公开(公告)号：US4606932A

公开(公告)日：1986-08-19

申请号：US748515

申请日：1985-06-25

Applicant: Modest M. Oprysko ,  Mark W. Beranek

Inventor： Modest M. Oprysko ,  Mark W. Beranek

IPC: G03F1/00 ,  C23C16/04 ,  C23C16/48 ,  G03F1/08 ,  H01L21/027 ,  H05K3/14 ,  H05K3/22 ,  C23C2/08

CPC classification number: C23C16/481 ,  C23C16/047 ,  C23C16/482 ,  C23C16/483 ,  H05K3/146 ,  H05K3/225

Abstract: A method for depositing a micron-size metallic film on a transparent substrate by thermal deposition employing a focused visible laser. The method includes the step of positioning the substrate in a gas cell containing a metal bearing gaseous compound. A nucleation layer is formed on a surface of the substrate by either shining an ultraviolet light on the substrate surface or by heating the substrate to a temperature which is less than the temperature at which the molecules of the gaseous compound decompose. Next, a laser which may be visible or near infrared is focused onto the substrate to provide localized heating of the area of the substrate to which the beam is incident. Molecules of the gaseous compound thermally decompose on the heated area to deposit a metal film thereon.

Abstract translation: 一种通过使用聚焦可见激光的热沉积在透明基板上沉积微米级金属膜的方法。 该方法包括将衬底定位在含有金属气体化合物的气室中的步骤。 通过在衬底表面上照射紫外光或通过将衬底加热到​​低于气态化合物分子分解温度的温度，在衬底的表面上形成成核层。 接下来，将可见或近红外的激光聚焦到基板上，以提供光束入射的基板的区域的局部加热。 气体化合物的分子在加热区域上热分解，在其上沉积金属膜。

公开(公告)号：US4592975A

公开(公告)日：1986-06-03

申请号：US622367

申请日：1984-06-20

Applicant: Peter L. Young ,  Modest M. Oprysko ,  Mark W. Beranek

Inventor： Peter L. Young ,  Modest M. Oprysko ,  Mark W. Beranek

IPC: G03F1/56 ,  G03F1/72 ,  H01L21/027 ,  G03F9/00 ,  B23K9/00

CPC classification number: G03F1/72 ,  G03F1/56 ,  Y10S430/146

Abstract: A method for repairing clear defects on a photomask. The method includes the steps of coating the photomask with a positive photoresist; exposing the photoresist to a laser beam for localized heating thereof to a temperature above 500.degree. C. to darken or char the polymer; and removing the unexposed polymer from the photomask. The method may also include the intermediate step of heating the polymer to a temperature between 200.degree. C. and 500.degree. C. to brown the polymer before the polymer is exposed to the laser which heats it to a temperature above 500.degree. C.

Abstract translation: 修复光掩模上的明显缺陷的方法。 该方法包括用正性光致抗蚀剂涂布光掩模的步骤; 将光致抗蚀剂暴露于激光束，以将其局部加热至高于500℃的温度，使聚合物变暗或变焦; 并从光掩模中除去未曝光的聚合物。 该方法还可以包括将聚合物加热到200℃至500℃之间的温度的中间步骤，以在将聚合物暴露于激光器之前使聚合物棕褐色至高于500℃的温度。

公开(公告)号：US4727234A

公开(公告)日：1988-02-23

申请号：US879751

申请日：1986-06-27

Applicant: Modest M. Oprysko ,  Peter L. Young ,  Mark W. Beranek

Inventor： Modest M. Oprysko ,  Peter L. Young ,  Mark W. Beranek

IPC: G03F1/56 ,  G03F1/72 ,  H01L21/027 ,  B23K26/00

CPC classification number: G03F1/56 ,  G03F1/72

Abstract: An apparatus for repairing both clear and opaque defects in a photomask having a metal film pattern on a glass plate in which a visible laser light source is pulsed at selected frequencies to direct an optically focused laser beam into a gas sealed cell containing a mask. At one frequency, the laser pulses ablate opaque mask defects. At another frequency, and with the cell filled with a metal bearing gas, the laser beam causes thermal decomposition of the gas and deposition of metal to cure clear defects.

