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公开(公告)号:US12178110B2
公开(公告)日:2024-12-24
申请号:US17386488
申请日:2021-07-27
Applicant: Samsung Display Co., Ltd.
Inventor: Kyongho Hong , Donghyeon Kim , Byunghun Sung , Jungseob Lee , Jinwon Chang
IPC: H10K71/00 , H01L21/683
Abstract: The apparatus for manufacturing a display apparatus includes: a carrier; a support arranged to be spaced apart from the carrier; a driver connected to the support to linearly move the support; and an elastic portion arranged between the driver and the support to provide an elastic force to the support, wherein the support includes: a first surface on which a substrate is to be mounted; and a second surface projecting upward from the first surface to selectively contact the carrier.
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公开(公告)号:US20250008831A1
公开(公告)日:2025-01-02
申请号:US18620063
申请日:2024-03-28
Applicant: Samsung Display Co., Ltd.
Inventor: Kyongho Hong , Myungkyu Kim , Sungho Park , Changkon Park , Sukbeom You
IPC: H10K71/16 , H01L21/027 , H10K59/35
Abstract: An apparatus for manufacturing a mask is provided. The apparatus includes: a stage body portion tilted with respect to a gravitational direction and configured to receive a mask frame having opening sits thereon; a contact portion protruding from one surface of the stage body portion toward the mask frame; and a moving portion configured to move the contact portion.
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公开(公告)号:US20220140294A1
公开(公告)日:2022-05-05
申请号:US17386488
申请日:2021-07-27
Applicant: Samsung Display Co, Ltd.
Inventor: Kyongho Hong , Donghyeon Kim , Byunghun Sung , Jungseob Lee , Jinwon Chang
IPC: H01L51/56 , H01L21/683
Abstract: The apparatus for manufacturing a display apparatus includes: a carrier; a support arranged to be spaced apart from the carrier; a driver connected to the support to linearly move the support; and an elastic portion arranged between the driver and the support to provide an elastic force to the support, wherein the support includes: a first surface on which a substrate is to be mounted; and a second surface projecting upward from the first surface to selectively contact the carrier.
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公开(公告)号:US20230363245A1
公开(公告)日:2023-11-09
申请号:US18142479
申请日:2023-05-02
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun Cho , Jaemin Hong , Myungkyu Kim , Jangwoo Kim , Jongsung Park , Sangshin Lee , Jungseob Lee , Kyunghoon Chung , Eunjoung Jung , Kyongho Hong
CPC classification number: H10K71/166 , H10K59/1201 , C23C14/042 , C23C14/24
Abstract: An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.
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公开(公告)号:US20200086423A1
公开(公告)日:2020-03-19
申请号:US16384458
申请日:2019-04-15
Applicant: SAMSUNG DISPLAY CO., LTD
Inventor: Jinwon Baek , Seokjoo Lee , Sangsun Han , Kyongho Hong
Abstract: A laser processing apparatus includes: a laser light source configured to emit a laser beam; an optical scanner located along a path of the laser beam and configured to adjust the path of the laser beam; a lens unit located along the path of the laser beam, the lens unit being configured to condense the laser beam; a first adapter located between the lens unit and the optical scanner and coupled to the lens unit; and a second adapter located between the first adapter and the optical scanner, the second adapter being coupled to the first adapter and the optical scanner.
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公开(公告)号:US12202078B2
公开(公告)日:2025-01-21
申请号:US17545982
申请日:2021-12-08
Applicant: Samsung Display Co., Ltd.
Inventor: Kyu-Bum Kim , Jaeseok Park , Jungseob Lee , Kyongho Hong , Inho Lee , Bosuck Jeon
IPC: B23K37/04 , B23K26/02 , B23K26/362
Abstract: A laser processing apparatus includes a stage configured to transfer a target substrate and including an opening, an electrostatic chuck disposed on the stage and including a plurality of holes, and a laser irradiation unit disposed above the stage and spaced apart from the stage and configured to irradiate a laser beam on the target substrate. A surface of the electrostatic chuck is in contact with the target substrate, the target substrate includes a plurality of etching regions to be etched by the laser beam and a non-etching region surrounding the plurality of etching regions of the target substrate, and the plurality of holes of the electrostatic chuck overlap the opening of the stage and the plurality of etching regions of the target substrate.
