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1.
公开(公告)号:US20220093863A1
公开(公告)日:2022-03-24
申请号:US17326194
申请日:2021-05-20
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyu Hwan HWANG , Jeongkuk Kim , Hwi Kim , Kanghyun Nam , Sangha Park , Areum Lee , Da-Hee Jeong , Eunbee Jo , Seungmin Jin , Jaemin Hong
Abstract: A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.
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公开(公告)号:US09780305B2
公开(公告)日:2017-10-03
申请号:US14576394
申请日:2014-12-19
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Hanul Kwen , Junghoon Kim , Hanyoung Kim , Younghoon Roh , Wooyoung Jung , Cheolgyu Jeong , Pilseon Ji , Jaemin Hong
CPC classification number: H01L51/0011 , C23C14/042 , C23C16/042 , H01L51/56
Abstract: Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.
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公开(公告)号:US11569487B2
公开(公告)日:2023-01-31
申请号:US17063676
申请日:2020-10-05
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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4.
公开(公告)号:US20180040857A1
公开(公告)日:2018-02-08
申请号:US15651808
申请日:2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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5.
公开(公告)号:US11950489B2
公开(公告)日:2024-04-02
申请号:US17326194
申请日:2021-05-20
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyu Hwan Hwang , Jeongkuk Kim , Hwi Kim , Kanghyun Nam , Sangha Park , Areum Lee , Da-Hee Jeong , Eunbee Jo , Seungmin Jin , Jaemin Hong
CPC classification number: H10K71/166 , C23C14/042 , C23C14/24 , H10K59/12 , H10K71/00 , H10K71/164
Abstract: A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.
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公开(公告)号:US20210020874A1
公开(公告)日:2021-01-21
申请号:US17063676
申请日:2020-10-05
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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公开(公告)号:US10818877B2
公开(公告)日:2020-10-27
申请号:US15651808
申请日:2017-07-17
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Hanul Kwen , Jeunghoon Kim , Jakyung Yu , Sujin Lee
Abstract: Provided are a display device, a mask assembly, and an apparatus and a method for manufacturing the display device. The mask assembly includes: a mask frame; at least two mask sheets installed on the mask frame, each of the mask sheets including a plurality of openings; and at least two thin shielding plates installed on the mask frame such that the thin shielding plates are spaced apart from each other and shield a portion of the plurality of openings of each mask sheet, wherein one of the mask sheets and the thin shielding plates includes a shielding portion between the thin shielding plates spaced apart from each other, the shielding portion selectively blocking at least portions of the openings so as to form a deposition region having a shape other than a rectangle or a square.
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公开(公告)号:US20230363246A1
公开(公告)日:2023-11-09
申请号:US18311021
申请日:2023-05-02
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun Cho , Jangwoo Kim , Sangmin Yi , Kyunghoon Chung , Jaemin Hong
CPC classification number: H10K71/166 , H10K59/1201 , C23C14/042 , C23C14/24 , H01L21/6831
Abstract: The present invention relates to an apparatus for manufacturing a display device and a method of manufacturing a display device. The apparatus for manufacturing a display device includes: a mask assembly tilted with respect to one plane parallel to a ground; a support unit configured to support a rear surface of the mask assembly and to support a lower surface of the mask assembly; a deposition source arranged to face the mask assembly; and a carrier arranged to face the mask assembly and configured to support a display substrate.
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公开(公告)号:US20230363245A1
公开(公告)日:2023-11-09
申请号:US18142479
申请日:2023-05-02
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun Cho , Jaemin Hong , Myungkyu Kim , Jangwoo Kim , Jongsung Park , Sangshin Lee , Jungseob Lee , Kyunghoon Chung , Eunjoung Jung , Kyongho Hong
CPC classification number: H10K71/166 , H10K59/1201 , C23C14/042 , C23C14/24
Abstract: An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.
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公开(公告)号:US20230250526A1
公开(公告)日:2023-08-10
申请号:US18106097
申请日:2023-02-06
Applicant: Samsung Display Co., Ltd.
Inventor: Jaemin Hong , Jihwan Keum
IPC: C23C14/04
CPC classification number: C23C14/042
Abstract: An apparatus for manufacturing a display apparatus includes: a chamber; a mask assembly disposed in the chamber on a first side of a display substrate; a deposition source disposed to face the mask assembly and supplying a deposition material that passes through the mask assembly; and a magnetic force portion including a plurality of magnets extending in a first direction parallel to the mask assembly and disposed on a side opposite to the first side of the display substrate. The magnetic force portion reciprocates in a direction intersecting the first direction.
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