ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
    1.
    发明申请
    ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS BY USING THE SAME, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD 有权
    有机层沉积装置,使用其的有机发光显示装置的制造方法以及由该方法制造的有机发光显示装置

    公开(公告)号:US20140131667A1

    公开(公告)日:2014-05-15

    申请号:US13797831

    申请日:2013-03-12

    Inventor: Yun-Ho Chang

    Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured by the method, and more particularly, an organic layer deposition apparatus that is suitable for use in the mass production of a large substrate, that enables high-definition patterning, and that is capable of controlling a distance between a patterning slit sheet and a substrate that moves, a method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured by the method.

    Abstract translation: 有机层沉积装置,使用该有机发光显示装置的方法和通过该方法制造的有机发光显示装置,更具体地说,涉及一种适用于 能够进行高分辨率图案化并且能够控制图案化狭缝片和移动的基板之间的距离的大型基板的批量生产,使用有机层制造有机发光显示装置的方法 沉积装置和通过该方法制造的有机发光显示装置。

    ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE ORGANIC LAYER DEPOSITION APPARATUS
    3.
    发明申请
    ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE ORGANIC LAYER DEPOSITION APPARATUS 有权
    有机层沉积装置及使用有机层沉积装置制造有机发光显示装置的方法

    公开(公告)号:US20140370633A1

    公开(公告)日:2014-12-18

    申请号:US14032152

    申请日:2013-09-19

    CPC classification number: H01L51/56 C23C14/042 C23C14/12 C23C14/50 H01L51/0011

    Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.

    Abstract translation: 有机层沉积设备包括:输送单元,包括转印单元,第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元,其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元,用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元,其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动,并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。

    Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus
    5.
    发明授权
    Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the organic layer deposition apparatus 有权
    有机层沉积装置及使用有机层沉积装置制造有机发光显示装置的方法

    公开(公告)号:US08962360B2

    公开(公告)日:2015-02-24

    申请号:US14032152

    申请日:2013-09-19

    CPC classification number: H01L51/56 C23C14/042 C23C14/12 C23C14/50 H01L51/0011

    Abstract: An organic layer deposition apparatus includes: a conveyer unit including a transfer unit, a first conveyer unit, and a second conveyer unit; a loading unit for fixing a substrate to the transfer unit; a deposition unit including a chamber and at least one organic layer deposition assembly; and a measuring unit located between the loading unit and the deposition unit to measure position information of the substrate before an organic layer is deposited onto the substrate; and an unloading unit for separating, from the transfer unit, the substrate onto which the deposition has been completed, wherein the transfer unit is configured to cyclically move between the first conveyer unit and the second conveyer unit, and wherein the substrate fixed to the transfer unit is configured to be spaced apart from the at least one organic layer deposition assembly while being transferred by the first conveyer unit.

    Abstract translation: 有机层沉积设备包括:输送单元,包括转印单元,第一输送单元和第二输送单元; 用于将基板固定到转印单元的装载单元; 沉积单元,其包括室和至少一个有机层沉积组件; 以及位于所述加载单元和所述沉积单元之间的测量单元,用于在将有机层沉积到所述基板上之前测量所述基板的位置信息; 以及用于从所述转印单元分离已经完成所述沉积的所述基板的卸载单元,其中所述转移单元构造成在所述第一输送单元和所述第二输送单元之间循环移动,并且其中固定到所述转印件的所述基板 单元构造成在被第一输送单元传送的同时与至少一个有机层沉积组件间隔开。

Patent Agency Ranking