公开(公告)号：US09048460B2

公开(公告)日：2015-06-02

申请号：US14044512

申请日：2013-10-02

Applicant: Samsung Display Co., Ltd.

Inventor： Tae-Hun Lee ,  Byoung-Seong Jeong ,  Sang-Su Kim ,  Eun-Gook Sung ,  Sung-Hwan Kim ,  Sung-Won Yang ,  Je-Hyun Song ,  Tae-Hyung Kim

IPC: H01L35/24 ,  H01L51/00 ,  H01L51/56 ,  C23C14/24 ,  C23C14/50 ,  C23C14/54 ,  C23C14/56 ,  H01L51/52

CPC classification number: H01L51/56 ,  C23C14/24 ,  C23C14/243 ,  C23C14/50 ,  C23C14/546 ,  C23C14/568 ,  H01L51/52

Abstract: A deposition apparatus is capable of checking, in real time, the thickness or uniformity of a thin layer which is formed. The deposition apparatus includes a moving unit to which a substrate is detachably fixed. A conveyer unit conveys the moving unit in a first direction or in an opposite direction to the first direction. A deposition unit includes at least one deposition assembly for depositing a deposition material on the substrate. A discharge data acquisition unit acquires data associated with the amount of the deposition material discharged per unit time from the at least one deposition assembly. A transmission unit transmits the data acquired by the discharge data acquisition unit.

Abstract translation: 沉积装置能够实时检查形成的薄层的厚度或均匀性。 沉积设备包括可拆卸地固定基板的移动单元。 输送单元沿第一方向或与第一方向相反的方向输送移动单元。 沉积单元包括至少一个用于在基底上沉积沉积材料的沉积组件。 放电数据获取单元从至少一个沉积组件获取与每单位时间排出的沉积材料的量相关联的数据。 发送单元发送由排出数据获取单元获取的数据。