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公开(公告)号:US11660702B2
公开(公告)日:2023-05-30
申请号:US16249533
申请日:2019-01-16
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyongho Hong , Dokyun Kwon , Seokjoo Lee , Jeongho Yi
IPC: B23K26/142 , B08B5/04 , B08B15/04
CPC classification number: B23K26/142 , B08B5/04 , B08B15/04
Abstract: A laser apparatus including a stage. A target substrate is mounted on the stage. The laser apparatus further includes a coupling unit disposed below the stage and coupled with a conveying unit, the conveying unit conveying the stage. The laser apparatus additionally includes a discharge unit disposed at a predetermined position for laser machining, configured to communicate with the coupling unit when docked with the coupling unit, and configured to discharge foreign matter that is generated during laser machining.
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公开(公告)号:US11351632B2
公开(公告)日:2022-06-07
申请号:US16191575
申请日:2018-11-15
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jaebum Pahk , Jeongho Yi , Dokyun Kwon , Kyongho Hong , Jihun Kang , Cheollae Roh , Gyoowan Han
IPC: B23K26/142 , B23K26/14 , B23K26/16 , B23K26/38 , B23K26/402 , B23K37/04 , B23K101/36
Abstract: A particle removal device includes: a stage on which a target substrate is disposed; an inner case defining a first discharge opening through which the stage is exposed to an internal space of the inner case; an outer case including: a side wall portion surrounding the inner case, a protrusion portion protruded from the side wall portion toward the inner case, and a second discharge opening in fluid connection with the first discharge opening; a suction pump connected to the second discharge opening; an air injector in fluid connection with the internal space; and an intake opening in fluid connection with the first and second discharge openings. A width of the intake opening as a distance between the distal end of the inner case and the distal end of the protrusion portion is smaller than a width of the first discharge opening.
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公开(公告)号:US11819941B2
公开(公告)日:2023-11-21
申请号:US16384458
申请日:2019-04-15
Applicant: SAMSUNG DISPLAY CO., LTD
Inventor: Jinwon Baek , Seokjoo Lee , Sangsun Han , Kyongho Hong
CPC classification number: B23K26/0821 , B23K26/0648 , B23K26/0665 , B23K26/702 , G02B13/0005 , G02B19/0009 , G02B19/0047 , G02B26/105
Abstract: A laser processing apparatus includes: a laser light source configured to emit a laser beam; an optical scanner located along a path of the laser beam and configured to adjust the path of the laser beam; a lens unit located along the path of the laser beam, the lens unit being configured to condense the laser beam; a first adapter located between the lens unit and the optical scanner and coupled to the lens unit; and a second adapter located between the first adapter and the optical scanner, the second adapter being coupled to the first adapter and the optical scanner.
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公开(公告)号:US11565354B2
公开(公告)日:2023-01-31
申请号:US16248505
申请日:2019-01-15
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyongho Hong , Jinwon Baek , Jeongho Yi , Jinpyung Lee
IPC: B23K37/04 , B25B11/00 , B23K26/38 , B23Q11/00 , B23Q1/01 , H01L21/67 , H01L21/683 , B23K101/40
Abstract: A stage for cutting a substrate includes: a body member; a plurality of first discharging members, each including a first suction portion in the body member and a first partition wall portion connected to the first suction portion and protruding from a top surface of the body member, each of the first discharging members defining a first space connected to an outside; a plurality of second discharging members, each including a second suction portion in the body member and a second partition wall portion connected to the second suction portion and protruding from the top surface of the body member, each of the second discharging members defining a second space connected to the outside; a plurality of connecting pipes each connected to the first partition wall portion and the second partition wall portion; and a plurality of supply pipes connected to the connecting pipes.
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