SELF-ALIGNED HIGH VOLTAGE TRANSISTOR
    6.
    发明申请

    公开(公告)号:US20200350431A1

    公开(公告)日:2020-11-05

    申请号:US16401189

    申请日:2019-05-02

    Inventor: Ranadeep DUTTA

    Abstract: Certain aspects of the present disclosure generally relate to a transistor having a self-aligned drift region and asymmetric spacers. One example transistor generally includes a channel region; a gate region disposed above the channel region; a first implant region; a second implant region having a same doping type as the first implant region, but a different doping type than the channel region; a first spacer disposed adjacent to a first side of the gate region; a second spacer disposed adjacent to a second side of the gate region and having a wider width than the first spacer; and a drift region having an edge vertically aligned with an edge of the second spacer and disposed between the channel region and the second implant region. The channel region may be disposed between the first implant region and the drift region.

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