公开(公告)号：US20150140704A1

公开(公告)日：2015-05-21

申请号：US14301840

申请日：2014-06-11

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong-Hyun CHOUNG ,  In-Bae KIM ,  Hongsick PARK ,  Hyeonjeong SANG ,  Jaewoo JEONG ,  Byung uk KIM ,  Suk Il YOON ,  Se Hwan JUNG ,  Soon Beom HUH

IPC: H01L21/02

CPC classification number: H01L21/02052 ,  C03C23/0075 ,  C11D3/042 ,  C11D3/046 ,  C11D3/2075 ,  C11D3/2082 ,  C11D3/2086 ,  C11D3/3409 ,  C11D7/08 ,  C11D7/10 ,  C11D7/265 ,  C11D11/0047 ,  H01L27/1262

Abstract: A cleaning solution and a method for manufacturing a display device, the cleaning solution including about 2 wt % to about 12 wt % of nitric acid; about 0.5 wt % to about 15 wt % of an organic acid; about 0.1 wt % to about 10 wt % of a salt compound; about 0.01 wt % to about 3 wt % of an inorganic salt that includes fluorine; and a balance of water, all amounts being based on a total weight of the cleaning solution.

Abstract translation: 一种清洁溶液和显示装置的制造方法，所述清洗液含有约2重量％〜约12重量％的硝酸; 约0.5重量％至约15重量％的有机酸; 约0.1重量％至约10重量％的盐化合物; 约0.01重量％至约3重量％的包含氟的无机盐; 和水的平衡，所有量基于清洁溶液的总重量。

公开(公告)号：US20140097006A1

公开(公告)日：2014-04-10

申请号：US13874934

申请日：2013-05-01

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Hong-Sick PARK ,  Wang-Woo LEE ,  Bong-Kyun KIM ,  Jong-Hyun CHOUNG ,  Young-Woo PARK ,  Gyu-Po KIM ,  Won-Guk SEO ,  Hyun-Cheol SHIN ,  Seung-Yeon HAN ,  Ki-Beom LEE ,  Sam-Young CHO

IPC: H05K3/06 ,  H05K1/09

CPC classification number: H05K3/067 ,  H01L27/1225 ,  H01L27/124 ,  H01L29/458 ,  H01L29/4908 ,  H01L29/7869 ,  H05K1/09

Abstract: A wet etching composition usable for etching a copper-based wiring layer includes between about 40% by weight to about 60% by weight of phosphoric acid, between about 1% by weight to about 10% by weight of nitric acid, between about 3% by weight to about 15% by weight of acetic acid, between about 0.01% by weight to about 0.1% by weight of a copper-ion compound, between about 1% by weight to about 10% by weight of a nitric salt, between about 1% by weight to about 10% by weight of an acetic salt, and a remainder of water

Abstract translation: 可用于蚀刻铜基布线层的湿蚀刻组合物包括约40重量％至约60重量％的磷酸，约1重量％至约10重量％的硝酸，约3重量％ 至约15重量％的乙酸，约0.01重量％至约0.1重量％的铜离子化合物，约1重量％至约10重量％的硝酸盐之间，介于约 1重量％至约10重量％的乙酸盐，剩余的水

公开(公告)号：US20230268356A1

公开(公告)日：2023-08-24

申请号：US18155982

申请日：2023-01-18

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Yong-Hwan RYU ,  Woo Jin CHO ,  Jong-Hyun CHOUNG ,  Jae Uoon KIM ,  Sun-Jin SONG ,  Hyun Duck CHO

IPC: H01L27/12 ,  G03F7/038 ,  G03F7/00

CPC classification number: H01L27/1288 ,  G03F7/0035 ,  G03F7/0382 ,  H01L27/1262 ,  C23F1/00

Abstract: A method of manufacturing a display device in a chamber in which a material including yttrium is coated on an inner surface includes: forming a first layer pattern by dry etching on a substrate; depositing a second layer material on the first layer pattern; forming a photoresist pattern on the second layer material; completing a second layer pattern by using the photoresist pattern as an etch mask; and performing an additional acid etching process by using an etching solution including at least one of hydrochloric acid, sulfuric acid, or nitric acid before the forming of the photoresist pattern on the second layer material after the dry etching to form the first layer pattern.

公开(公告)号：US20140125904A1

公开(公告)日：2014-05-08

申请号：US14046326

申请日：2013-10-04

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-Hyun CHOUNG ,  Wang Woo LEE ,  Bong-Kyun KIM ,  In-Bae KIM ,  Seol-Il KIM ,  Young Min MOON ,  Hong Sick PARK ,  Ki Tae KIM

IPC: G02F1/1368

CPC classification number: G02F1/133345 ,  G02F1/133707 ,  G02F1/134363 ,  G02F1/136259 ,  G02F1/1368 ,  G02F2001/134372 ,  G02F2001/136231 ,  G02F2001/136295 ,  G02F2201/124 ,  H01L27/1225

Abstract: A liquid crystal display includes: a substrate; a gate line and a data line disposed on the substrate; a semiconductor layer disposed on the substrate; first and second field generating electrodes disposed on the substrate; and a first protecting layer formed from the same layer as the first field generating electrode and covering at least a portion of the data line.