Abstract translation: 一种用于修复在玻璃板上具有金属膜图案的光掩模中的透明和不透明缺陷的设备，其中可见激光光源以选定频率脉冲以将光学聚焦的激光束引导到包含掩模的气体密封单元中。 在一个频率下，激光脉冲消融不透明掩模缺陷。 在另一个频率下，并且当电池充满金属轴承气体时，激光束引起气体的热分解和金属的沉积以固化明显的缺陷。

公开(公告)号：US4543270A

公开(公告)日：1985-09-24

申请号：US622366

申请日：1984-06-20

Applicant: Modest M. Oprysko ,  Mark W. Beranek

Inventor： Modest M. Oprysko ,  Mark W. Beranek

IPC: G03F1/00 ,  C23C16/04 ,  C23C16/48 ,  G03F1/08 ,  H01L21/027 ,  H05K3/14 ,  H05K3/22 ,  C23C2/08

CPC classification number: C23C16/481 ,  C23C16/047 ,  C23C16/482 ,  C23C16/483 ,  H05K3/146 ,  H05K3/225

Abstract: A method for depositing a micron-size metallic film on a transparent substrate by thermal deposition employing a focused visible laser. The method includes the step of positioning the substrate in a gas cell containing a metal bearing gaseous compound. A nucleation layer is formed on a surface of the substrate by either shining an ultraviolet light on the substrate surface or by heating the substrate to a temperature which is less than the temperature at which the molecules of the gaseous compound decompose. Next, a laser which may be visible or near infrared is focused onto the substrate to provide localized heating of the area of the substrate to which the beam is incident. Molecules of the gaseous compound thermally decompose on the heated area to deposit a metal film thereon.

Abstract translation: 一种通过使用聚焦可见激光的热沉积在透明基板上沉积微米级金属膜的方法。 该方法包括将衬底定位在含有金属气体化合物的气室中的步骤。 通过在衬底表面上照射紫外光或通过将衬底加热到​​低于气态化合物分子分解温度的温度，在衬底的表面上形成成核层。 接下来，将可见或近红外的激光聚焦到基板上，以提供光束入射的基板的区域的局部加热。 气体化合物的分子在加热区域上热分解，在其上沉积金属膜。

公开(公告)号：US06940165B2

公开(公告)日：2005-09-06

申请号：US10241403

申请日：2002-09-11

Applicant: Modest M. Oprysko ,  Lei Shan ,  Jeannine M. Trewhella

Inventor： Modest M. Oprysko ,  Lei Shan ,  Jeannine M. Trewhella

IPC: H01L23/495 ,  H01L23/64 ,  H01L23/48

CPC classification number: H01L23/4952 ,  H01L23/645 ,  H01L24/48 ,  H01L24/49 ,  H01L2223/6627 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/49171 ,  H01L2224/85399 ,  H01L2924/00014 ,  H01L2924/14 ,  H01L2924/181 ,  H01L2924/1903 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/30111 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207

Abstract: An improved electrical interconnect is formed wherein a dielectric material having a controllable characteristic is applied to at least a portion of the interconnect. The controllable characteristic of the dielectric material is selectively adjustable so that the impedance of the electrical interconnect is substantially matched to at least one impedance at first and second ends of the interconnect. In this manner, an electrical discontinuity between the first and second ends of the electrical interconnect is reduced, thereby improving an electrical performance of the interconnect.

Abstract translation: 形成改进的电互连，其中具有可控特性的介电材料被施加到互连的至少一部分。 电介质材料的可控特性可选择性地调节，使得电互连的阻抗基本上与互连的第一和第二端处的至少一个阻抗匹配。 以这种方式，电互连的第一和第二端之间的电中断减小，从而提高互连的电性能。

公开(公告)号：US5495545A

公开(公告)日：1996-02-27

申请号：US328177

申请日：1994-10-24

Applicant: Michael F. Cina ,  Dennis L. Karst ,  Modest M. Oprysko ,  Mark B. Ritter ,  Stephen L. Spanoudis ,  Jeannine M. Trewhella

Inventor： Michael F. Cina ,  Dennis L. Karst ,  Modest M. Oprysko ,  Mark B. Ritter ,  Stephen L. Spanoudis ,  Jeannine M. Trewhella

IPC: G02B6/42 ,  G02B6/36

CPC classification number: G02B6/4206

Abstract: A method for making an optical fiber transmission apparatus for limiting the optical modes which were emitted from a source in such a way to impinge on an optical fiber to extract a high bandwidth from the fiber. The apparatus includes a lens or aperture to control the angle and distribution of light launched into the fiber. The apparatus achieves reproducibly high bandwidths in large core step-index optical fibers of short transmission length distances. The lens or aperture introduces light from the source into the fiber at an angle at which substantially no intermode delay occurs as the light propagates down the fiber. An integral fiber optic coupling assembly that includes an optical electronic component receptacle, the lens and/or aperture, and an optical fiber connector interface which provides low cost easy to manufacture assembly is also disclosed. A unitary plastic housing provides the function of a lens and mechanical reference or locating features for the light source and optical fiber.

