摘要:
A photoresist composition includes a cyclic compound, a photoacid generator, and an organic solvent. The cyclic compound includes any one selected from the group consisting of moieties having chemical structures represented by the formulae (1), (2), (3) and (4) set forth herein, and at least one moiety having the chemical structure represented by the formula (9) set forth herein.
摘要:
A photoresist composition includes a cyclic compound, a photoacid generator, and an organic solvent. The cyclic compound includes any one selected from the group consisting of moieties having chemical structures represented by the formulae (1), (2), (3) and (4) set forth herein, and at least one moiety having the chemical structure represented by the formula (9) set forth herein.
摘要:
Disclosed herein is a novel norbornene, acrylate or methacrylate monomer as a photoresist monomer containing an oxepan-2-one group. Further disclosed are photoresist compositions comprising a polymer prepared from the monomer, methods for preparing the photoresist compositions, and methods for forming photoresist patterns using the photoresist compositions.
摘要:
Provided are a semiconductor structure and a method of fabricating a semiconductor device. The method includes: preparing a substrate or an etch-target layer which is to be patterned; forming a first anti-reflective coating, which contains silsesquioxane resin and a cross-linking catalyst, on the substrate or the etch-target layer; forming an anti-penetration film and a second anti-reflective coating by causing a cross-linking reaction in a region of the first anti-reflective coating; and forming a photoresist pattern on the anti-penetration film.
摘要:
An operational amplifier includes a differential amplifier for amplifying differential input signals to generate differential amplified signals. The operational amplifier also includes first and second single-ended amplifiers that each amplify the differential amplified signals to respectively generate first and second single-ended output signals that are differential with respect to each-other.
摘要:
In a method of fabricating a semiconductor device, a substrate including a circuit area and an overlay mark area is provided. Conductive gate patterns are formed on the substrate in the circuit area such that the overlay mark area is free of the gate patterns, and conductive contact patterns are formed on the substrate between the gate patterns in the circuit area. A mirror pattern is formed on the substrate in the overlay mark area, where the mirror pattern and the contact patterns comprising a same reflective material. Related semiconductor devices, overlay marks, and fabrication methods are also discussed.
摘要:
An operational amplifier includes a differential amplifier for amplifying differential input signals to generate differential amplified signals. The operational amplifier also includes first and second single-ended amplifiers that each amplify the differential amplified signals to respectively generate first and second single-ended output signals that are differential with respect to each-other.
摘要:
In a method of fabricating a semiconductor device, a substrate including a circuit area and an overlay mark area is provided. Conductive gate patterns are formed on the substrate in the circuit area such that the overlay mark area is free of the gate patterns, and conductive contact patterns are formed on the substrate between the gate patterns in the circuit area. A mirror pattern is formed on the substrate in the overlay mark area, where the mirror pattern and the contact patterns comprising a same reflective material. Related semiconductor devices, overlay marks, and fabrication methods are also discussed.
摘要:
Disclosed is a polytrimethylene terephtalate conjugate fiber having high self-crimpability, which is prepared by conjugate-spinning two types of polytrimethylene terephtalates having different intrinsic viscosities in which a difference between the intrinsic viscosities ranges from 0.05 to 0.15 into a side-by-side fiber. Also, the polytrimethylene terephtalate conjugate fiber prepared by the conjugate-spinning undergoes a false twisting process, leading to development of three-dimensional high self crimpability and sufficient bulky property in the resulting fiber.