Invention Grant
- Patent Title: Space charge insensitive electron gun designs
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Application No.: US16100812Application Date: 2018-08-10
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Publication No.: US11302510B2Publication Date: 2022-04-12
- Inventor: Christopher Sears , Luca Grella
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J37/063
- IPC: H01J37/063 ; H01J37/073 ; H01J37/24 ; H01J37/28 ; H01J37/065

Abstract:
Electron gun systems with a particular inner width dimension, sweep electrodes, or a combination of a particular inner width dimension and sweep electrodes are disclosed. The inner width dimension may be less than twice a value of a Larmor radius of secondary electrons in a channel downstream of a beam limiting aperture, and a Larmor time for the secondary electrons may be greater than 1 ns. The sweep electrode can generates an electric field in a drift region, which can increase kinetic energy of secondary electrons in the channel.
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