Abstract translation: 一种制造光纤传输装置的方法，用于限制从源发射的光模，以照射到光纤上以从光纤提取高带宽。 该装置包括用于控制发射到光纤中的光的角度和分布的透镜或孔。 该装置在具有短传输长度距离的大型核心阶跃折射率光纤中实现可重复的高带宽。 透镜或光圈将光从光源引入光纤，其角度基本上不发生模式间延迟，因为光沿着光纤传播。 还公开了一种包括光学电子部件插座，透镜和/或孔径以及提供低成本易于制造组装的光纤连接器接口的整体光纤耦合组件。 单一的塑料外壳提供了一个透镜的功能，并为光源和光纤提供机械参考或定位功能。

公开(公告)号：US5093879A

公开(公告)日：1992-03-03

申请号：US542275

申请日：1990-06-22

Applicant: Mark F. Bregman ,  William D. Brewer ,  Mitchell S. Cohen ,  Glen W. Johnson ,  Ismail C. Noyan ,  Modest M. Oprysko ,  Mark B. Ritter ,  Dennis L. Rogers ,  Jeanine M. Trewhella

Inventor： Mark F. Bregman ,  William D. Brewer ,  Mitchell S. Cohen ,  Glen W. Johnson ,  Ismail C. Noyan ,  Modest M. Oprysko ,  Mark B. Ritter ,  Dennis L. Rogers ,  Jeanine M. Trewhella

IPC: G02B6/42 ,  G02B6/43 ,  H01L31/12 ,  H01L31/167 ,  H04B10/00

CPC classification number: G02B6/4249 ,  G02B6/43 ,  H01L31/167 ,  H04B10/803

Abstract: A direct optical connector (DOC) comprised of first and second members, each including a plurality of light emitting and light detecting locations, operative in combination with energy transfer media to form direct optical connections between the light emitting locations and the light detecting locations, wherein said first and second members are adapted for reclosable connection to each other whereupon the light emitting locations on one member are aligned with the light detecting locations on the other member. The first and second members of the preferred DOC are modular. Alternative forms of energy transfer media are used in various embodiments of the invention including lenslet arrays, imaging fiber plates (IFPs), and energy transfer fiber plates (ETFPs). These media have differing alignment criteria, differing degrees of immunity from crosstalk, differing degrees of transfer efficiency, different manufacturing costs, etc., thereby permitting the fabrication and/or use of a connector most suited to meet the requirements of a particular application.A modular half of a DOC can be used in conjunction with a remote optical connector (ROC) to channel light over relatively long distances. The invention also encompasses processes for fabricating ROCs.

公开(公告)号：US5534094A

公开(公告)日：1996-07-09

申请号：US314789

申请日：1994-09-29

Applicant: Gnanalingam Arjavalingam ,  Alina Deutsch ,  Fuad E. Doany ,  Bruce K. Furman ,  Donald J. Hunt ,  Chandrasekhar Narayan ,  Modest M. Oprysko ,  Sampath Purushothaman ,  Vincent Ranieri ,  Stephen Renick ,  Jane M. Shaw ,  Janusz S. Wilczynski ,  David F. Witman

Inventor： Gnanalingam Arjavalingam ,  Alina Deutsch ,  Fuad E. Doany ,  Bruce K. Furman ,  Donald J. Hunt ,  Chandrasekhar Narayan ,  Modest M. Oprysko ,  Sampath Purushothaman ,  Vincent Ranieri ,  Stephen Renick ,  Jane M. Shaw ,  Janusz S. Wilczynski ,  David F. Witman

IPC: B23K26/00 ,  B32B37/00 ,  H01L21/68 ,  H01L23/12 ,  H01L23/15 ,  H05K3/00 ,  H05K3/46 ,  B32B31/28

CPC classification number: H01L21/6835 ,  H01L2221/68345 ,  H01L2221/68359 ,  H05K3/0011 ,  H05K3/46 ,  Y10T156/1158 ,  Y10T428/12528 ,  Y10T428/12549 ,  Y10T428/12569 ,  Y10T428/12611

Abstract: A method and apparatus for releasing a workpiece from a substrate including providing a substrate which is transparent to a predetermined wavelength of electromagnetic radiation; forming, on the substrate, a separation layer which degrades in response to the predetermined radiation; providing the workpiece on the separation layer; and directing the predetermined radiation at the separation layer through the transparent substrate so as to degrade the separation layer and to separate the workpiece from the substrate.

