung-Won Yang , Tae-Hyung Kim
CPC classification number: B23K26/70 , B23K26/032 , B23K26/0823 , B23K26/083 , B23K26/0876 , B23K26/123 , B23K26/361 , B23K31/10 , B23K2103/30 , B23K2103/50 , G09G3/006 , G09G3/3208 , H01L21/67069 , H01L21/76894 , H01L22/12 , H01L51/56
Abstract: A multi-functional apparatus for testing and etching a substrate capable of increasing spatial efficiency and manufacturing efficiency by performing testing and etching operations in a same chamber body and a substrate processing apparatus including the same, the multi-functional apparatus including a chamber body having an entrance into which the substrate is injected in one of its sides and an exit from which the substrate is ejected in another one of its sides; a transfer unit disposed inside of the chamber body and for transferring the injected substrate in a direction from the entrance to the exit; a laser etching unit disposed on an upper portion of the transfer unit and for etching a part of the substrate disposed on the transfer unit; and a testing unit for testing the substrate disposed on the transfer unit.
Abstract translation: 一种用于测试和蚀刻基板的多功能设备，其能够通过在相同的室主体中进行测试和蚀刻操作来提高空间效率和制造效率，以及包括其的基板处理设备，所述多功能设备包括具有 基板在其一侧注入基板的入口和基板在其另一侧排出的出口; 传送单元，设置在所述室主体的内部，并用于沿着从所述入口到所述出口的方向传送所述注入的基板; 激光蚀刻单元，设置在所述转印单元的上部并用于蚀刻设置在所述转印单元上的所述基板的一部分; 以及用于测试设置在转印单元上的基板的测试单元。
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7.发明授权公开(公告)号：US09048460B2
公开(公告)日：2015-06-02
申请号：US14044512
申请日：2013-10-02
Applicant: Samsung Display Co., Ltd.
Inventor： Tae-Hun Lee , Byoung-Seong Jeong , Sang-Su Kim , Eun-Gook Sung , Sung-Hwan Kim , Sung-Won Yang , Je-Hyun Song , Tae-Hyung Kim
CPC classification number: H01L51/56 , C23C14/24 , C23C14/243 , C23C14/50 , C23C14/546 , C23C14/568 , H01L51/52
Abstract: A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit to which a substrate is detachably fixed. A conveyer unit conveys the moving unit in a first direction or in an opposite direction to the first direction. A deposition unit includes at least one deposition assembly for depositing a deposition material on the substrate. A discharge data acquisition unit acquires data associated with the amount of the deposition material discharged per unit time from the at least one deposition assembly. A transmission unit transmits the data acquired by the discharge data acquisition unit.
Abstract translation: 沉积装置能够实时检查形成的薄层的厚度或均匀性。 沉积设备包括可拆卸地固定基板的移动单元。 输送单元沿第一方向或与第一方向相反的方向输送移动单元。 沉积单元包括至少一个用于在基底上沉积沉积材料的沉积组件。 放电数据获取单元从至少一个沉积组件获取与每单位时间排出的沉积材料的量相关联的数据。 发送单元发送由排出数据获取单元获取的数据。
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