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公开(公告)号:US20160167083A1
公开(公告)日:2016-06-16
申请号:US14719155
申请日:2015-05-21
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Jeunghoon Kim , Yoonchan Oh , Jangwoo Kim , Heeseak Noh , Bongjun Park , Taeyong An , Daesik Jang , Cheolgyu Jeong , Jaemin Hong
CPC classification number: B05B12/20 , B05C21/005 , C23C14/042 , H01L51/0011 , H01L51/56
Abstract: A mask frame assembly includes a frame and a mask including a pattern portion having a pattern hole and a shape memory alloy portion. A method of manufacturing a mask frame assembly includes forming a pattern portion having a pattern hole and a shape memory alloy portion on a mask, the shape memory alloy portion extending in a first direction at a deposition temperature, and coupling the mask to a frame by extending the mask at a room temperature in a second direction perpendicular to the first direction.
Abstract translation: 荫罩框架组件包括框架和掩模,其包括具有图形孔的图案部分和形状记忆合金部分。 一种掩模框架组件的制造方法包括在掩模上形成具有图案孔和形状记忆合金部分的图案部分,所述形状记忆合金部分在沉积温度下沿第一方向延伸,并将所述掩模与框架相连 在垂直于第一方向的第二方向上在室温下延伸掩模。
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公开(公告)号:US20230363246A1
公开(公告)日:2023-11-09
申请号:US18311021
申请日:2023-05-02
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun Cho , Jangwoo Kim , Sangmin Yi , Kyunghoon Chung , Jaemin Hong
CPC classification number: H10K71/166 , H10K59/1201 , C23C14/042 , C23C14/24 , H01L21/6831
Abstract: The present invention relates to an apparatus for manufacturing a display device and a method of manufacturing a display device. The apparatus for manufacturing a display device includes: a mask assembly tilted with respect to one plane parallel to a ground; a support unit configured to support a rear surface of the mask assembly and to support a lower surface of the mask assembly; a deposition source arranged to face the mask assembly; and a carrier arranged to face the mask assembly and configured to support a display substrate.
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公开(公告)号:US20230363245A1
公开(公告)日:2023-11-09
申请号:US18142479
申请日:2023-05-02
Applicant: Samsung Display Co., Ltd.
Inventor: Youngsun Cho , Jaemin Hong , Myungkyu Kim , Jangwoo Kim , Jongsung Park , Sangshin Lee , Jungseob Lee , Kyunghoon Chung , Eunjoung Jung , Kyongho Hong
CPC classification number: H10K71/166 , H10K59/1201 , C23C14/042 , C23C14/24
Abstract: An apparatus for manufacturing a display device includes: a mask assembly tilted with respect to a plane parallel to the ground; a deposition source facing the mask assembly; and a carrier facing the mask assembly and configured to support a display substrate. The mask assembly includes: a mask frame having a flat surface; and a mask sheet having an end on the flat surface of the mask frame and coupled to the mask frame.
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