Abstract translation: 一种用于从衬底释放工件的方法和装置，包括提供对预定波长的电磁辐射是透明的衬底; 在衬底上形成响应于预定辐射而降解的分离层; 在分离层上提供工件; 并且通过透明基板将分离层处的预定辐射引导，以使分离层退化并将工件与基板分离。

公开(公告)号：US5504828A

公开(公告)日：1996-04-02

申请号：US328291

申请日：1994-10-24

Applicant: Michael F. Cina ,  Dennis L. Karst ,  Modest M. Oprysko ,  Mark B. Ritter ,  Jeannine M. Trewhella

Inventor： Michael F. Cina ,  Dennis L. Karst ,  Modest M. Oprysko ,  Mark B. Ritter ,  Jeannine M. Trewhella

IPC: G02B6/42 ,  G02B6/32

CPC classification number: G02B6/4204 ,  G02B6/4206

Abstract: An optical fiber transmission apparatus for limiting the optical modes which were emitted from a source in such a way to impinge on an optical fiber to extract a high bandwidth from the fiber. The apparatus includes a lens or aperture to control the angle and distribution of light launched into the fiber. The apparatus achieves reproducibly high bandwidths in large core step-index optical fibers of short transmission length distances. The lens or aperture introduces light from the source into the fiber at an angle at which substantially no intermode delay occurs as the light propagates down the fiber. An integral fiber optic coupling assembly that includes an optical electronic component receptacle, the lens and/or aperture, and an optical fiber connector interface which provides low cost easy to manufacture assembly is also disclosed. A unitary plastic housing provides the function of a lens and mechanical reference or locating features for the light source and optical fiber.

Abstract translation: 一种光纤传输装置，用于限制从源发射的光模式以照射到光纤上以从光纤提取高带宽。 该装置包括用于控制发射到光纤中的光的角度和分布的透镜或孔。 该装置在具有短传输长度距离的大型核心阶跃折射率光纤中实现可重复的高带宽。 透镜或光圈将光从光源引入光纤，其角度基本上不发生模式间延迟，因为光沿着光纤传播。 还公开了一种包括光学电子部件插座，透镜和/或孔径以及提供低成本易于制造组装的光纤连接器接口的整体光纤耦合组件。 单一的塑料外壳提供了一个透镜的功能，并为光源和光纤提供机械参考或定位功能。

公开(公告)号：US4959540A

公开(公告)日：1990-09-25

申请号：US351686

申请日：1989-05-15

Applicant: Bunsen Fan ,  Modest M. Oprysko ,  Ricky A. Rand

Inventor： Bunsen Fan ,  Modest M. Oprysko ,  Ricky A. Rand

IPC: G04F5/00 ,  G02B6/00 ,  G02B6/28 ,  G02B6/43 ,  G02B27/00 ,  G06E1/00 ,  G06F1/10 ,  H04L7/00

CPC classification number: H04L7/0075 ,  G02B6/2861 ,  G02B6/43 ,  G06F1/10 ,  G06F1/105

Abstract: An optical clock system for high-performance computing systems uses unique methods of clock generation, delay timing, and electrical clock conversion to eliminate clock skew due to passive circuit elements. There is provided a direct optical connection to active devices in the computing system thereby eliminating the transmission of electrical clock signals through passive transmission elements. The optical clock system eliminates several stages of clock drivers and, as a result, is capable of reducing clock skew due to active circuit skew as well. In one embodiment, an optical pulse timing operator (10) produces ultrashort pulses which are equally divided by an 1-by-N splitter (16) into N optical fibers (18), where N depends on the number of clock signals required. Each fiber has a different length, resulting in different propagation times for the optical pulses. The light from each of the N fibers are again split into M fibers by N 1-by-M splitters (20), where M depends upon the number of distribution points for the clock. The N.times.M fibers are regrouped to form a bundle of N fibers, and these M fiber bundles are then coupled to each module (22) where the delayed optical signals are converted into the appropriate electrical clock signals.