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公开(公告)号:US12193226B2
公开(公告)日:2025-01-07
申请号:US18344957
申请日:2023-06-30
Applicant: Kioxia Corporation
Inventor: Keiichi Sawa
IPC: H01L29/66 , H01L29/788 , H10B41/10 , H10B41/27 , H10B41/35
Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of U-shaped memory strings, each of the plurality of U-shaped memory strings including a first columnar body, a second columnar body, and a conductive connection body. The conductive connection body connects the first columnar body and the second columnar body. A plurality of first memory cells are connected in series in the first columnar body and are composed of a plurality of first conductive layers, a first inter-gate insulating film, a plurality of first floating electrodes, a first tunnel insulating film, and a first memory channel layer. The plurality of first floating electrodes are separated from the plurality of first conductive layers by the first inter-gate insulating film. A plurality of second memory cells are connected in series in the second columnar body, similarly to the plurality of first memory cells.
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公开(公告)号:US11751397B2
公开(公告)日:2023-09-05
申请号:US17850699
申请日:2022-06-27
Applicant: KIOXIA CORPORATION
Inventor: Yuta Saito , Shinji Mori , Atsushi Takahashi , Toshiaki Yanase , Keiichi Sawa , Kazuhiro Matsuo , Hiroyuki Yamashita
CPC classification number: H10B43/27 , H01L21/02672 , H01L29/045
Abstract: In one embodiment, a semiconductor storage device includes a stacked body in which a plurality of conducting layers are stacked through a plurality of insulating layers in a first direction, a semiconductor layer penetrating the stacked body, extending in the first direction and including metal atoms, and a memory film including a first insulator, a charge storage layer and a second insulator that are provided between the stacked body and the semiconductor layer. The semiconductor layer surrounds a third insulator penetrating the stacked body and extending in the first direction, and at least one crystal grain in the semiconductor layer has a shape surrounding the third insulator.
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公开(公告)号:US11737262B2
公开(公告)日:2023-08-22
申请号:US17224356
申请日:2021-04-07
Applicant: Kioxia Corporation
Inventor: Keiichi Sawa
IPC: H01L29/66 , H10B41/27 , H01L29/788 , H10B41/10 , H10B41/35
CPC classification number: H10B41/27 , H01L29/66825 , H01L29/788 , H01L29/7889 , H10B41/10 , H10B41/35
Abstract: According to one embodiment, a nonvolatile semiconductor memory device includes a plurality of U-shaped memory strings, each of the plurality of U-shaped memory strings including a first columnar body, a second columnar body, and a conductive connection body. The conductive connection body connects the first columnar body and the second columnar body. A plurality of first memory cells are connected in series in the first columnar body and are composed of a plurality of first conductive layers, a first inter-gate insulating film, a plurality of first floating electrodes, a first tunnel insulating film, and a first memory channel layer. The plurality of first floating electrodes are separated from the plurality of first conductive layers by the first inter-gate insulating film. A plurality of second memory cells are connected in series in the second columnar body, similarly to the plurality of first memory cells.
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公开(公告)号:US11785774B2
公开(公告)日:2023-10-10
申请号:US17659881
申请日:2022-04-20
Applicant: KIOXIA CORPORATION
Inventor: Keiichi Sawa , Kazuhiro Matsuo , Kazuhisa Matsuda , Hiroyuki Yamashita , Yuta Saito , Shinji Mori , Masayuki Tanaka , Kenichiro Toratani , Atsushi Takahashi , Shouji Honda
IPC: H10B43/27 , H10B41/10 , H01L29/792 , H10B43/20 , H10B43/35
CPC classification number: H10B43/27 , H10B41/10 , H10B43/20 , H01L29/7926 , H10B43/35
Abstract: In one embodiment, a semiconductor device includes a substrate, insulating films and first films alternately stacked on the substrate, at least one of the first films including an electrode layer and a charge storage layer provided on a face of the electrode layer via a first insulator, and a semiconductor layer provided on a face of the charge storage layer via a second insulator. The device further includes at least one of a first portion including nitrogen and provided between the first insulator and the charge storage layer with an air gap provided in the first insulator, a second portion including nitrogen, provided between the charge storage layer and the second insulator, and including a portion protruding toward the charge storage layer, and a third portion including nitrogen and provided between the second insulator and the semiconductor layer with an air gap provided in the first insulator.
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公开(公告)号:US20220302162A1
公开(公告)日:2022-09-22
申请号:US17412743
申请日:2021-08-26
Applicant: Kioxia Corporation
Inventor: Hiroyuki Yamashita , Yuta Saito , Keiichi Sawa , Kazuhiro Matsuo , Yuta Kamiya , Shinji Mori , Kota Takahashi , Junichi Kaneyama , Tomoki Ishimaru , Kenichiro Toratani , Ha Hoang , Shouji Honda , Takafumi Ochiai
IPC: H01L27/11582 , H01L27/11556 , H01L29/423 , H01L21/28
Abstract: According to one embodiment, a semiconductor storage device includes a plurality of electrode films on a substrate, spaced from one another in a first direction. A charge storage film is provided on a side face the electrode films via a first insulating film. A semiconductor film is provided on a side face of the charge storage film via a second insulating film. The charge storage film includes a plurality of insulator regions contacting the first insulating film, a plurality of semiconductor or conductor regions provided between the insulator regions and another insulator region.