Abstract translation: 液晶显示器包括：基板; 设置在基板上的栅极线和数据线; 设置在所述基板上的半导体层; 设置在基板上的第一和第二场产生电极; 以及由与第一场产生电极相同的层形成并覆盖数据线的至少一部分的第一保护层。

公开(公告)号：US20140011352A1

公开(公告)日：2014-01-09

申请号：US13728463

申请日：2012-12-27

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jong-Hyun CHOUNG ,  In-Bae KIM ,  Seon-Il KIM ,  Hong Sick PARK ,  Jae Woo JEONG ,  Gyu-Po KIM ,  Won-Guk SEO ,  Hyun-Cheol SHIN ,  Ki-Beom LEE ,  Sam-Young CHO ,  Seung-Yeon HAN

IPC: C23F1/18 ,  H01L21/48

CPC classification number: C23F1/18 ,  C23F1/26 ,  H01L21/4814

Abstract: A metal wire etchant including persulfate, a sulfonate, a fluorine compound, an azole-based compound, an organic acid, a nitrate, and a chlorine compound, and a method of making the same.

Abstract translation: 包括过硫酸盐，磺酸盐，氟化合物，唑类化合物，有机酸，硝酸盐和氯化合物的金属线蚀刻剂及其制备方法。

公开(公告)号：US20230295503A1

公开(公告)日：2023-09-21

申请号：US18122337

申请日：2023-03-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGROK KIM ,  KYU-SOON PARK ,  Jong-Hyun CHOUNG ,  Woo Jin CHO ,  Gyu Po KIM ,  SUNG MIN KIM ,  Jae Myeong KIM ,  Hyun Cheol SHIN ,  JUN DONG KIM ,  JUN YOUNG HAWNG

IPC: C09K13/08 ,  H10K71/20 ,  H10K59/126 ,  H10K59/12

CPC classification number: C09K13/08 ,  H10K71/231 ,  H10K59/126 ,  H10K59/1201

Abstract: Embodiments provide an etchant composition that includes about 5.0 to about 20.0 wt % of a persulfate, about 0.01 to about 15.0 wt % of a sulfonic acid, about 0.01 to about 2.0 wt % of a fluorine compound, about 0.01 to about 5.0 wt % of a 4-nitrogen cyclic compound, about 0.01 to about 1.0 wt % of an amino acid including a hydrophobic group having at least two carbon atoms, and water A weight ratio of the amino acid to the 4-nitrogen cyclic compound is in a range of about 1:16 to about 1:60.

公开(公告)号：US20150259598A1

公开(公告)日：2015-09-17

申请号：US14725849

申请日：2015-05-29

Applicant: Samsung Display Co., Ltd. ,  DONGWOO FINE-CHEM CO., LTD.

Inventor： In-Bae KIM ,  Jong-Hyun CHOUNG ,  Seon-Il KIM ,  Hong-Sick PARK ,  Wang Woo LEE ,  Jae-Woo JEONG ,  In Seol KUK ,  Sang-Tae KIM ,  Young-Chul PARK ,  Keyong Bo SHIM ,  In-Ho YU ,  Young-Jin YOON ,  Suck-Jun LEE ,  Joon-Woo LEE ,  Sang-Hoon JANG ,  Young-Jun JIN

IPC: C09K13/08 ,  H01L21/32 ,  H01L21/3213 ,  H01L27/12

CPC classification number: C22F1/18 ,  C09K13/00 ,  C09K13/04 ,  C09K13/06 ,  C09K13/08 ,  C23F1/14 ,  C23F1/18 ,  C23F1/26 ,  C23F1/44 ,  H01L21/28008 ,  H01L21/32 ,  H01L21/32134 ,  H01L27/124 ,  H01L27/1288 ,  H05K3/067

Abstract: A etchant composition that includes, based on a total weight of the etchant composition, about 0.5 wt % to about 20 wt % of a persulfate, about 0.5 wt % to about 0.9 wt % of an ammonium fluoride, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 10.0 wt % of a sulfonic acid, about 5 wt % to about 10 wt % of an organic acid or a salt thereof, and a remainder of water. The etchant composition may be configured to etch a metal layer including copper and titanium, to form a metal wire that may be included in a thin film transistor array panel of a display device.

