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1.发明申请Methods of Reducing Registration Errors of Photomasks and Photomasks Formed Using the Methods 有权使用方法减少光掩模和光掩模的注册错误的方法公开(公告)号：US20150050584A1
公开(公告)日：2015-02-19
申请号：US14319281
申请日：2014-06-30
发明人： Jin Choi , Sukjong Bae , Inkyun Shin , Jeonghyeon Lee
摘要： Methods of reducing registration errors of photomasks and photomasks formed using the methods are provided. The method may include forming a plurality of photomask patterns on a substrate and determining registration errors of the plurality of photomask patterns. The method may further include forming a plurality of stress-producing portions in the substrate to reduce the registration errors by considering exposure latitude variations.
摘要翻译： 提供了减少使用这些方法形成的光掩模和光掩模的配准误差的方法。 该方法可以包括在衬底上形成多个光掩模图案并确定多个光掩模图案的配准误差。 该方法还可以包括在衬底中形成多个应力产生部分，以通过考虑曝光宽容度变化来减小配准误差。
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公开(公告)号：US20240321874A1
公开(公告)日：2024-09-26
申请号：US18499117
申请日：2023-10-31
发明人： Jeonghyeon Lee , Hakjong Lee , Yeonghan Gwon , Hanyoung Song , Subin Lee , Junyoup Lee , Hyunjun Lim , Taeho Cha , Seunghyeon Hong
IPC分类号： H01L27/088 , H01L21/762 , H01L21/8234
CPC分类号： H01L27/088 , H01L21/76224 , H01L21/823481
摘要： An integrated circuit device includes a pair of fin-type active regions collinear with each other on a substrate, a gate line disposed on one of the fin-type active regions, a capping insulating layer that covers the gate line, and a fin isolation insulating portion that passes through the capping insulating layer in a vertical direction between the pair of fin-type active regions. The fin isolation insulating portion includes an isolation insulating plug that includes a first portion disposed between the pair of fin-type active regions and a second portion integrally connected to the first portion and that passes through the capping insulating layer in the vertical direction, and an isolation insulating liner that surrounds a bottom surface and a sidewall of the isolation insulating plug. The isolation insulating liner includes an uppermost portion that is closer to the substrate than a top surface of the isolation insulating plug.
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公开(公告)号：US11354294B2
公开(公告)日：2022-06-07
申请号：US17028542
申请日：2020-09-22
发明人： Hyonsok Lee , Mirae Jeong , Jiyoung Kang , Kyunghwan Lee , Jeonghyeon Lee , Junhyuk Lee
IPC分类号： G06F16/23 , G06F16/901
摘要： A method of updating a server knowledge graph, is performed by a server and includes obtaining a server knowledge graph of the server, and obtaining a plurality of device knowledge graphs by receiving a device knowledge graph from each of a plurality of devices. The method further includes generating a knowledge graph for server knowledge graph extension, based on the obtained plurality of device knowledge graphs, and updating the obtained server knowledge graph, using the generated knowledge graph for server knowledge graph extension.
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4.发明授权Methods of reducing registration errors of photomasks and photomasks formed using the methods 有权减少使用该方法形成的光掩模和光掩模的配准误差的方法公开(公告)号：US09323142B2
公开(公告)日：2016-04-26
申请号：US14319281
申请日：2014-06-30
发明人： Jin Choi , Sukjong Bae , Inkyun Shin , Jeonghyeon Lee
摘要： Methods of reducing registration errors of photomasks and photomasks formed using the methods are provided. The method may include forming a plurality of photomask patterns on a substrate and determining registration errors of the plurality of photomask patterns. The method may further include forming a plurality of stress-producing portions in the substrate to reduce the registration errors by considering exposure latitude variations.
摘要翻译： 提供了减少使用这些方法形成的光掩模和光掩模的配准误差的方法。 该方法可以包括在衬底上形成多个光掩模图案并确定多个光掩模图案的配准误差。 该方法还可以包括在衬底中形成多个应力产生部分，以通过考虑曝光宽容度变化来减小配准误差。
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公开(公告)号：US20240304704A1
公开(公告)日：2024-09-12
申请号：US18592697
申请日：2024-03-01
发明人： Subin Lee , Hyunjun Lim , Jeonghyeon Lee , Hakjong Lee , Taeho Cha , Seunghyeon Hong
IPC分类号： H01L29/66 , H01L21/762 , H01L21/8234 , H01L27/088 , H01L29/06 , H01L29/423 , H01L29/775 , H01L29/78 , H01L29/786
CPC分类号： H01L29/66545 , H01L21/76224 , H01L21/823437 , H01L21/823481 , H01L27/0886 , H01L29/0649 , H01L29/0673 , H01L29/42392 , H01L29/66439 , H01L29/66795 , H01L29/775 , H01L29/785 , H01L29/78696
摘要： Provided is an integrated circuit device including a plurality of fin-type active areas each extending on a substrate in a first horizontal direction, a plurality of gate structures each extending in a second horizontal direction intersecting the plurality of fin-type active areas on the substrate and spaced apart from each other in the first horizontal direction, an interlayer insulating layer covering the periphery of the plurality of gate structures, and an inter-gate cutting layer formed of an insulating material and extending in the first horizontal direction across through the plurality of gate structures and the interlayer insulating layer. A first gate structure is separated from a second gate structure by the inter-gate cutting layer, and portions of respective side surfaces of the gate structures overlap the plurality of fin-type active areas in a vertical direction, the respective side surfaces of the gate structures extending in the first horizontal direction.
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公开(公告)号：US11386064B2
公开(公告)日：2022-07-12
申请号：US17028542
申请日：2020-09-22
发明人： Hyonsok Lee , Mirae Jeong , Jiyoung Kang , Kyunghwan Lee , Jeonghyeon Lee , Junhyuk Lee
IPC分类号： G06F16/23 , G06F16/901
摘要： A method of updating a server knowledge graph, is performed by a server and includes obtaining a server knowledge graph of the server, and obtaining a plurality of device knowledge graphs by receiving a device knowledge graph from each of a plurality of devices. The method further includes generating a knowledge graph for server knowledge graph extension, based on the obtained plurality of device knowledge graphs, and updating the obtained server knowledge graph, using the generated knowledge graph for server knowledge graph extension.
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公开(公告)号：US20210117402A1
公开(公告)日：2021-04-22
申请号：US17028542
申请日：2020-09-22
发明人： Hyonsok LEE , Mirae Jeong , Jiyoung Kang , Kyunghwan Lee , Jeonghyeon Lee , Junhyuk Lee
IPC分类号： G06F16/23 , G06F16/901
摘要： A method of updating a server knowledge graph, is performed by a server and includes obtaining a server knowledge graph of the server, and obtaining a plurality of device knowledge graphs by receiving a device knowledge graph from each of a plurality of devices. The method further includes generating a knowledge graph for server knowledge graph extension, based on the obtained plurality of device knowledge graphs, and updating the obtained server knowledge graph, using the generated knowledge graph for server knowledge graph extension.
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