公开(公告)号：US20230295503A1

公开(公告)日：2023-09-21

申请号：US18122337

申请日：2023-03-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGROK KIM ,  KYU-SOON PARK ,  Jong-Hyun CHOUNG ,  Woo Jin CHO ,  Gyu Po KIM ,  SUNG MIN KIM ,  Jae Myeong KIM ,  Hyun Cheol SHIN ,  JUN DONG KIM ,  JUN YOUNG HAWNG

IPC: C09K13/08 ,  H10K71/20 ,  H10K59/126 ,  H10K59/12

CPC classification number: C09K13/08 ,  H10K71/231 ,  H10K59/126 ,  H10K59/1201

Abstract: Embodiments provide an etchant composition that includes about 5.0 to about 20.0 wt % of a persulfate, about 0.01 to about 15.0 wt % of a sulfonic acid, about 0.01 to about 2.0 wt % of a fluorine compound, about 0.01 to about 5.0 wt % of a 4-nitrogen cyclic compound, about 0.01 to about 1.0 wt % of an amino acid including a hydrophobic group having at least two carbon atoms, and water A weight ratio of the amino acid to the 4-nitrogen cyclic compound is in a range of about 1:16 to about 1:60.