公开(公告)号：US09874597B2

公开(公告)日：2018-01-23

申请号：US14696891

申请日：2015-04-27

Applicant: KLA-TENCOR CORPORATION

Inventor： Mark McCord ,  Alan Brodie ,  James George ,  Yu Guan ,  Ralph Nyffenegger

IPC: G01R31/26

CPC classification number: G01R31/2635 ,  G01R31/2601

Abstract: Light-emitting devices, such as LEDs, are tested using a photometric unit. The photometric unit, which may be an integrating sphere, can measure flux, color, or other properties of the devices. The photometric unit may have a single port or both an inlet and outlet. Light loss through the port, inlet, or outlet can be reduced or calibrated for. These testing systems can provide increased reliability, improved throughput, and/or improved measurement accuracy.

公开(公告)号：US20170074810A1

公开(公告)日：2017-03-16

申请号：US15352398

申请日：2016-11-15

Applicant: KLA-Tencor Corporation

Inventor： David L. ADLER ,  Kirk Bertsche ,  Mark McCord ,  Stuart Friedman

IPC: G01N23/203 ,  H01J37/244 ,  G01N23/225 ,  H01J37/28

CPC classification number: G01N23/203 ,  G01N21/956 ,  G01N21/95607 ,  G01N23/20 ,  G01N23/2251 ,  G01N23/2252 ,  G01N2223/304 ,  G01N2223/611 ,  G01N2223/646 ,  G03F1/84 ,  G03F1/86 ,  G03F7/70616 ,  G03F7/7065 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2817

Abstract: A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.

Abstract translation: 公开了一种用于检查和检查缺陷的方法和装置，其中提高了数据收集。 在一个实施例中，在粒子束系统中使用多个或分段检测器。

公开(公告)号：US20150316411A1

公开(公告)日：2015-11-05

申请号：US14699880

申请日：2015-04-29

Applicant: KLA-TENCOR CORPORATION

Inventor： Mark McCord ,  Yu Guan ,  James George

IPC: G01J1/18 ,  G01J1/04 ,  G01J3/02 ,  H05B33/08

CPC classification number: G01J1/04 ,  G01J1/0252 ,  G01J1/0403 ,  G01J1/18 ,  G01J1/42 ,  G01J3/0251 ,  G01J3/0286 ,  G01J2001/1673 ,  G01J2001/4247 ,  H05B33/0815 ,  H05B33/089

Abstract: The present disclosure provides methods and apparatus for testing light-emitting diodes (LEDs), for example, measuring the optical radiation of an LED. In a method, a pulse-width modulated signal is provided to the LED. One or more characteristics of the PWM signal are varied so as to provide a forward voltage, Vf, corresponding to a target junction temperature, Tj, of the LED. The optical radiation of the LED is measured when the LED obtains the target junction temperature.

Abstract translation: 本公开提供了用于测试发光二极管（LED）的方法和装置，例如测量LED的光辐射。 在一种方法中，向LED提供脉冲宽度调制信号。 改变PWM信号的一个或多个特性以提供对应于LED的目标结温Tj的正向电压Vf。 当LED获得目标结温时，测量LED的光辐射。

公开(公告)号：US09165742B1

公开(公告)日：2015-10-20

申请号：US14627940

申请日：2015-02-20

Applicant: KLA-Tencor Corporation

Inventor： Richard Simmons ,  Douglas Masnaghetti ,  Mark McCord ,  Fred E Stanke ,  Scott Young ,  Christopher Sears

IPC: H01J37/26 ,  H01J27/00 ,  H01J37/06 ,  H01J37/28

CPC classification number: H01J37/06 ,  H01J37/026 ,  H01J37/28 ,  H01J2237/0044 ,  H01J2237/061

Abstract: Embodiments of the present disclosure are directed to an electron beam imaging/inspection apparatus having an electron source device to direct flood electrons on a sample immediately before image acquisition or inspection. The apparatus comprises a first device configured to charge a sample in a first mode, wherein the first device includes an electron source configured to provide a flood beam of charged particles to a first area of the sample. The apparatus also comprises a second device configured to generate a primary beam of electrons and characterize an interaction between the primary beam and a second area of the sample within the first area in a second mode. The apparatus is configured to switch from the first mode to the second mode less than 1 second.

Abstract translation: 本公开的实施例涉及一种具有电子源装置的电子束成像/检查装置，用于在图像采集或检查之前立即将样品引导到样品上。 该装置包括被配置为以第一模式对样本进行充电的第一装置，其中第一装置包括电子源，该电子源被配置为将带电粒子的泛光束提供到样品的第一区域。 该装置还包括被配置为产生主电子束的第二装置，并且在第二模式中表征主光束和第一区域内的样品的第二区域之间的相互作用。 该装置被配置为在第一模式下切换到第二模式小于1秒。