公开(公告)号：US09874597B2

公开(公告)日：2018-01-23

申请号：US14696891

申请日：2015-04-27

Applicant: KLA-TENCOR CORPORATION

Inventor： Mark McCord ,  Alan Brodie ,  James George ,  Yu Guan ,  Ralph Nyffenegger

IPC: G01R31/26

CPC classification number: G01R31/2635 ,  G01R31/2601

Abstract: Light-emitting devices, such as LEDs, are tested using a photometric unit. The photometric unit, which may be an integrating sphere, can measure flux, color, or other properties of the devices. The photometric unit may have a single port or both an inlet and outlet. Light loss through the port, inlet, or outlet can be reduced or calibrated for. These testing systems can provide increased reliability, improved throughput, and/or improved measurement accuracy.

公开(公告)号：US09526150B1

公开(公告)日：2016-12-20

申请号：US14242371

申请日：2014-04-01

Applicant: KLA-Tencor Corporation

Inventor： Yu Guan

IPC: H01J7/24 ,  H01J13/32 ,  H01J17/28 ,  H01J19/74 ,  H01J61/52 ,  H05B37/02 ,  B60Q1/14 ,  F21S8/10 ,  H05B33/08 ,  F21Y101/02 ,  F21Y103/00

CPC classification number: H05B37/0227 ,  B60Q1/14 ,  B60Q1/1407 ,  B60Q1/1415 ,  B60Q1/1423 ,  B60Q1/143 ,  B60Q1/1438 ,  B60Q1/1446 ,  F21S43/00 ,  F21Y2101/00 ,  F21Y2115/10 ,  G01J1/0414 ,  G01J1/0488 ,  G01J1/32 ,  G01J2001/0481 ,  G01J2001/4252 ,  H05B33/0869 ,  H05B33/0872 ,  H05B37/02

Abstract: The stabilization of a light-emitting diode (LED) calibration standard includes a light-emitting diode (LED), or an array of LEDs; a cylindrical hood surrounding the LED; an interior baffle for keeping the light output of the LED, and ambient light from behind the LED, from escaping to the other side; a photodetector for receiving the light output of the LED and generating a signal proportional to luminous output; and a hood surrounding the photodetector. A variable current source receives the signal and stabilizes the LED light output by adjusting the operating current of the LED to maintain a constant light output from the LED.

Abstract translation: 发光二极管（LED）校准标准的稳定包括发光二极管（LED）或LED阵列; 围绕LED的圆柱形罩; 用于保持LED的光输出的内部挡板和来自LED后面的环境光从逸出到另一侧; 用于接收LED的光输出并产生与发光输出成比例的信号的光电检测器; 以及围绕光电检测器的罩。 可变电流源通过调节LED的工作电流来接收信号并稳定LED光输出，以保持LED的恒定光输出。

公开(公告)号：US20150316411A1

公开(公告)日：2015-11-05

申请号：US14699880

申请日：2015-04-29

Applicant: KLA-TENCOR CORPORATION

Inventor： Mark McCord ,  Yu Guan ,  James George

IPC: G01J1/18 ,  G01J1/04 ,  G01J3/02 ,  H05B33/08

CPC classification number: G01J1/04 ,  G01J1/0252 ,  G01J1/0403 ,  G01J1/18 ,  G01J1/42 ,  G01J3/0251 ,  G01J3/0286 ,  G01J2001/1673 ,  G01J2001/4247 ,  H05B33/0815 ,  H05B33/089

Abstract: The present disclosure provides methods and apparatus for testing light-emitting diodes (LEDs), for example, measuring the optical radiation of an LED. In a method, a pulse-width modulated signal is provided to the LED. One or more characteristics of the PWM signal are varied so as to provide a forward voltage, Vf, corresponding to a target junction temperature, Tj, of the LED. The optical radiation of the LED is measured when the LED obtains the target junction temperature.

Abstract translation: 本公开提供了用于测试发光二极管（LED）的方法和装置，例如测量LED的光辐射。 在一种方法中，向LED提供脉冲宽度调制信号。 改变PWM信号的一个或多个特性以提供对应于LED的目标结温Tj的正向电压Vf。 当LED获得目标结温时，测量LED的光辐射。

公开(公告)号：US20140308456A1

公开(公告)日：2014-10-16

申请号：US14247197

申请日：2014-04-07

Applicant: KLA-Tencor Corporation

Inventor： Yu Guan ,  Francisco Kole

IPC: B05D1/06 ,  B03C7/02 ,  B05B5/00

CPC classification number: B05B5/00 ,  B05B5/0255 ,  B05B5/0533 ,  G01N15/0227 ,  G01N2001/2893 ,  G01N2015/0046 ,  H01J2237/2826

Abstract: An apparatus for the controlled deposition of particles onto a film or a substrate, including: a frame arranged to support a film or a substrate having first and second surfaces facing in first and second opposite directions, respectively; a nozzle arranged to emit a stream of particles charged with a first polarity toward the first surface; and an electrode: charged with a second polarity, opposite the first polarity, and located adjacent the second surface; and arranged to attract the stream of particles to a region of the first surface. A line orthogonal to the first surface passes through the region and the electrode.

Abstract translation: 一种用于将颗粒受控沉积到膜或基底上的装置，包括：框架，其被布置成支撑分别具有面向第一和第二相反方向的第一和第二表面的膜或基底; 喷嘴，布置成朝向第一表面发射带有第一极性的颗粒物流; 以及电极，充电具有与所述第一极性相反的第二极性，并且位于所述第二表面附近; 并布置成将颗粒流吸引到第一表面的区域。 与第一表面正交的线通过该区域和电极。