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公开(公告)号:US11349033B2
公开(公告)日:2022-05-31
申请号:US17022328
申请日:2020-09-16
Applicant: Kioxia Corporation
Inventor: Tomoki Ishimaru , Shinji Mori , Kazuhiro Matsuo , Keiichi Sawa , Akifumi Gawase
IPC: H01L29/786 , H01L27/108 , H01L29/267 , H01L29/08 , H01L29/417 , H01L29/40
Abstract: A semiconductor device of an embodiment includes a first electrode, a second electrode, a first metallic region provided between the first electrode and the second electrode and includes at least one metallic element selected from the group consisting of indium (In), gallium (Ga), zinc (Zn), aluminum (Al), magnesium (Mg), manganese (Mn), titanium (Ti), tungsten (W), molybdenum (Mo), and tin (Sn), a second metallic region provided between the first metallic region and the second electrode and includes the at least one metallic element, a semiconductor region provided between the first metallic region and the second metallic region and includes the at least one metallic element and oxygen (O), an insulating region provided between the first metallic region and the second metallic region and is surrounded by the semiconductor region, a gate electrode surrounding the semiconductor region, and a gate insulating layer provided between the semiconductor region and the gate electrode.
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公开(公告)号:US11335699B2
公开(公告)日:2022-05-17
申请号:US17136621
申请日:2020-12-29
Applicant: KIOXIA CORPORATION
Inventor: Keiichi Sawa , Kazuhiro Matsuo , Kazuhisa Matsuda , Hiroyuki Yamashita , Yuta Saito , Shinji Mori , Masayuki Tanaka , Kenichiro Toratani , Atsushi Takahashi , Shouji Honda
IPC: H01L27/11582 , H01L29/792 , H01L27/11578 , H01L27/11519 , H01L27/1157
Abstract: In one embodiment, a semiconductor device includes a substrate, insulating films and first films alternately stacked on the substrate, at least one of the first films including an electrode layer and a charge storage layer provided on a face of the electrode layer via a first insulator, and a semiconductor layer provided on a face of the charge storage layer via a second insulator. The device further includes at least one of a first portion including nitrogen and provided between the first insulator and the charge storage layer with an air gap provided in the first insulator, a second portion including nitrogen, provided between the charge storage layer and the second insulator, and including a portion protruding toward the charge storage layer, and a third portion including nitrogen and provided between the second insulator and the semiconductor layer with an air gap provided in the first insulator.
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公开(公告)号:US11974432B2
公开(公告)日:2024-04-30
申请号:US17412743
申请日:2021-08-26
Applicant: KIOXIA CORPORATION
Inventor: Hiroyuki Yamashita , Yuta Saito , Keiichi Sawa , Kazuhiro Matsuo , Yuta Kamiya , Shinji Mori , Kota Takahashi , Junichi Kaneyama , Tomoki Ishimaru , Kenichiro Toratani , Ha Hoang , Shouji Honda , Takafumi Ochiai
IPC: H10B43/27 , H01L21/28 , H01L29/423 , H10B41/27
CPC classification number: H10B43/27 , H01L29/40114 , H01L29/40117 , H01L29/42324 , H01L29/4234 , H10B41/27
Abstract: According to one embodiment, a semiconductor storage device includes a plurality of electrode films on a substrate, spaced from one another in a first direction. A charge storage film is provided on a side face the electrode films via a first insulating film. A semiconductor film is provided on a side face of the charge storage film via a second insulating film. The charge storage film includes a plurality of insulator regions contacting the first insulating film, a plurality of semiconductor or conductor regions provided between the insulator regions and another insulator region.
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公开(公告)号:US11844219B2
公开(公告)日:2023-12-12
申请号:US17854072
申请日:2022-06-30
Applicant: Kioxia Corporation
Inventor: Yuta Saito , Shinji Mori , Keiichi Sawa , Kazuhisa Matsuda , Kazuhiro Matsuo , Hiroyuki Yamashita
IPC: H10B43/27 , H01L21/324 , H01L23/532 , H01L21/28
CPC classification number: H10B43/27 , H01L21/324 , H01L23/53295 , H01L29/40117
Abstract: A semiconductor device includes a semiconductor layer containing metal atoms, a charge storage layer provided on a surface of the semiconductor layer via a first insulating film, and an electrode layer provided on a surface of the charge storage layer via a second insulating film. The thickness of the first insulating film is 5 nm or more and 10 nm or less. The concentration of the metal atoms in the semiconductor layer is 5.0×1017 [EA/cm3] or higher and 1.3×1020 [EA/cm3] or lower.
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