公开(公告)号：US20220093863A1

公开(公告)日：2022-03-24

申请号：US17326194

申请日：2021-05-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyu Hwan HWANG ,  Jeongkuk Kim ,  Hwi Kim ,  Kanghyun Nam ,  Sangha Park ,  Areum Lee ,  Da-Hee Jeong ,  Eunbee Jo ,  Seungmin Jin ,  Jaemin Hong

IPC: H01L51/00 ,  H01L27/32 ,  H01L51/56 ,  C23C14/04 ,  C23C14/24

Abstract: A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.

公开(公告)号：US11950489B2

公开(公告)日：2024-04-02

申请号：US17326194

申请日：2021-05-20

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kyu Hwan Hwang ,  Jeongkuk Kim ,  Hwi Kim ,  Kanghyun Nam ,  Sangha Park ,  Areum Lee ,  Da-Hee Jeong ,  Eunbee Jo ,  Seungmin Jin ,  Jaemin Hong

IPC: H10K71/16 ,  C23C14/04 ,  C23C14/24 ,  H10K59/12 ,  H10K71/00

CPC classification number: H10K71/166 ,  C23C14/042 ,  C23C14/24 ,  H10K59/12 ,  H10K71/00 ,  H10K71/164

Abstract: A deposition mask for manufacturing a display panel includes a metallic base having a thickness of about 50 micrometers to about 200 micrometers and a plurality of openings defined therein, wherein at least some of the openings include a first opening having a first width and a second opening having a second width smaller than the first width respectively defined along a thickness direction of the metallic base, and wherein the metallic base includes a first part in which the first opening is defined, and a second part in which the second opening is defined, the second part having a width that increases in a direction downward from a top surface of the metallic base along the thickness direction of the metallic base.