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    Charge control device for a system with multiple electron beams
    1.
    发明授权
    Charge control device for a system with multiple electron beams 有权

    公开(公告)号：US11087950B2

    公开(公告)日：2021-08-10

    申请号：US16112832

    申请日：2018-08-27

    Applicant: KLA-TENCOR CORPORATION

    Inventor： Christopher Sears ,  Luca Grella

    IPC: H01J37/10 ,  H01J37/153 ,  H01J37/06 ,  H01J37/22 ,  H01J37/28

    Abstract: Systems and methods to focus and align multiple electron beams are disclosed. A camera produces image data of light from electron beams that is projected at a fiber optics array with multiple targets. An image processing module determines an adjustment to a voltage applied to a relay lens, a field lens, or a multi-pole array based on the image data. The adjustment minimizes at least one of a displacement, a defocus, or an aberration of one of the electron beams. Using a control module, the voltage is applied to the relay lens, the field lens, or the multi-pole array.

    Space charge insensitive electron gun designs
    4.
    发明授权
    Space charge insensitive electron gun designs 有权

    公开(公告)号：US11302510B2

    公开(公告)日：2022-04-12

    申请号：US16100812

    申请日：2018-08-10

    Applicant: KLA-TENCOR CORPORATION

    Inventor： Christopher Sears ,  Luca Grella

    IPC: H01J37/063 ,  H01J37/073 ,  H01J37/24 ,  H01J37/28 ,  H01J37/065

    Abstract: Electron gun systems with a particular inner width dimension, sweep electrodes, or a combination of a particular inner width dimension and sweep electrodes are disclosed. The inner width dimension may be less than twice a value of a Larmor radius of secondary electrons in a channel downstream of a beam limiting aperture, and a Larmor time for the secondary electrons may be greater than 1 ns. The sweep electrode can generates an electric field in a drift region, which can increase kinetic energy of secondary electrons in the channel.

    Method and system for charge control for imaging floating metal structures on non-conducting substrates
    5.
    发明授权
    Method and system for charge control for imaging floating metal structures on non-conducting substrates 有权

    公开(公告)号：US10460903B2

    公开(公告)日：2019-10-29

    申请号：US15387388

    申请日：2016-12-21

    Applicant: KLA-Tencor Corporation

    Inventor： Arjun Hegde ,  Luca Grella ,  Christopher Sears

    IPC: H01J37/153 ,  H01J37/10 ,  H01J37/18 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28

    Abstract: A scanning electron microscopy system is disclosed. The system includes a sample stage configured to secure a sample having conducting structures disposed on an insulating substrate. The system includes an electron-optical column including an electron source configured to generate a primary electron beam and a set of electron-optical elements configured to direct at least a portion of the primary electron beam onto a portion of the sample. The system includes a detector assembly configured to detect electrons emanating from the surface of the sample. The system includes a controller communicatively coupled to the detector assembly. The controller is configured to direct the electron-optical column and stage to perform, with the primary electron beam, an alternating series of image scans and flood scans of the portion of the sample, wherein each of the flood scans are performed sequential to one or more of the imaging scans.

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