ENCLOSED-CHANNEL REACTOR SYSTEM WITH CONDUIT PLATE

    公开(公告)号:US20200270751A1

    公开(公告)日:2020-08-27

    申请号:US16864797

    申请日:2020-05-01

    IPC分类号: C23C16/455

    摘要: An enclosed-channel reactor system is provided, which includes: a reactor body having a plurality of enclosed channels therein; an upper cap disposed at one end of the reactor body and having an inlet port communicating with the plurality of enclosed channels; a lower cap disposed at the other end of the reactor body opposite to the upper cap and having an outlet port communicating with the plurality of enclosed channels; and at least a conduit plate disposed between the upper cap and the reactor body for guiding a precursor injected from the inlet port into the plurality of enclosed channels uniformly.