Methods of forming integrated circuit devices using anti-penetration films to block acid transfer into anti-reflective coatings
    4.
    发明授权
    Methods of forming integrated circuit devices using anti-penetration films to block acid transfer into anti-reflective coatings 有权
    使用抗渗透膜形成集成电路器件以阻止酸转移到抗反射涂层中的方法

    公开(公告)号:US08323876B1

    公开(公告)日:2012-12-04

    申请号:US12818408

    申请日:2010-06-18

    申请人: Tae-Hwan Oh

    发明人: Tae-Hwan Oh

    IPC分类号: G03F7/26

    摘要: Provided are a semiconductor structure and a method of fabricating a semiconductor device. The method includes: preparing a substrate or an etch-target layer which is to be patterned; forming a first anti-reflective coating, which contains silsesquioxane resin and a cross-linking catalyst, on the substrate or the etch-target layer; forming an anti-penetration film and a second anti-reflective coating by causing a cross-linking reaction in a region of the first anti-reflective coating; and forming a photoresist pattern on the anti-penetration film.

    摘要翻译: 提供半导体结构和制造半导体器件的方法。 该方法包括:制备待图案化的衬底或蚀刻目标层; 在衬底或蚀刻靶层上形成含有倍半硅氧烷树脂和交联催化剂的第一抗反射涂层; 通过在第一抗反射涂层的区域中引起交联反应形成抗渗透膜和第二抗反射涂层; 并在抗渗透膜上形成光致抗蚀剂图案。

    Low voltage operational amplifier
    5.
    发明申请
    Low voltage operational amplifier 有权
    低压运算放大器

    公开(公告)号:US20060290427A1

    公开(公告)日:2006-12-28

    申请号:US11429772

    申请日:2006-05-08

    申请人: Tae-Hwan Oh

    发明人: Tae-Hwan Oh

    IPC分类号: H03F3/45

    摘要: An operational amplifier includes a differential amplifier for amplifying differential input signals to generate differential amplified signals. The operational amplifier also includes first and second single-ended amplifiers that each amplify the differential amplified signals to respectively generate first and second single-ended output signals that are differential with respect to each-other.

    摘要翻译: 运算放大器包括用于放大差分输入信号以产生差分放大信号的差分放大器。 运算放大器还包括第一和第二单端放大器,其每个放大差分放大信号以分别产生相对于另一个差分的第一和第二单端输出信号。

    Low voltage operational amplifier
    7.
    发明授权
    Low voltage operational amplifier 有权
    低压运算放大器

    公开(公告)号:US07449951B2

    公开(公告)日:2008-11-11

    申请号:US11429772

    申请日:2006-05-08

    申请人: Tae-Hwan Oh

    发明人: Tae-Hwan Oh

    IPC分类号: H03F3/30

    摘要: An operational amplifier includes a differential amplifier for amplifying differential input signals to generate differential amplified signals. The operational amplifier also includes first and second single-ended amplifiers that each amplify the differential amplified signals to respectively generate first and second single-ended output signals that are differential with respect to each-other.

    摘要翻译: 运算放大器包括用于放大差分输入信号以产生差分放大信号的差分放大器。 运算放大器还包括第一和第二单端放大器,其每个放大差分放大信号以分别产生相对于另一个差分的第一和第二单端输出信号。