Abstract translation: 一种蚀刻剂组合物，其包含基于蚀刻剂组合物的总重量为约0.5重量％至约20重量％的过硫酸盐，约0.5重量％至约0.9重量％的氟化铵，约1重量％至约10重量％ 无机酸的重量百分比，约0.5重量％至约5重量％的环胺化合物，约0.1重量％至约10.0重量％的磺酸，约5重量％至约10重量％的有机酸，或 其盐，剩余的水。 蚀刻剂组合物可以被配置为蚀刻包括铜和钛的金属层，以形成可以包括在显示装置的薄膜晶体管阵列面板中的金属线。

公开(公告)号：US20220123055A1

公开(公告)日：2022-04-21

申请号：US17444274

申请日：2021-08-02

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-Hyun CHOUNG ,  Jaeuoon KIM

IPC: H01L27/32 ,  G06F3/044 ,  G06F3/041

Abstract: An input sensor of a display device includes: a sensing electrode on a base insulating layer and overlapping a sensing region; and a signal line electrically connected to the sensing electrode and overlapping the non-sensing region, and including: a first conductive layer on the base insulating layer and having a first reflectance, a first conductivity, and a first thickness; a second conductive layer having a second reflectance lower than the first reflectance, a second conductivity lower than the first conductivity, and a second thickness smaller than the first thickness, wherein the second conductive layer is on and in contact with the first conductive layer; and a third conductive layer between the base insulating layer and the first conductive layer, in contact with each of the base insulating layer and the first conductive layer, wherein the third conductive layer contains a material different from that of the second conductive layer.

公开(公告)号：US20160218121A1

公开(公告)日：2016-07-28

申请号：US14810846

申请日：2015-07-28

Applicant: Samsung Display Co., Ltd.

Inventor： Jong-Hyun CHOUNG ,  Hong Sick PARK

IPC: H01L27/12 ,  G02F1/1362 ,  G02F1/1368 ,  G02F1/1335 ,  H01L21/77 ,  H01L29/417

CPC classification number: G02F1/136227 ,  G02F1/133512 ,  G02F1/133514 ,  G02F1/136259 ,  G02F1/136286 ,  G02F2001/136295 ,  H01L27/124 ,  H01L29/41733 ,  H01L29/45

Abstract: A liquid crystal display includes a first substrate, a gate line which includes a gate electrode, a gate insulating layer, a semiconductor stripe layer which is separated from the gate line in a plan view, a semiconductor island, a data line, a source electrode and a drain electrode, an interlayer insulating layer in which a data line exposure hole which exposes a part of the data line is defined, a connecting member which is disposed on the interlayer insulating layer and is connected to the data lines which are disposed on and below the gate line through the data line exposure hole in plan view; and a pixel electrode which is disposed on the interlayer insulating layer and is separated from the connecting member, where the connecting member is directly connected to the source electrode and the pixel electrode is directly connected to the drain electrode.

Abstract translation: 液晶显示器包括第一基板，栅极线，其包括栅极电极，栅极绝缘层，在平面图中与栅极线分离的半导体条纹层，半导体岛，数据线，源电极 漏电极，限定了暴露数据线的一部分的数据线曝光孔的层间绝缘层，连接部件，其配置在层间绝缘层上，与连接在数据线上的数据线连接， 在平面图上通过数据线曝光孔在栅极线下方; 以及像素电极，其设置在所述层间绝缘层上并与所述连接构件分离，所述连接构件直接连接到所述源电极，并且所述像素电极直接连接到所述漏电极。

公开(公告)号：US20160218114A1

公开(公告)日：2016-07-28

申请号：US14740484

申请日：2015-06-16

Applicant: Samsung Display Co., Ltd.

Inventor： Young Min MOON ,  Jong-Hyun CHOUNG ,  Bong-Kyun KIM

IPC: H01L27/12 ,  H01L29/423 ,  H01L29/78 ,  H01L29/51 ,  H01L29/49

CPC classification number: H01L29/42356 ,  H01L29/42384 ,  H01L29/4908 ,  H01L29/7869

Abstract: A thin film transistor array panel includes: a gate line on a substrate and including a gate electrode; a first gate insulating layer on the substrate and the gate line, the first gate insulting layer including a first portion adjacent to the gate line and a second portion overlapping the gate line and having a smaller thickness than that of the first portion; a second gate insulating layer on the first gate insulating layer; a semiconductor layer on the second gate insulating layer; a source electrode and a drain electrode spaced apart from each other on the semiconductor layer; a passivation layer on the second gate insulating layer, the source electrode and the drain electrode; and a pixel electrode on the passivation layer and connected with the drain electrode. The first gate insulating layer and the second gate insulating layer have stress in opposite directions from each other.

Abstract translation: 薄膜晶体管阵列面板包括：基板上的栅极线，并包括栅电极; 所述第一栅极绝缘层在所述基板和所述栅极线上，所述第一栅极绝缘层包括与所述栅极线相邻的第一部分和与所述栅极线重叠并且具有比所述第一部分的厚度小的第二部分; 第一栅极绝缘层上的第二栅极绝缘层; 在所述第二栅极绝缘层上的半导体层; 在半导体层上彼此隔开的源电极和漏电极; 第二栅极绝缘层上的钝化层，源电极和漏电极; 以及钝化层上的像素电极并与漏电极连接。 第一栅极绝缘层和第二栅极绝缘层在彼此相反的方向上具有应力。